Brake mechanism added

41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

IC

VBA VE VY1 SW round head Phillips screws G M3 x 8 Panel PPA Gasket A AL Display protective cover Tighten screws by 1/4 to 1/2 turn after the heads are flush with the panel. 14-8-41

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

max (from 3 of graph MY2H/M3) = 60 (Nm) MX M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 MTS Load factor 3 = M3/M3 max = 10.33/60 = 0.17 MY 5.

MB

+ 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) D-A59W CA2 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 15 25 25 2 (Different sides or Same side) CS1 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) C76 1 10 25 25 25 30 2 (Different sides or Same side) 15 C85 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4,

MHZ2/MHZJ2

Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 5.

CLK1

15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

VQ4000

KG 72309-0114-70-15, etc.

Slider Type/Ball Bushing Bearing

to load's center of gravity (cm) 32 6 10 15 20 Bore size (mm) 40 6.48 3.6 + Lo 15 5 + Lo 45.5 6.5 + Lo 80.7 8 + Lo Allowable load mass (WA) (kg) 6.

With Factory Installed

'nstall with at least 60mm of free space below ~ "5 0 the unit to allow easy access. '3 02 t0 ~ OTightening torque of mounting screw (M3) for 0.1 I' gauge and blanking plate is 3 ~ 5 kgf' cm. 0. 15 O~ 0.2 0.3 0.4 0.5 0.6 0.7 0 8 0.9 1 Inlet pressure MPa 00 1000 2000 3000 Flow rale Q/ min iANRi Cautions on Use AR4001 04 AR4001-04 .When the primary pressure has been released, 0.6 I'-r-. the

SFOD-OMT0009CN

AREA 15 (OUT10) 3) 35 SETON ON ON(INP1INP2AND) 16 INP INP ON INP ON 1) 36 SVRE ON ONON 2) EMGOFF 17 *ESTOP 2) 37 1OFF (*ALARM1*ALARM4OR) *ALARM 18 -COM1 DC24V0V OUT0OUT7 19 -COM1 38 -COM1 20 -COM2 DC24V0V OUT8BUSYAREASETONINPSVRE*ESTOPALARM 39 -COM2 40 -COM2 1)ON SVRE ON 20 2) 3)BUSYAREA I/O2BUSY1 BUSY4AREA1 AREA4 41 No.SFOD-OMT0009CN-B (2) I/O2 No. 1 +COM3 DC24V24V BUSY1BUSY4AREA1AREA4INP1INP4

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

275 300 312.5 337.5 350 375 400 3/5 R 3/5 R L3 261 280 299 318 337 356 375 L4 12 15 12 15 11.5 14.5 17.5 Manual override (non-locking) Stations 16 18 17 19 20 4-One-touch fitting (ports P, R) Applicable tube O.D.: 12 L1 423 460.5 448 485.5 498 DIN rail holding screw L2 412.5 450 437.5 475 487.5 Manual override In case of locking type, turn after pushing in.

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

2.5 3 4 x M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5

48

How to Order Needle Valve/Flow Rate Characteristics 0 2 F A 1 AS 1 M3 X790 06 AS1201F-M350 45 40 35 30 25 20 15 10 5 0 0.5 0 1 1.5 2 2.5 3 3.5 4 4.5 5 6 7 8 Inlet pressure: 0.5 MPa Port size Push-lock type Body size Flow rate [L/min (ANR)] 1 M3 x 0.5 M3 M3 x 0.5 Applicable tubing O.D.

T

T Slightly flexible 1.0 MPa max. at 20C Black Blue White Soft Nylon Tubing Series TS 15-6-8 15-6-9 15-6-3 15-6-4 15-6-5 Yellow Flame resistant (Equivalent to UL-94 standard, material V-0) Red Green VMG Blue Yellow FR Double Layer Polyurethane Tubing Series TRBU Green Black White 15-6-21 15-6-13 15-6-15 15-6-22 Red Blue Flexible 0.8 MPa max. at 20C Black Flame resistant (Equivalent to UL-94

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ235 Rubber 12.6 (0.7) 15 or less 20 or less 53 VQZ200 VQZ225 Metal 10.0 (0.55) 14 or less 18 or less N.O. VQZ245 Rubber 12.6 (0.7) 15 or less 20 or less VQZ315 Metal 16.2 (0.9) 17 or less 22 or less N.C. VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3 Metal stopper Air cylinder Rotary actuator Air gripper Directional control valve

Title not found

High flow rate: Cv factor 0.16 to 2.1 Compact: Single valve volume reduced 15% (Class 3) Clip type Quick change coil Clip design makes coil replacement easy.