reduces flow setting time

(S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Thermo-chiller

Cooling Capacity HRS100-A -20/40(50 Hz) HRS100-A -20/40(60 Hz) 14 14 12 12 Ambient temperature 90F (32C) Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 90F (32C) Ambient temperature 104F (40C) Ambient temperature 104F (40C) 8 8 6 6 4 4 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5]

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

48.4 43.6 42 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8 13.2 22.7 33 14.2 AS32l1F-U03-10A 10 15.9 26.7 37 28 15.6 40 AS32l1F-U03-12A 12 18.5 29.7 40 26.8 17 42 AS42l1F-U04-10A 10 1/2 24 15.9 18.8 27.4 40.3 36.2 50.8 49.2 42.2 40.6 15.6 52 AS42l1F-U04-12A 12 18.5 30.8 43.7 35.1 17 54 AS42l1F-U04-16A 16 23.8 34.8 47.7 32.7 20.6 58 10.4 21.8 32.1 28.7 42.3 40.7 35.9 34.3 3/8 19 16.6 Note 1) Reference

End Lock Cylinder Series CBJ2

M10 x 1 Piping port 2-M5 x 0.8 Cover side (rear side) 5 8 6 20 M5 x 0.8 20.3 25 23 14 2.3 9 6 33 21 0 -0.3 18.3 9.5 42 15 55.5 + Stroke 28 83.5 + Stroke 2-5.5 Mounting hole With rear end lock / CBJ2L16-HN Piping port 2-M5 x 0.8 6 8 8 Cover side (front side) 2-M10 x 1 5 20 M5 x 0.8 19.8 23 25 14 2.3 9 6 33 0 -0.3 18.3 12.5 12.5 15 42 28 8 50 + Stroke 86 + Stroke 2-5.5 Mounting hole 5 Series

MRHQ

27.5 7 11 45 42 69 8 Angle adjustment bolt 54 2-8.5 through 2-14 depth of counter bore 4 107 3-R3 +0.030 0 3-6H9 depth 8 (one each on three sides) 12 10 +0.030 0 3-6H9 long groove depth 4 (one each on three sides) M5 x 0.8 Port B M5 x 0.8 Port A 50h9 0 -0.062 4-M6 x 1 depth 10 I N J E A D P A A M N R SMC R E O P 17 P T 21.5 27.5 A I R R G Y 7 R A 8 17.5 I 32 8 48 42 Side A Side B 12-11-16

HRS100/150

L/min 42/56 Pump capacity Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid outlet, circulating fluid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Pump drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) HEA IDH Supply side pressure range

7.4

C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5

MGC

9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port (R)) R 3.5 3.5 10 24 12 X A 2 1 P 3 R Manual override 34 41 3.5 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 38.5 300 Cover dia. 1.6 Cross section 0.34 mm2 SMC 35.5 2(A) port PE 16 12 7.5 14.5 7 7.5 7.5 3-Rc 1/8 1(P), 2(A), 3(R) port M5

Rotary Gripper Series MRHQ

screw attachment ) 6 12 30.4 Max. 14 4-M8 x 1.25 Depth 12 (two on opposite side) 63 24 M5 x 0.8 3-R3 2 4 Finger opening port 17 32 23 27.5 7 11 45 42 69 8 54 2-8.5 through 2-14 depth of counter bore 14 107 Angle adjustment bolt 3-R3 12 3-6H9 depth 8 (one each on three sides) +0.030 0 10 3-6H9 long groove depth 4 (one each on three sides) +0.030 0 M5 x 0.8 Port B M5 x 0.8 Port A 50h9 0 0.062

MXH

6 60 30 108 60 30 6 8-2-17 16 Series MXH Dimensions: MXH20 LT 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 3-M6 x 1.0 through Bottom hole dia 5.1 6-9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

CE

stroke 25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 For rod nut and accessory bracket, refer to page 10-12-20.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

+0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the