Stations: 12 Stations, Port Size: 1/8" One-touch Fitting, Kit Name: Flat Cable 26P, Electrical Entry: Upper, Cable Length: 1.5m Cable 26P, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: None, Option 5: None, CE Compliant: CE Compliant

Stations: 6 Stations, Port Size: 1/8" One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: None, Option 5: None, CE Compliant: CE Compliant

Stations: 6 Stations, Port Size: 5/16" One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: 3.0m Cable 25 Pin, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: None, Option 5: None, CE Compliant: CE Compliant

Stations: 8 Stations, Port Size: 5/16" One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: 3.0m Cable 25 Pin, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: None, Option 5: None, CE Compliant: CE Compliant

Stations: 5 Stations, Port Size: ø6 One-touch Fitting, Wiring Specification: +COM, Lead Wire Length: 5.0m Cable, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: None, Option 5: None, Option 6: None, CE Compliant: CE Compliant

Stations: 6 Stations, Style: DeviceNet, Manifold Mount Style: DIN Rail Mounting, Option: Name Plate, One-touch Fitting: ø8 (C8) One-touch Fitting, CE Compliant: CE Marked

Stations: 8 Stations, Style: DeviceNet, Manifold Mount Style: DIN Rail Mounting, Option: Name Plate, One-touch Fitting: ø8 (C8) One-touch Fitting, CE Compliant: CE Marked

Stations: 12 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: E (Direct Mount Type), Option: B (Back Pressure Check Valve for All Stations), One-touch Fitting: 00T (N9 5/16" One-touch Fitting)

Stations: 12 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: Direct Mount Type, Option: Back Pressure Check Valve for All Stations, One-touch Fitting: N9 5/16" One-touch Fitting, CE Compliant: -

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

XLA Series

high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XLA- ∗ -F7NJ ∗ - ∗ Series

temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XL-OMY0002

48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN

XLDV Series

Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN

XLF Series

high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

High Vacuum L Type Valve

Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

Conductance l/s Main pumping 14 45 80 160 200 300 800 Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 6.5 to31.5 6.5 to 31.5 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN