LEF-OM006xx

100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200,

7.4

Symbol Length Nil 150 mm 3 300 mm 6 600 mm 10 1000 mm Base Mounted Part no. Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

ISO Cylinder

301 to 400 401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

C95

Standard stroke (mm) 50/100/150/200/250/300 Max. possible stroke (mm) 300 *different in % related to full span.

Series AP500

MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300

LEY-OM007

30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20

SMC Pneumatic Clean Series

Up to 300 Up to 300 50 35 32 Up to 300 63 80 100 50 40 40 35 H A 8 6 6 5 H1 47 38 31 26 I 13<10> 20<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5 14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4

25

0 50 100 150 200 250 0 0 50 50 100 100 0.5 s 0.5 s 150 150 1 s 1 s 200 200 2 s 250 250 2 s 5 s 5 s 300 300 421 IZS40/41/42 Series Note) Static neutralization features are based on the data using the charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

LEC-OM07605CN

(d) ( FR-BSF01FR-BLF) () 0.5MHz5MHz [mm] 2(AWG12)) (L1L2L3) (UVW) 4 4 2 FR-BSF01(3.5 (110) 95 0.5 25 (22.5) 11.25 0.5 (65) 33 MC MCCB 1 L1 L2 L3 (65) 4.5 (4 ) 2 2(AWG10)) FR-BLF(5.5 MC MCCB 7 L1 L2 L3 31.5 130 7 85 80 35 (4 ) 160 180 2.3 11 23 11. (e) ( FR-BIF) 10MHz 200V: FR-BIF [mm] FR-BIF 4 mA 300 LECSS2-T MC MCCB 29 L1 42 4 5 L2 L3 29 7 58 44 11 24 11.

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

AZ1000

V3 V3 MPA MPA 1 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Specifications AZ1001 AZ1002 AZ1006 AZ1015 AZ1010 Operating Parameters 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 1 to 10 psig (0.007 to 0.07 MPa) Delivery pressure Gas Select compatible materials of construction for the gas Vacuum to 300

Series AK1000

V V 3) Not available with SH material. 4) Source pressure rating is limited to 300 psig (2.1 MPa) or less. 5) PTFE seats reduce seat abrasion for flow cycle application. Gas permeation is greater with PTFE than PCTFE. Porting Configuration 1) Other range available.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

MU

3 contained in one kit, and can be ordered using the kit number for each cylinder bore size. 2.4-7 Series MUW Basic: MUWB Rod end male thread (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27

asilltr

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.