Air Slide Table Series MXW

200 100 400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 152 Series MXW Air Slide Table Option Specifications Stopper Bolt Assembly Stopper bolt assembly can be ready for the following manner.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 one-touch fitting 800 700 600 500

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

fitting Applicable tube O.D.: 8, 10 L type plug connector M type plug connector DIN terminal Approx. 300 (lead wire length) Approx. 300 83.6 70.6 lead wire length ( ) 80.6 93.6 80.6 74 [75.3] 92.7 61 [62.3] 79.7 61 [62.3] Pg.7 79.7 Max.10 46 57.1 49.5 67.8 75.3 Applicable cord O.D. [52.5] [63.6] 3.5 to 7 14 Series SY3000/5000/7000 DIN Rail Manifold Exploded View SY3000 Type 60 D side R

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

VZ1000

With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D: With connector LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H: Lead wire length 600 mm Type LN, MN: with 2 sockets.

MXW Series Long Stroke Slide Table

200 100 400 500 100 200 300 400 600 500 100 200 300 400 600 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 142 Long Stroke Slide Table MXW Series Construction / Parts List Packing List 5 3 4 6 17 18 15 2 1 21 10 16 19 8 7 9 20 12 13 11 14 Parts List Note Material No.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

MY1

500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

asilltr

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

Air Cylinder NCQ7 Series Compact Cylinder

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

Hydraulic Filters

400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 100 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

Cylinder with Turntable Series MGT

m (kg) Load mass m (kg) 40 50 Larger than 75st 100 25st 50st 30 Larger than 50st 20 50 25, 50st 10 40 30 MGJ 5 4 3 20 MGP 2 10 1 MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass

Air Slide Table

-100 MXQR25-125 MXQR25-150 0.06 0.08 MXQR25-30 MXQR25-150 MXQR25-50 MXQR25-30 MXQR25-50 MXQR25-125 0.08 0.06 MXQR25-20 0.04 MXQR25-20 0.04 MXQR25-10 0.04 0.02 MXQR25-10 0.02 0 0 0 100 200 300 400 500 100 200 300 400 500 800 200 400 600 Load (N) Load (N) Load (N) 7 Series MXQR Dimensions: MXQR 6 For detailed dimensions about the stroke adjuster, refer to Adjuster Options.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load

Compact Cylinder Series CQS

Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Without auto switch: 10 to 70C With auto switch: 10 to 60C Ambient and fluid temperature (No freezing) None, Rubber bumper Rubber bumper Rod end thread Female thread Standard stroke +1.0 0 Through-hole/Both ends tapped common Stroke length tolerance Mounting 12, 16: 1 to 300 mm/s 20, 25: 0.5 to 300 mm/s Piston speed Stroke length

5

, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

AC

Q Model Port size A B C D M P B B E F G H J K L N 22 34.2 42.2 8.5 11 13 23 26 5 7 7 50 70.5 88 AC2041 AC3041 AC4041 248.5 300 187.5 3.5 4 1 5.5 7 9 45 58.5 77 24 35 40 35 29.5 38 30 41 50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 90 117 154 164.5 207.5 259 78 92.5 112 45 55 70 33 Option marks in the dimension diagram show the direction of inclination from port center to gauge center.