CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70 Hexagon width across flats 22 4 x M5 x 0.8 1/8 (Rc, NPT, NPTF) Width across flats 60 4 x M5 x 0.8 70 10 Hexagon width across flats 24 A B 8 A B 40 40 C M12 x 1.75 100 ZPT100H-B16 103 M16 x 1.5 Model A 100 ZPT100H-B12 B 103 B 103 125 ZPT125H-A16 128 Model A 100 ZPT100H-A16 125 ZPT125H-B12 128 M12 x 1.75 125 ZPT125H-B16

10

Solid state auto switch: D-M9m 40 60 80 100 Long: MHL2-mD2 60 80 100 120 M Performance and mounting dimensions are interchangeable with the current model.

LEC-OM02904

(L) W E L d 11 30 11 11.8 (1) ACPWM 30cm 10{IglIgnIgaK(Ig2Igm)}[mA](11.1) K NV M NV-SP NV-SW NV-CP NV-CW NV-HW 1 Ig1 Iga Ig2 Igm Ign BV-C1 NFB 3 NV-L Igl (11.3) Ig2 (11.3) Ign (FR-BIF-(H) ()4.4mA) Iga(11.6) Igm (11.5) 120 120 100 100 80 80 60 60 40 40 [mA] [mA] [mA] [mA] 20 20 0 2 0 2 100 5.5 14 38 14 100 5.5 38 8 3.5 22 60 150 8 3.5 22 60 150 30 80 30 80 2] [mm 2] [mm [mm2] [mm2]

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

50 20 40 60 80 Flow rate Q [L/min (ANR)] 59 Flow Rate Characteristics JSXD Series For Water How to read the graph The pressure differential to generate a flow rate of 100 L/min water is as follows.

Ionizer

Air purge: Yes (0.1 MPa) 8 90 Discharge time from 1000 V to 100 V 7 60 6 Catalog specification value: 30 V Discharge time (s) Offset voltage (V) 30 5 0 4 Without sensor 3 30 2 With feedback sensor 60 1 90 0 100 200 300 400 500 0 0 100 200 300 400 500 Installation height of feedback sensor (mm) Installation height of feedback sensor (mm) Ionizer 600 mm Feedback sensor Installation height of

Rotary Table/Rack & Pinion Style Series MSQ

m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 274 Rotary Table/Rack & Pinion Style Series MSQ Table Displacement due to Moment Load (Reference values) 100 Arm The following graphs show the displacement at point A, which is 100 mm apart from the center of rotation, where

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RS1H63 200 200 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 0 0 10 20 30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10

MHK2

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

MHK2

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

Wedge Cam Operation Provides

-25C M 100 100 80 80 Holding force (N) Holding force (N) Pressure 0.6MPa L Pressure 0.6MPa 60 60 0.5MPa 0.5MPa 0.4MPa 40 40 0.4MPa 0.3MPa 0.3MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L(mm) Holding point L(mm) 2.4-10 Series MHK2 Wedge Cam Operation Slide Guide Air Gripper (2 Finger) Effective Holding Force: Series MHKL2 Single acting Indication of effective holding force

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

point L (mm) Gripping point L (mm) W MHK2-25S MHK2-25C M 100 100 Gripping force (N) Gripping force (N) 80 80 Pressure 0.6 MPa L Pressure 0.6 MPa 60 60 0.5 MPa 0.5 MPa 0.4 MPa 40 40 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 528 Series MHK2 Wedge Cam Operation Slide Guide Air Gripper/2-Finger Type Effective Gripping Force:

Wedge Cam Operation Gripper Series MHK2

30 0.4MPa 0.4MPa 30 0.3MPa 20 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L mm Holding point L mm MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Pressure 0.6MPa Holding force N Holding force N 0.5MPa 80 60 0.5MPa 0.4MPa 60 0.4MPa 40 0.3MPa 0.3MPa 40 20 20 0.2MPa 0.2MPa 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L mm Holding point L mm 14 14 14 14 14 14

Bag Filter

NBR FGFS5-60 AL-27S 1 FGFC5-60 11 O-ring FGFL3-40 AL-23S 1 FGFR3-40 FKM FGFL5-60 AL-24S 1 FGFR5-60 FGFS3-40 3 FGFC3-40 AL-20S NBR FGFS5-60 5 FGFC5-60 12 Gasket FGFL3-40 3 FGFR3-40 FKM AL-21S FGFL5-60 5 FGFR5-60 Note 1) Refer to How to Order on page 47 for the part of the model number.

Pilot Operated

N.O. 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 1 2 3 VXD21 VXD22 VXD23 Symbol Nil 2 Valve Symbol Nil 2 Valve N.C. N.O.

5-Port Solenoid Valve

Valve size Valve size 50 50 DOWN DOWN At 300 mm/s Can drive cylinders of Existing up to 50 2 Valve size Valve size 63 63 Existing DOWN DOWN (80 at 100 mm/s) Can drive cylinders of up to 63 2 80 (125 at 100 mm/s) Can drive cylinders of up to 80 2 (160 at 100 mm/s) 2 Values based on comparison with the existing SMC model For details, refer to page 13.

MVGQ

Nil: Non-locking push type Manual override Body option B: Locking type B (Slotted) 0: Pilot valve individual exhaust type Manual override Manual override Rated voltage 1 2 3 4 5 6 7 9 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other C: Locking type C (Manual) R port P/E port Manual override Light/Surge voltage suppressor

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10