MU

Additional weight 0.23/50 stroke Stroke 100 stroke 0.46 + 100 / 50 X 0.23 = 0.92kg Standard Stroke (mm) Size Standard stroke Max. stroke(mm) 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Contact SMC for any intermediate strokes that are not indicated above, as they will be produced upon receipt of order.

Vacuum

Suction Flow Rate/Air Consumption* scFM lNaminl zHooD 4.60 (130) {ow To Order Note) vAc. pon size Note) EXH. port size jsg"g"[Ed,r,{ef ts",biJ $, I ]o?t-qt l_-!el!

LEJ-OM002xx

(Manufacturable stroke range:LEJB40/ 200 to 2000mm, LEJB63/ 300 to 3000mm) Product Weight Series LEJB40 Stroke [mm] 200 300 400 500 600 700 800 900 1000 1200 1500 2000 Weight (kg) 5.7 6.4 7.1 7.7 8.4 9.1 9.8 10.5 11.2 12.6 14.7 18.1 Extra weight of lock (kg) S2:0.2 / S6:0.3 / T6:0.2 Series LEJB63 Stroke [mm] 300 400 500 600 700 800 900 1000 1200 1500 2000 3000 Weight (kg) 11.5 12.7 13.8 15.0

Table of Contents

Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

HRX-OM-W060

Status (7): TEMP READY signal output continues since the temperature is now back within the Out Time range of 200 sec even though it was temporarily outside the Low range. Status (8): TEMP READY signal turns OFF when 200 sec has passed after the temperature rises above the High range. TEMP READY alarm (AL12) is simultaneously activated.

Table of Contents

(mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

High Power Cylinder Series RHC

to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56 21 20.5 16 24 61.5 53 21 200 to 1000 40 N NE NA NB NF ND NN P S WH ZZ MM K JD JC Bore size (mm) 252 1/4 192 15.0 13 M22 x 1.5 30 26 M8 x 1.25 33.5 22 5 30.5 43 20 5.8 to 8.8 257 1/4 193 19.6 17 M24 x 1.5 36.9 32 M10 x 1.25 37 27 5.5 25.5 39 25

Magnetically Coupled Rodless Cylinder

, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

Ejector Valve Unit Series ZYY/ZYX 1

How to Order Electronic Vacuum Pressure Switch 15 130 ZSE1 00 X Compatible model Output specifications For Series ZYX3000 129 NPN open collector, single output Analog, no output, 3 turn setting 14 For Series ZYY3000 130 NPN open collector, single output Analog, no output, 200 degree setting 15 Wiring specifications NPN open collector, double output Analog, no output, 3 turn setting 16 Lead

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

Ejector Valve Unit Series ZYY/ZYX

How to Order Electronic Vacuum Pressure Switch 15 130 ZSE1 00 X Output specifications Compatible model 129 For Series ZYX3000 NPN open collector, single output Analog, no output, 3 turn setting 14 130 For Series ZYY3000 NPN open collector, single output Analog, no output, 200 degree setting 15 Wiring specifications NPN open collector, double output Analog, no output, 3 turn setting 16 Lead

HRX-OM-Y098

Status (7): TEMP READY signal output continues since the temperature is now back within the Out Time range of 200 sec even though it was temporarily outside the Low range. Status (8): TEMP READY signal turns OFF when 200 sec has passed after the temperature rises above the High range. TEMP READY alarm (AL12) is simultaneously activated.

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Ejector Valve Unit, Series ZYY/ZYX

How to Order Electronic Vacuum Pressure switch 15 130 ZSE1 00 X Output specifications Compatible models For Series ZYX3000 129 NPN open collector, single output Analog, no output, 3 turn setting 14 For Series ZYY3000 130 NPN open collector, single output Analog, no output, 200 degree setting 15 Wiring specifications NPN open collector, double output Analog, no output, 3 turn setting 16 Lead

VZ5000

) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

Refrigerated Thermo-chiller

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 30 19 Refer to page 94.

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.