CG5-S

x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130 100 22 to 750 60 40 37 41 60 90 30 29 20 71 16 M12 x 1.75

Electric Actuator with Integrated Guide

(kg) 300 L2 200 Mer a=1000 a=2000 a=3000 L2 (mm) Rolling Yawing m 100 L2 Mer 0 10 50 40 30 20 m Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 L3 (mm) L3 100 m Mey a 10 50 40 30 20 0 Transfer load m (kg) Refer to page 71 for deflection data. 46 50 Non-standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8FNH(X10) Scale: 13% thread depth 9 4-M6 x 1 1.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

connector LO 110 VAC 50/60Hz 5000mm 50 3 With lead wire M [115 VAC 50/60Hz] M plug connector Without lead wire MN 220 VAC 50/60Hz 4 Without connector MO [230 VAC 50/60Hz] Without connector cable WO M8 connector For type "W", DC voltage is only available.

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Usable range

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Courtesy of

SYJ3000/5000/7000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

MNB

32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20

MNB

50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40

Thermo-chiller

Mechanical seal pump Impeller HRLE090-m-20/40 0.5 Usable range 50 Hz Circulating fluid pressure [MPa] 60 Hz 0.4 0.3 Usable range 60 Hz 0.2 50 Hz 0.1 Return port 0 0 10 20 30 40 50 60 70 Circulating fluid flow rate [L/min] * The pump capacity is the capacity of CH1 when 2 L/min are applied to CH2.

2/3 Port Valve

VXD2272/2382/2392 Solenoid Specifications Apparent power VA Inrush Holding Power consumption W (Holding) Temp. rise C (Rated voltage) 5 50 3.5 35 6 50 8 55 6.5 45 8 50 10.5 60 9.5 50 11.5 55 Frequency Hz 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 Model Power AC VXD21 DC AC VXD22 DC AC VXD23 DC Note) OThese are values in ambient temperatures of 20C 5C and application of rated voltage

1.63

= 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 10 10 25 25 25 25 25 25 20 20 20 20 20 20 MGJ JMGP 10 1 1 MGP 10 25 26 100 101 200 100 101 26 25 200 Stroke (mm) Stroke (mm) MGPW MGPW MGPWL32 to 63, MGPWA32 to 63 MGQ (23) L = 50 mm, V = 200 mm/s or less (24) L = 100 mm, V = 200 mm/s or less MGG 100 100 MGC MGF MGZ 50, 63 MGT 50, 63 50, 63 50, 63 50, 63 Load mass m (kg) Load mass

CLQ

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 t Applicable bore size (mm) Applicable snap ring 20 25 32, 40 50, 63 80 100 Part no.

CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

ZP

, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P. 73 Adapter Assembly Part No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Air Slide Table Series MXQ

It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

C95

MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120

REA/REB

500 50 = 6.3kg 20 Sine Rodless Cylinder Slider Type/Slide Bearing Series REAS Max.