20

Nozzle size Coil tube Fitting Blow gun Recommended system Distance S coupler TCU0604l-1-20-X6 KQ2H06-02S Up to 20 mm VMG1ll-02-01 KK4P-06H 1 TCU0604l-1-20-X6 KQ2H06-02S Up to 40 mm VMG1ll-02-02 KK4P-06H 1.5 TCU0805l-1-20-X6 KQ2H08-02S Up to 60 mm VMG1ll-02-03 KK4P-08H 2 TCU1065l-1-20-X6 KQ2H10-02S Over 60 mm VMG1ll-02-04 KK4P-10H 2.5 l: B (Black), W (White), R (Red), BU (Blue), Y (Y ellow

VCA

36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted

Air Pilot Operated

--ry] f+r-q | r + r i | | t-?-!+-<-{ l r l tF)-)-+++--(lr{ I , _ ' I{ANIFOLD BLOCK PART NO. NO. PRESSURE CYLII{OEF " A & 8 " EXHAUST "EA & E8" SIDE aoTTor !OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

5 Port Solenoid Valve, Series VQC

Note 4) For external pilot option, "-R", indicate the external pilot specification "R" for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38

SL5200

Vespel is a registered trademark of DuPont. 27 Single Stage Regulator for Ultra High Purity Intermediate flow Series SL5400 For UHP gas delivery Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Springless design (No poppet spring in the wetted area) How to Order Port Number q w e r SL54 S M FV4 FV4 02 2PW Delivery pressure Code Delivery pressure

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

VFM300

-02-08 VM-30CR VFM350-02-30R Push button (Mushroom) Black Green Yellow VM-30CB VFM350-02-30B VM-30CG VFM350-02-30G VM-30CY VFM350-02-30Y Red VM-32CR VFM350-02-32R Manual operation Push button (Extended) Black Green Yellow VM-32CB VFM350-02-32B VM-32CG VFM350-02-32G VM-32CY VFM350-02-32Y With a set of red, black, green, yellow VM-33C VFM350-02-33 Push button (Flush) Red VM-34CR VFM350-02-34R

VFM300

-02-06 VFM350-02-06S Toggle lever VFM350-02-08 VFM350-02-30R VM-30CR Red VM-30CB Black VFM350-02-30B Push button (Mushroom) VM-30CG Green VFM350-02-30G VM-30CY Yellow VFM350-02-30Y VFM350-02-32R VM-32CR Red VM-32CB Black VFM350-02-32B Push button (Extended) VM-32CG Green VFM350-02-32G VM-32CY Yellow VFM350-02-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VFM350-02

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

HRS100/150

Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

LEC-OM02904

PB26) kpps pulse r/min (6) (No.PB28) (7) 7 14 7 7.6.4 (1) (CDP) (a) No.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

0 o u r t !1 q i !2 e !

2/3 Port Valve for Various

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 The VX series will be revised shortly.

energy saving effect

Applicable model Minimum operating flow rate [L/min] To circulating fluid outlet r t HRSH100-20 w HRSH150-HRSH200-HRSH250-W25 r q HRS-BP005 y HRSH250-AHRSH300-A40 To circulating fluid return port r t u r e Parts List No.

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

Serial Transmission System Series EX250 Series EX500

Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Note 1) Double wiring specifications 16 02 16 stations 2 stations Supply/Exhaust block assembly specification Note 2) Specified layout (Up to 32 solenoids possible.) 20 20 stations Nil S R RS Internal pilot specification Internal pilot