0.01

ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Standard pressure: 100 kPa Standard pressure: 100 kPa Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.4 0.6 Standard pressure Standard pressure 0.5 mm 0.25 mm Detection distance (mm) Detection distance (mm) 0.5 0.3 0.4 0.2 0.3 0.15 mm 0.15 mm 0.2 0.1 0.1 0.03 mm 0.01 mm 0 0 50 0 250 200 150 100 250

Air-hydro Unit

Solenoid valve model VO307-1 0.3 to 0.7 MPa Valve unit Small flow Large flow Solenoid valve type Stop valve Skip valve Valve type Nominal size (mm) 63, 100 100, 160 External pilot pressure N.O No mark 100, 200, 110, 220, 240 No mark N.O AC (50/60 Hz) Coil rated voltage (V) 24, 12 Valve opens when solenoid valve conducts electricity.

39

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

Manifold Specifications

Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 Series VZS3000 Manifold Non plug-in type VV5ZS3-51Station 1Port size Grommet (G) 2-4.5 mounting hole 2n-Rc 1/8, 1/4 Manual override U side (n) (2) (1) Stations D side 300 (Lead wire length) 2-C6, C8 A 2 B 10.7

ZP

to 250 X 50 EPR 20 to 150 X X X The above table covers only general characteristics of subject rubber materials.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4, C6, M5 0 1 34 <39> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23mm2 120.5 <122.5> 300 (Lead wire length) 108 <110

e

A Cable length Standard Stroke M L Z 1 m 3 m 5 m Nominal size Standard stroke (mm) Made to Order Long stroke (-XB11) Stroke range (mm) The remote control type can be selected by adding the above symbols. 16, 25 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 601 to 1000 Strokes are manufacturable in increments of 1 mm, up to 1000 strokes.

Compact Rotary Actuator Series CRQ2

MSZ 350 CRQ2X MSQX MRQ 200 300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

KJ

(mm) Weight (g) L1 L2 L3 D1 D2 Model L1 Nylon Urethane KQ2V04-M5 KQ2V04-01S KQ2V06-M5 KQ2V06-01S KQ2V06-02S KQ2V08-01S KQ2V08-02S KQ2V08-03S KQ2V10-02S KQ2V10-03S KQ2V12-03S KQ2V12-04S KQ2V16-03S KQ2V16-04S 6 14 7 15 26 24 30 47 40 49 63 80 103 110 Reference dimensions after R thread installation. Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.

Vacuum System Peripherals:

Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

Vacuum

&lfifitweBftl L x 36mm W x 59mm H, 4409 Houu incneasd by 250% tage nozzle design allows for suction tlow of to 250% higher than traditional single stage 3-stage nozzle design -in 0ne-Iomt Hffn$ ilt-in One,Touch fittings (O% SUP / O% VAC) for quick and easy process connection. filhn & txlau$ $ilemen f ilter and exhaust Silencer are an part of the vacuum ejector module. exhaust oDtion is also

LEC-OM02704CN

300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15 0.5 LECSC-S8 LE-S80.9 35 15 0.7 1.

Air Slide Table Series MXQ

110 160 (Unit: mm) Note) Refer to page 51 for end lock handling precautions.

HRX-OM-X037

Table 3.1-1 Weight of the product Model Weight kg Option increase HRL100-A-40 Approx.240 Option-D1:+1kg HRL200-A-40 Approx.260 Option-T2:+1kg HRL300-A-40 Approx.330 Option-T3:+18kg* HRL100-W-40 Approx.250 HRL200-W-40 Approx.250 *Applicable only to HRL300-A*-40. 3.1 Transport HRL Series 3-2 HRX-OM-X037 Chapter 3 Transport and Setting Up 3.1.2 Transportation using casters This is a heavy product

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33

Rotary Table/Rack & Pinion Style Series MSQ

MSZ Mass CRQ2X MSQX (g) MRQ 1 2 3 7 Size Basic type 75 105 150 250 High precision type 80 115 165 265 Note) Excluding the mass of auto switches Clean Series Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

Rotary Table/

Measure B Moment of inertia (kgm2) Size 7 3 2 1 0.0001 0.001 0.01 0.1 MSQB7A MSQB3A MSQB2A MSQB1A 1 0.2 0.3 0.4 0.6 0.5 1.0 0.9 0.8 0.7 Rotation time (s/90) Model With external shock absorber Full size (Picture of MSQB1A) With internal shock absorber 73.5 50.5 60 56 A 34.5 41 30 28 A B For high energy 34.5 30.5 28 25 C For low energy With adjustment bolt 20.5 23 18 16 D mm Mass (g) 70 105 150 250

SMC Pneumatic Clean Series

, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note) Consult SMC for long stroke.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers