Table of Contents

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Table of Contents

(mm) A Weight (g) D1 L1 L2 D2 M Model Nylon Urethane 9 1 8 KQ2T04-U01 20 14 10 4 6.0 6.0 21.5 10.4 10 16 18 1 4 KQ2T04-U02 22 15 11 1 8 KQ2T06-U01 3 8 KQ2T06-U03 24 23 21.5 10 23.5 6 1 4 KQ2T06-U02 17 14 12.8 13.9 13.9 17 20 10 24.5 26 17 12 2-applicable tubing 1 8 1 4 KQ2T08-U01 KQ2T08-U02 22.5 24.5 15 20 26 14 12 15.2 8 23 26.3 18.2 18.5 3 8 KQ2T08-U03 17 25.5 27 28 1 8 KQ2T10-U01 29.5

NCQ2/CQ2

NCQ2 CD inch 3/16 3/16 5/16 3/8 NCQ2 L1 CQ2 L1 Stroke range (mm) A CL CB CT B CU CW CX CZ L 2 x N Cap bolt CT CB 12 16 20 25 5 5 8 10 5 to 30 5 to 30 5 to 50 5 to 50 51.5 55 63 67.5 45.5 49 54 57.5 12 14 20 24 4 4 5 5 28 30.5 31.5 32.5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 11.5 11.5 12.5 14.5 14 15.5 18.5 22.5 CD hole H10 Axis d9 Mounting and Auto Switches Made to Order

Compact Cylinder

10st 27 28.5 29.5 32.5 10st 44.5 47 52 57.5 5st 45.5 48 56 62.5 Axis d9 CD hole H10 12 16 20 25 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 RR CU CW L B CL A CX +0.4 +0.2 Bore size (mm) CX CZ L L1 N RR CZ 0.1 0.3 12 16 20 25 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 15.5 18.5 22.5 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6 6 9 10 Rod end male thread Double clevis bracket material: Carbon

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Compact Hydraulic Cylinder

A1 L1 R1 U1 NDH10 U (H8) +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 0.1 0.3 9 9 16 16 16 18 22 22 36 38 55 55 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 Part no.

Table of Contents

58 70 88 104 14.6 7 20 24 29 35 14 14 13 17 17 39.5 45.5 53.5 67 83 106 129 30 32 38 50 57 3.6 3.6 3.5 4.5 4.5 5.8 5.8 6.5 8.5 10 14 14 40.8 40.8 46.7 67.3 67.3 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) RB0806 RB0806 RB1007 RB1412 RB1412 6 6 7 12 12 10 12 14 17 MY1M25 MY1M32 MY1M40 66 80 91 6 6 6 54 67 78 13 16 17.5 MY1M50 MY1M63 6 6 40 52 20 26 66 77 26 31 5.5 5.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 5 st 10 st 20 st 32 40 50 38.5 33.5 17 12 36 18 20 14 5 10 38.5 33.5 17 12 36 18 22 14 6 10 53.5 43.5 28 18 44 22 28 20 7 14 Double clevis bracket material: Cast iron For details about the rod end nut and accessory brackets, refer to page 7-6-20.

CQ2

12 16 20 25 32 CU CQS CQ2 Bore (mm) X L1 MU 14 15.5 18.5 22.5 28.5 10.5 12 14 17.5 23.5 12 16 20 25 32 Above auto switch: D-A73/A80.

AC Servo Motor Driver (Pulse input type/Positioning type ）

. 14-9 14.3.4 Checksum . 14-9 14.3.5 Time-out processing . 14-9 14.3.6 Retry processing . 14-10 14.3.7 Initialization . 14-10 14.3.8 Communication procedure example . 14-11 14.4 Command and data No. list . 14-12 14.4.1 Reading command . 14-12 14.4.2 Writing commands . 14-18 14.5 Detailed explanations of commands . 14-20 14.5.1 Data processing . 14-20 14.5.2 Status display mode . 14-21 14.5.3

Made to Order

Applicable bore size D E M N T CD CT CU CW CX CZ RR L Y CQ-D032-XC26C 32 30.7 45 34 6.6 1 10 5 14 20 12.5 36 10 52.5 20 CQ-D040-XC26A 40 39.1 52 40 6.6 1 10 6 14 22 16.5 36 10 52.5 20 CQ-D040-XC26B 19.5 CQ-D040-XC26C 12.5 CQ-D050-XC26A 50 48.5 64 50 9 1.5 14 7 20 28 16.5 44 14 66 28 CQ-D050-XC26B 19.5 CQ-D050-XC26C 12.5 CQ-D063-XC26A 63 61.3 77 60 11 2 14 8 20 30 16.5 44 14 66 28 CQ-D063-

AC Servo Motor Driver (Network card type ）

(P980) . 20-19 20.4.4 Identification & Maintenance (I&M) . 20-20 20.4.5 Reset To Factory . 20-21 20.5 STATE TRANSITION . 20-22 20.5.1 Basic State Machine . 20-22 20.5.2 FSA state . 20-25 20.5.3 Controlword/Statusword . 20-27 20.5.3.1 Controlword . 20-27 20.5.3.2 Statusword . 20-30 20.6 CONTROL MODE . 20-36 20.6.1 Selection of control mode . 20-36 20.6.2 Control switching . 20-37 20.6.3 Profile

Air Cylinder

14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14

Table of Contents

Unit Air Filter + Regulator + Lubricator AC10 to 60 Page 14-2-5 Filter Regulator + Lubricator AC10A to 40A Page 14-2-16 Air Filter + Regulator AC10B to 60B Page 14-2-18 Air Filter + Mist Separator + Regulator AC20C to 40C Page 14-2-20 Filter Regulator + Mist separator AC20D to 40D Page 14-2-22 Attachment Specifications Page 14-2-24 Spacers and Brackets: Accessory Page 14-2-29 Made to Order

ZP

Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 Vertical With Adapter: Vacuum Inlet 5 5 5 3 3 6 3 3 6 3 3 12 12 12 14 14 14 20 20 20 Vertical Vertical 2 2 2 Width across flat 7 Width across flat 7 Width across flat 7 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 6 1.2 1.8 1.8 0.8 0.5 0.8 6 8 4 6.5 8.5 4.5 Lateral Lateral With Adapter: Vacuum Inlet With Adapter:

Fluoropolymer Piping Equipment

5.8 LQ1T4A-R8 1/4" 1/4" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R10 1/4" 1/2" 1/4" 6 15 24 15 9 18 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T4A-R17 1/4" 3/8" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R20 3/8" 1/4" 1/2" 6 24 24 9 18 21 21 43 38.5 43 28 28 3.6 LQ1T4A-R33 1/8" 1/2" 1/8" 15 24 15 14 21 14 33 43 33 16.5 28 16.5 1.8 LQ1T5A-R2 3/4" 3/8" 3/4" 7

V100

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Table of Contents

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Air Cylinder Series MB

(1) 40 50 64 80 80 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 + 0.058 0.0 Y-04M (1) 12.5 CS1 + 0.30 + 0.10 + 0.30 +

Smooth Cylinder/Low Speed Cylinder

I-020B I-032B I-040B +0.058 0 +0.058 0 0.1 0.2 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 +0.058 0 +0.058 0 0.1 0.2 0.1 0.2 9 M10 x 1.25 M10 x 1.25 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 +0.070 0 +0.070 0 0.1 0.3 0.1 0.3 12 M14 x 1.5 M14 x 1.5 15.5 16 12 16 24 50 20 14 13 92 69 22 24 55 20 Double Knuckle Joint Y (Max.)