Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 LEKFS16 Product weight[kg] 0.9 1 1.1 1.2 1.3 1.4 1.5 1.5 1.6 1.7 0.12 Additional weight with lock[kg] LEKFS25 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 Product weight[kg] 1.7 1.8 1.9 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.4 3.7 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

PF-OMN0009_C

L/min 11 cm ) IN OUT PF3W504 PF3W520 (16 L/min ) (16 L/min ) (4 L/min ) (8 L/min ) [cm] [cm] PF3W540 PF3W511() (100 L/min ) (100 L/min ) (50 L/min ) (40 L/min ) (40 L/min ) (50 L/min ) [cm] [cm] -36No.PF-OMN0009CN-F PF3W521() (250 L/min ) (250 L/min ) [cm] -37No.PF-OMN0009CN-F PVC 3F.S.11 cm IN OUT PF3W511/521(PVC ) (100 L/min ) (250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S

Digital Flow Switch ( compatible)

) [ 100] 100 L/min (2000 L type) [F 1] Page 39 [H_1 ] Hysteresis of OUT1 [dtH1] ON delay time [0.00] 0.00 s [dtL1] OFF delay time [0.00] 0.00 s [ CoL] Display colour of OUT1 [1SoG] Green when ON, Red when OFF (OUT1) [oUt2] Output mode of OUT2 [ HYS] Hysteresis mode [2ot ] Switch operation of OUT2 [ 2_P] Normal output 50% of maximums rated flow range [ 250] 250 L/min (500 L type) [ 500] 500

Digital Flow Switch ( compatible)

] 250 L/min (500 L type) [ 500] 500 L/min (1000 L type) [1000] 1000 L/min (2000 L type) [P_1 ] Set value of OUT1 [F 1] Page 35 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type) [ 100] 100 L/min (2000 L type) [H_1 ] Hysteresis of OUT1 [dtH1] ON delay time [0.00] 0.00 s [dtL1] OFF delay time [0.00] 0.00 s [ CoL] Display colour of OUT1 [1SoG] Green when

Digital Flow Switch

output [ 250] 250 L/min (PFMC7501) [ P_2] Set value of OUT2 2 [ 500] 500 L/min (PFMC7102) [F 2] page 37 [ 1000] 1000 L/min (PFMC7202) [ 25] 25 L/min (PFMC7501) [ H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMC7102) [ 100] 100 L/min (PFMC7202) [F 3] [ r ES] Response time [ 1.0] 1 second page 42 [F10] [ SUb] Sub display [ oUt] Set value page 43 [F20] [ inP] External input 3 [REACUM] Accumulated

OMR0032

LAT3LAT3MLAT3F600 350 700 Min. travel time [ms] Min. travel time [ms] Min. travel time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

Male thread nozzle High efficiency nozzle 600 400 KN-R02-250 KNH-R02-200 350 Flow rate [l/min (ANR)] Flow rate [l/min (ANR)] 500 300 400 KN-R02-200 250 KNH-R02-150 200 300 KN-R02-150 150 200 KNH-R02-100 100 KN-R02-100 100 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] Low noise nozzle with male thread Copper extension

45

(Rail mounting hole pitch 12.5) (Station n) (Station 1) Block separation lever (DIN rail dimension) (mm) (Push type) 2 stations 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 198 198 210.5 223 235.5 248 260.5 260.5 273 187.5 187.5 200 212.5 225 237.5 250 250 262.5 91.5 102 112.5 123 133.5 144 154.5 165 175.5 17 12 13 14 15 16 17 11.5 12.5 SS5X3-45S3DStations BC4 C6 Note) The L1 to L4 dimensions

AC Servo Motor Driver (Pulse input type)

Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection *4 PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes

NAAMS Standards Compliant

150 200 250 300 0 50 100 150 200 250 300 Arm length [mm] Arm length [mm] Bore size: 63, Arm length: 200 mm, Operating pressure: 0.5 MPa With an arm length of 200 mm and an operating pressure of 0.5 MPa, according to the graph, the maximum clamping force is 2000 N.

ZP

0 to 100 10 to 200 X X X X X X X X X X X X X X X X X X X X X X X The above table covers only general characteristics of subject rubber materials.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 0.01 0.01 0.005 0.005 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Tie-rod Type Hydraulic Cylinder

TY TZ V l Z H Z ZZ e f h ZZ 40 R0.5 16 70 60 95 7.5 8 66 58 182 55 25 92 84 208 50 R0.5 16 83 73 108 10 9 73 65 201 60 28 99 91 227 1/4 stroke 63 R0.5 16 90 80 115 12 10 80 72 212 65 30 106 98 238 80 R2.5 30 112 100 162 16 13 90 75 230 80 32 116 101 256 100 R2.5 34 140 118 204 20 16 100 83 250 100 35 123 106 273 1/5 stroke 125 R2.5 34 170 140 234 20 16 100 83 252 100 35 123 106 275 160 R2.5

High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65