Compact Type Dual-Rod Cylinder Series CXSJ

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

LEC-OM02904

13.3 . 5 13.4 . 5 13.5 . 6 13 1 13. 13 13.1 13.11

CE

13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

HRX-OM-Q026

AL47 13 Pump breaker trip AL48 Pump inverter error AL49 Air exhaust fan stoppage 14 12: Water-cooled type model does not generate this alarm. 13: Power supply "-20" specification model does not generate this alarm.

ZP3

M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.

4-channel Flow Monitor ( compatible)

Set each P1/P2 (set value), referring to the Accumulated output mode on page 31.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Rear Flange Standard stroke (mm) Without auto switch With auto switch Long stroke (mm) Standard stroke (mm) Bore (mm) L1 L1 B L A B L A Metric Inch Metric Inch 14 15.5 18.5 22.5 12 16 20 25 35 to 100 35 to 100 75 to 200 75 to 300 17 17 19.5 22.5 5 to 30 5 to 30 5 to 50 5 to 50 26 26 32 35.5 3.5 3.5 4.5 5 14 15.5 18.5 22.5 11.5 11.5 12.5 14.5 31 31 42 45.5 22 22 29.5 32.5 3.5 3.5 4.5 5 11.5

IZx-OMP0064

Dimensions Ionizer/ IZS40 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600 1900 31 1900 2320 38 2320 2500 41 2500 bar length Model Symbol for n (No. of cartridge), L IZS40 fitting A (mm) 06 13 08 15 10 22 Symbol for A Ionizer/ IZS41, IZS42 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600

AC

SAC1000, #1 + #2 + #3 + #13 SAC2000, #1 + #2 + #3 + #13 SAC2503, #1 + #2 + #3 + #13 SAC4000, #1 + #2 + #3 + #13 SAC4006, #1 + #2 + #3 + #13 SAC5000, #1 + #2 + #3 + #13 SAC6000, #1 + #2 + #3 + #13 AC1000 AC2000 AC2500, 3000 AC4000 AC4000-06 AC5000 AC6000 1.1-8 Air Combination Filter Regulator + Lubricator AC1010 to 4010 JIS symbol AC3010 AC2010 AC1010 Filter regulator Lubricator Standard Specifications

0.4

VQ7 Enclosure C4 C6 C8 C0 F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 T1 T3 M1 M2 M3 With 4 One-touch fitting With 6 One-touch fitting With 8 One-touch fitting Without One-touch fitting (With clip) Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/S kits

VQ4000

B A 24.6 A B 38 48 14 12 5 3 1 B A 30 45 14 3 5 1 12 2-5.6 Mounting hole Manual override 2-5.6 Mounting hole 45 30 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 5-Rc 1/4, 3/8 1(P),

T

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

Modular F.R.L. Unit

It is an assembly of a piston and a gasket (KSYP-13).

C76

13 CS1 C76 C85 C95 Floating joint/Series JA JA25/40 CP95 NCM NCA D-X 20(mm) Data M Max. operating tension and compression power kgf (KN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31 5 6 8 11 8 11 17 22 9 13 0.5 0.75 250 (2.5) 440 (4.4) 6-10-41 42 Series C76R Auto Switch

C76

13 CS1 C76 C85 C95 Floating joint/Series JA JA25/40 CP95 NCM NCA D-X 20(mm) Data M Max. operating tension and compression power kgf (KN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31 5 6 8 11 8 11 17 22 9 13 0.5 0.75 250 (2.5) 440 (4.4) 6-10-41 42 Series C76R Auto Switch

SFOD-OMT0009CN

) . 28 1 No.SFOD-OMT0009CN-B (2) . 29 (3) . 30 5. . 31 5.1 . 31 (1) C PWR . 31 (2) M PWR . 31 (3) CI . 32 5.2 . 33 (1) . 33 (2) . 34 6.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1) 11 (Pitch) P=10.5 4.5 12.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 M3 x 0.5 (A port) 13.5 A A 13 10 (Pitch) P=10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [51.1] 57.8 50.4 43.9 Refer

IDG

Construction Refer to pages 14-19-30 to 31.