Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1 Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3
4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread depth 3 Attachment mounting thread 4-M3
0 2H9 depth 3 4-M3 x 0.5 thread depth 5.5 (mounting thread) 0.02 5.2 Prepared hole dia. 2.6 through (mounting hole) Note) +2.2 0 0 -0.1 4 16 29 23 18 7.6 0.02 11H9 depth 2 +0.043 0 0 -0.7 23 12 When closed 11.2 When open 15.2 16.4 0.05 37.8 6 12 2-M3 x 0.5 thread depth 6 (mounting thread) 57 M3 x 0.5 4-M2.5 x 0.45 (finger closing port) (attachment mounting thread) M3 x 0.5 (finger opening
stopper) Max. 10.5 (metal stopper) 2.4 Piping port 2-M3 x 0.5 Without magnet and switch rail 2 12 2-M2 x 0.4 depth 2.2 For rail mounting (mm) F Model H J M S Z AA 12 2-M2 x 0.4 depth 3 For magnet mounting MXP65 25 38 33.5 37 5 45 2 35 53 48.5 47 10 60 9.5 MXP6-10 8 Series MXP Dimensions MXP10 2-M3 x 0.5 depth 3 Z 3 With metal stopper 2-M3 x 0.5 depth 5 V K 5 4 G Max. 5.5 Max. 3.5 N 20 M
An M3 port will be installed on the top side of the manifolds SUP/EXH block. How to Order Valves (Example) S0712 R -5G-C4 External pilot port (M3 x 0.5) External pilot Note 1) The dual 3-port valve is not available.
(A) (z) Z m x g Examine M3. M3 = m x g x Y = 5.5 x 9.8 x 30/1000 = 1.6 [Nm] 2B = M3/M3max = 1.6/17.0 = 0.10 Refer to [3] Calculation for Overall Center of Gravity in the Y-axis on front matter 7. M3 Find the value of M3max when Va = 200 mm/s from Graph (11) x.
M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.
Bore 6 10 16 6.4 8.1 9.2 5.5 7 8 2.4 3.2 4 M3 X 0.5 NTJ-006A M4 X 0.7 NTJ-010A Clevis pins and set rings are attached.
Max. tightening torque ft lbf (N m) Max. screw-in depth L (mm) Max. tightening torque ft lbf (N m) Max. screw-in depth L (mm) Model Model Bolt used Bolt used 6 6.5 0.7 {0.9} 0.7 {0.9} M3 x 0.5 M3 x 0.5 MXF8 MXF8 6 5.5 0.7 {0.9} 0.7 {0.9} M3 x 0.5 M3 x 0.5 MXF12 MXF12 10 6.5 1.5 {2.1} 1.5 {2.1} M4 x 0.7 M4 x 0.7 MXF16 MXF16 12 9.5 3.2 {4.4} 1.5 {4.4} M5 x 0.8 M5 x 0.8 MXF20 MXF20 18 Long
(M3 x 40) VZ1000-11-4SV3000-69A : Manifold stations Manifold Specification Sheets Refer to DIN rail dimension tables on page 85.
Axial piping (6) MXS6P 32 Max. 5.6 Operating port 2-M3 x 0.5 12 5.5 11.5 8 Dimensions not indicated are the same as basic type. 55 MXS Series Air Slide Table Dimensions MXS 8 2-M3 X 0.5 thread 4 deep Operating port 2-M5 X 0.8 7 2 3.5 J 6 Max.9.5 (With stroke adjuster at retraction end) I Basic type 6.5 4 6.5 7 7 3.8 NA-M3 X 0.5 thread 4 deep 14.6 K 7 3.8 14.6 KA 2 (With stroke adjuster at
Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the known unit. Also, the flow characteristics line shown in the Graph (2).
4/5 Port Air Operated Valve Series SYJA3000 Model Pilot port size Valve model Configuration Port size Effective area (mm2 ) (Cv) Weight (2) (g) 22 2 position single SYJA3120-M3 Body ported 5 port base mounted (With sub-plate) 25 2 position double SYJA3220-M3 0.9 (0.05) 3 position closed center SYJA3320-M3 M3 X 0.5 M3 X 0.5 3 position exhaust center SYJA3420-M3 28 3 position pressure center
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated
0.5 3 5.5 (With stroke adjuster at extension end) 18 Stroke adjuster at retraction end Stroke adjuster at extension end N-M3 x 0.5 thread depth 4 (Insert) K 12.5 2-M2.5 x 0.45 thread depth 3 Vacuum suction port M5 x 0.8 6.5 3 3 5.5 3 5.5 5.5 7 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 2 2-M2.5 x 0.45 thread depth 3 Operating port 2-M3 x 0.5 6 3H9 depth 2.5 +0.025 0 HA GA
M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 16 32 2-M3 x 0.5 through 6.5 counter bore depth 5 (Same on the opposite side) 3.4 through 3 3 45 45 5.5 M2.5 x 0.45 x 6L (Cap screw) M3 x 0.5 x 12.5L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2-M3 x 0.5 through Steel ball Plug 2-M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no
MHY MHW Option JIS Symbol Double acting MRHQ Body Option/End Boss Type Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.
MHY MHW Option JIS Symbol Double acting MRHQ Body Option/End Boss Type Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.