Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

DL DM HR K Q Q M 20 20 21 28.5 40 B + Stroke L 25 21 21 29.5 41 E A + Stroke With rod end lock DM End lock mechanism Manual release Non-lock type ) ( 24 11 2-M5 x 0.8 4-N through D 1 Flat washer F Q B + Stroke L A + Stroke Rod end male thread H1 Bore size (mm) L1 H1 C1 X Standard stroke 18.5 10, 15, 20, 25 14 12 M8 x 1.25 28.5 20 50, 75, 100 32.5 M10 x 1.25 22.5 10, 15, 20, 25 C1 17.5 15

CL

20 20 Bore 20 25 32 40 GQ GL GK GA GD Stroke range F GC E 0.033 0 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 20 26 26 32 0.039 0 0.033 0 4 6 3.5 73.5 55 13 8 to 300 0.033 0 7 9 4 83.5 64.5 13 9 to 300 7 9 4 83.5 64.5 13 9 to 300 100.5 8 11 4 90.5 70 16 8 to 300 Bore 20 25 32 40 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 I 28 33.5 37.5 46.5 H 41 45 45 50 PG 22 27 27 29 GR 4 7 7 7 PH 19.5 24 24 24 H1 5

VZA2000

VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position

Serial Transmission System Series EX250 Series EX500

Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Note 1) Double wiring specifications 16 02 16 stations 2 stations Supply/Exhaust block assembly specification Note 2) Specified layout (Up to 32 solenoids possible.) 20 20 stations Nil S R RS Internal pilot specification Internal pilot

Title not found

Temp.140'F (60"C)) Rod Boot (Rubber) (l\rax. Temp. 230"F (1 10'C) ) Stroke Min. = 1" (25mm) Max. :12"(300mm) Others Consult Factory 'When ordering stroke should be in mm not inches. Boi (ln. Nom.) 50mm (2) 63mm (2'/.1 80mm (3) 100mm (4) CyllndrType -J N R H J K Mounting B Bodystuds L Foot F Front Flange G RearFlange C Sgl. Clevis D Dbl.

MGG

(mm) 500st 300st 400st 1 1 0.5 400st 300st 200st 300st 0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 3 (Slide bearing type) 2.5 Deflection Y (mm) 800st 2 700st 600st 1.5 500st 1 300st 400st st: Stroke (mm) 0.5 100st 200st 0 0 20 40 60

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

30 40 50 60 10 20 30 40 50 Allowable end load F (N) 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) MGGL40Stroke 4 (Ball bushing bearing type) 800 st Deflection Y (mm) 3 700 st 600 st 2 500 st 400 st 1 300 st st: Stroke (mm) 100 st 200 st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL50Stroke 3 900 st (Ball bushing bearing type) 800 st Deflection Y (mm) 2 700 st

CNG

flats B1 PH MM 0 0.05 E 0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0. 1 C0. 1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 10 (12) 6 201 to 350 20 to 200 4 to 200 38

Cylinder with Lock Series CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

CNG

Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-5-6 7 Model Selection Series CNG Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 200 200 100 100 40 30 40 50 30 40 50 32 Load weight: m (kg) 40 25 Load weight: m (kg) CL 20 20 20 32 CL1 10 10 25 20 MLGC 5 4 3 5 4 3

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

ZX

unit (F) E P F Model ZX100 K6 Circuit diagram (Circuits other than those with vacuum switch are shown as below.)

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V

VT307

Valve stations 02 2 stations VK A port size (Base mounted) 20 20 stations VZ Max. 20 01 02 common exhaust/individual exhaust 1 8 individual exhaust 1 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Please indicate manifold base type, applicable manifold valve

ITV

Standard part number 80 How to Order Manifolds IITV20 02 5 Ozone resistant specifications AC Valve stations 2 stations 2 AV 8 stations 8 AU OUT port size AF 1/4 3/8 02 03 AR Connection thread type IR PT NPT PF N F VEX AW How to Order Manifold Assemblies AMR Example AWM Electro-pneumatic regulator Blanking plate assembly ITV2030-312S-X26 AWD P398020-13 UNLOCK LOCK RESET SET ITV Electro-pneumatic