Membrane Air Dryer

to 55 5 to 55 5 to 50 5 to 50 Ambient temperature (C) Note 1) Standard Outlet air atmospheric pressure dew point (oC) performance 20 Inlet air flow rate (L/min [ANR]) Note 2) 12.5 31 25 62 50 12 125 100 250 200 360 300 586 500 725 600 125 900 750 150 1190 1000 Outlet air flow rate (L/min [ANR]) 10 Purge air flow rate (L/min [ANR]) Note 3) 2.5 6 25 50 60 86 190 Inlet air pressure (MPa) Inlet

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

4 5.

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Basic Type/Direct Mount Type

(mm) Auto switch model Bore size (mm) 6 10 15 20 25 32 40 50 63 Bore size (mm) Auto switch model D-A9 25 to 63 8 11 8 6 6 7 9 8 8 D-M9 D-A9 D-M9 D-M9W D-M9A D-M9W D-M9A D-Z7/Z80 4.5 6.5 4.5 5 5 5.5 5.5 6.5 7 BMG2-012 9 9 11 9 10 D-Y59/Y7P/Y7W/Y7BA 5 5 6 6 6 D-A9/M9/M9W/M9A The auto switches cannot be mounted in some cases.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Locked condition Released condition 8-21-5 5 Guide Cylinder Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGG L B 32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

Step Motor Controller

Enable switch (Option) 5 6 Key switch Switch for each input 7 Cable Length: 3 meters 8 Connector A connector connected to CN4 of the controller i u 25 22.5 34 RoHS Programless Controller Series LECP1 How to Order C 1 LE N 1 P LEPY10-50 I/O cable length [m] Actuator part number Controller Nil 1 3 5 Without cable 1.5 3 5 (Except cable specifications and actuator options) Example: Enter LEPY10K

V

0 Single 36.0 (2.0) 20 or less 22 or less 2 P o s i t i o n s 3 P o s i t i o n s Rubber Seal VQ41(0, 5)0 39.6 (2.2) 25 or less 27 or less Double Metal Seal VQ42(0, 5)0 36.0 (2.0) 12 or less 12 or less Rubber Seal VQ42(0, 5)0 39.6 (2.2) 15 or less 15 or less Closed Metal Seal VQ43(0, 5)0 32.4 (1.8) 45 or less 47 or less Center Rubber Seal VQ43(0, 5)0 36.0 (2.0) 50 or less 52 or less Exhaust

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Low Friction Cylinders Series MQ

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 10 20.5 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 16 22.5 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 20 24.5 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 25 33.5 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 30, 40 40.5 22 Applicable bore size (mm) Part no.

MY1

(Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8

Cylinder with Lock

5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

IDG

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

HRX-OM-M090

[] 60Hz 50Hz Fig 9.5-1 Heating capacity(HRS012--10, HRS018--10) 9.5.2 HRS012--20,HRS018--20, HRS024--20 1000 1000 Ambient Ambient temperature temperature 800 800 5 20 25 5 Heating capacity [W] 20 25 32 40 [W] 600 600 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.5-2 Heating capacity(HRS012--20, HRS018

MNB

22.4 47.5 M8 x 1.25 5 183 47 1/4 58 63 8.5 31.5 7 9 259 M18 x 1.5 12 55 23 123.5 20.7 M8 x 1.25 5 197 55.5 3/8 58 80 10.5 10 38 11.5 321 M22 x 1.5 61 33 14 157 26 M10 x 1.5 5 245 61.5 3/8 72 100 10 38 10.5 17 341 M26 x 1.5 37.5 15 68 177 26 M10 x 1.5 5 265 69.5 1/2 72 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

to 20 stroke Graph (12) Stroke: Up to 20 stroke 0.1 0.1 0.05 0.05 Mass W (kg) Mass W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 20 25 30 5 0 10 15 20 25 30 Overhang L (mm) Overhang L (mm) Graph (10) Stroke: Up to 30 stroke Graph (13) Stroke: Up to 30 stroke 0.1 0.1 0.05 0.05 Mass W (kg) Mass W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 25 20 30 0 5 10 15 20

MNB

20 111.2 22.4 M8 x 1.25 5 183 47 1/4 58 63 31.5 8.5 7 9 259 M18 x 1.5 12 23 55 123.5 20.7 M8 x 1.25 5 197 55.5 3/8 58 80 38 10.5 10 11.5 321 M22 x 1.5 14 33 61 157 26 M10 x 1.5 5 245 61.5 3/8 72 100 10.5 38 10 17 341 M26 x 1.5 15 68 37.5 177 26 M10 x 1.5 5 265 69.5 1/2 72 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5

HRX-OM-X071

1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature