Fluoropolymer Piping Equipment

200 0 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) Temperature (C) 942 LQ1/LQ3/LVN/LQHB Series Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Chemical Compatibility LVC Acetic acid 100% LVA Acetone 100% Note 1,2) LVH Ammonium fluoride 40% Ammonium hydroxide 30% LVD Butyl acetate 100% LVQ Methylne chloride 100% LVP Hydrochloric

10-cls-e

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

RSH/RS1H

300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000

Pneumatic Transfer System Series MF

None 1 set 2 sets Description Symbol Nil AS AW Angle A unit (Air system 1) 45 90 180 45 90 180 Note 1) Air supply unit, 1 set breakdown: Supply block (slide table side) 1pc. Supply ring (plate side) 2pcs. SA Y59B MF 200 32 Straight Type Number of auto switches 3-dimensional transfer single unit Bore size 2pcs. 1pc. "n" pcs.

Table of Contents

Series CQ2 Compact Cylinder: Large Bore Size Type Double Acting, Single Rod 125, 140, 160, 180, 200. How to Order . Precautions. Specifications. Construction. Dimensions . Series CQ2W Compact Cylinder: Large Bore Size Type Double Acting, Double Rod 125, 140, 160, 180, 200 . How to Order . Precautions. Specifications. Construction. Dimensions .

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the C4, C6. 3 68 59 70 61 66 57 6 116 107 121 112 114 105 8 148 139 155 146 146 137 10 180 171 189 180 178 169 2 52 43 53 44 50 41 20 340 331 359 350 338 329 4 84 75 87 78 82 73 5 100 91 104 95 98 89 7 132 123 138 129 130 121 9 164 155 172 163 162 153 11 196 187 206 197 194 185 12 212 203 223 214 210 201 13 228 219 240 231 226 217 14 244 235

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQ4 Response time Life VQZ VQZ1000 10ms 200 million cycles Built-in One-touch fittings for easier piping VQZ2000 12ms VQD VQZ3000 15ms VZS Dispersion accuracy2ms Metal seal, Single solenoid with light and surge voltage suppressor lntegral One-touch fittings save on installation time and labor and can be easily removed if necessary.

Compact Hydraulic Cylinder

2145 2420 1430 1485 1540 1595 1650 1705 1760 1815 1870 200 4305 4930 2680 2805 2930 3055 3180 3305 3430 3555 3680 344 6155 6955 4075 4235 4395 4555 4715 4875 5035 5195 5355 566 Specific Product Precautions Be sure to read this before handling the products.

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting and design

One-touch Fittings

Branch universal female elbow Branch universal male elbow Double branch universal male elbow Triple branch universal male elbow Branch male elbow P.180 KQ2ZF P.180 KQ2Z P.180 KQ2ZD KQ2ZT P.177 KQ2LU P.181 Double branch Y Branch Y KQ2UD KQ2U P.184 P.183 Box wrenches and socket wrenches may interfere with oval type release buttons.

reduces flow setting time

Current model Indicator window direction: 0 Indicator window direction: 180 The numerical indication can be checked without looking into the controller.

MLGP

, 175, 200, 250, 300, 350 167.5 66 76.5 111.5 19 64.2 55.5 WA Bore size (mm) JB K Q R S L ML T U VA VB OA OB PA PB PW MM NN st 25 st 50 25 < st 100 50 < st 100 100 < st 200 200 < st 300 300 < st 350 80 100 7.5 46 56 54 62 25 31 10.6 17.5 14.5 25.5 32.5 74 89 52 64 174 210 75 90 198 180 210 140 166 28 50 128 124 200 200 300 300 52 72 156 188 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5

MLGP

, 175, 200, 250, 300, 350 167.5 66 76.5 111.5 19 64.2 55.5 WA Bore size (mm) JB L ML T U VA VB OA OB PA PB PW R S K Q MM NN st 25 st 50 25 < st 100 50 < st 100 100 < st 200 200 < st 300 300 < st 350 80 100 46 56 54 62 7.5 25 31 10.6 17.5 14.5 25.5 32.5 74 89 52 64 174 210 75 90 198 180 210 140 166 28 50 128 124 200 200 300 300 52 72 156 188 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5

17

st 300 st or less Over 100 st 200 st or less Over 25 st 100 st or less WA Bore size (mm) X YY YL Z PA PB PW R S T U VA VB Q 25 st or less Over 300 st Over 200 st 300 st or less Over 100 st 200 st or less Over 25 st 100 st or less 28 11 14.5 25.5 74 89 52 64 174 210 75 90 198 236 156 188 180 210 140 166 28 48 52 72 128 148 200 220 300 320 42 35 54 47 92 85 128 121 178 171 M12 x 1.75 100 124

MLGP

150, 175, 200, 250, 300, 350 66 76.5 111.5 19 M14 64.2 55.5 WA Bore size (mm) JB K Q R S L ML T U VA VB OA OB PA PB PW MM NN st25 st50 25200180 210 140 166 28 50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x

MLGP

150, 175, 200, 250, 300, 350 66 76.5 111.5 19 M14 64.2 55.5 WA Bore size (mm) JB K Q R S L ML T U VA VB OA OB PA PB PW MM NN st25 st50 25200180 210 140 166 28 50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x

Compact

load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 L6 200 200 200 200 L6 [mm] L6 [mm] L6 [mm] L6 [mm] m Z 100 100 100