VPA4

VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm 5-3-26 3 Dimensions VPA4150-Bottom ported SA VA SA 4-Rc 1/8 pilot port (5-Rc 3/8, 1/2) 4-9 mounting hole (11)

Piping: 41 (Base Mounted), Stations: 4 Stations, A, B Port: M5 (M5X0.8)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: M5 (M5X0.8)

Piping: Base Mounted, Stations: 4 Stations, A, B Port: M5X0.8, Bracket: -

Piping: Base Mounted, Stations: 6 Stations, A, B Port: M5X0.8, Bracket: -

High Pressure Coolant Valve

Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: C6 (ø6 One-touch Fitting), Bracket: F (Bracket)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: 01 (Rc1/8)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: 01N (NPT1/8)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: C4 (ø4 One-touch Fitting)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: Base Mounted, Stations: 2 Stations, A, B Port: ø6 One-touch Fitting, Bracket: Bracket

Piping: Base Mounted, Stations: 2 Stations, A, B Port: Rc1/8, Bracket: -

Piping: Base Mounted, Stations: 2 Stations, A, B Port: NPT1/8, Bracket: -

Piping: Base Mounted, Stations: 2 Stations, A, B Port: NPTF1/8, Bracket: -