Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) L: DIN Rail Overall Length n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 148 148 160.5 173 185.5 198 210.5 210.5 223 235.5 248 260.5 273 273 285.5 298 310.5 323 135.5 137.5 137.5 150 162.5 175 187.5 200 200 212.5 225 237.5 250 262.5 262.5 275 287.5 300 312.5 125 112.7 123.2

Ionizer

Air purge: Yes (0.1 MPa) 8 90 Discharge time from 1000 V to 100 V 7 60 6 Catalog specification value: 30 V Discharge time (s) Offset voltage (V) 30 5 0 4 Without sensor 3 30 2 With feedback sensor 60 1 90 0 100 200 300 400 500 0 0 100 200 300 400 500 Installation height of feedback sensor (mm) Installation height of feedback sensor (mm) Ionizer 600 mm Feedback sensor Installation height of

ISO Standard Hydraulic Cylinder

-125, BS5-160 BS5-180, BS5-200 When D-F5BA auto switch is shipped mounted on a cylinder, the above stainless steel screws are used.

V

Hz 3 110 VAC 50/60 Hz 115 VAC 50/60 Hz 2 200 VAC 50/60 Hz 4 220 VAC 50/60 Hz 230 VAC 50/60 Hz E L E C T R I C A L E N T R Y M A N U A L O V E R R I D E G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LN L Type Plug without Lead Wire LO L Type Plug without Connector M M Type Plug with Lead Wire MN M Type Plug without Lead Wire MO M Type

AS

Made to Order (Refer to page 479 for details.) 478 Series AS-FG Speed Controller with One-touch Fitting Stainless Steel Series In-line Type How to Order AS 200 1 F G 06 Made to Order (Refer to the below for details.) Body size 100 200 205 300 400 M5 standard 1/8 standard Applicable tubing O.D.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

LEF-OM006xx

0.35 1 2 5m 5m 10% 3() 452000Hz 1 () 4 5 6 7 8 < -> LEFS40 LEFS40 10 60 60 10 50 50 W(kg) W(kg) W(kg) W(kg) 40 40 30 30 20 20 10 20 20 10 10 10 0 0 0 100 200 300 400 500 V(mm/s) 0 100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02

25

Install the product according to the dimensions shown in the following figure, keeping away from structures or conductive items. 200 200 150 60 150 Unit: mm 435 IZS40/41/42 Series Specific Product Precautions 2 Be sure to read this before handling the products. Mounting Wiring/Piping Caution Warning 11.

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

Compact Manifold Regulator Series ARM5

250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

C92

160, 200, 250, 320, 400, 500 2900 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CA1 2900 160 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Intermediate strokes are available.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 173 162.5 145 14 L n 4 185.5 175 155.5 15 2 148 137.5 124 12 3 160.5 150 134.5 13 5 185.5 175 155.5 15 6 198 187.5 166 16 7 210.5 200 176.5 17 8 210.5 200 187 12 9 223 212.5 197.5 13 2 160.5 150 134.5 13 3 173 162.5 145 14 5 198 187.5 166 16 6 210.5 200

Air Slide Table Series MXW

490 6 63 34 MXW25-200 142 275 155 225 60 540 6 88 59 -X MXW25-225 165 305 175 245 55 55 590 7 113 84 1 MXW25-250 187 335 200 275 60 67 640 7 138 109 1 Individual -X MXW25-275 210 360 225 300 65 80 690 7 163 134 1 MXW25-300 232 395 245 320 60 52 60 740 8 188 159 2 165 Series MXW Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90 (V), D-A93 (V), D-A96

VQ4000

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 110 to 200 Refer to Made to Order Specifications for stroke which exceeds the standard stroke length.