Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Electric Actuator

, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 10 30 50 10 30 50 310, 180, 90 320, 180, 90 320, 180, 90 CAT.NAS100-94 CAT.NAS100-78 Gripper Step Motor (Servo/24 VDC) Series LEHF S Type (3 Fingers) Z Type (2 Fingers) With Dust Cover F Type (2 Fingers) Series LEHZ Series LEHZJ Series LEHS Opening/closing

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

Refrigerated Air Dryers Series IDF/IDU

-10, 15E-10 IDU6E-10, 11E-10, 15E-10 Singlephase Singleturn 100 VAC (50 Hz) 110 VAC (60 Hz) 1 kVA IDF-TR1000-3 230 207 190 210 160 9 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) IDF-TR500-4 22 kg 500 VA IDF11E-10, 15E-10 IDU6E-10, 11E-10, 15E-10 IDF-TR1000-4 1 kVA 49 Optional Accessories Specifications/Dimensions IDF-TR1700-5 [Separately installed

5-Port Solenoid Valve

SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

Basic type / Direct mount type Series CY3B/CY3R

CY3B15 CY3B50 1000 500 50 40 30 20 300 200 10 5 100 Usable range Usable range 20 30 40 50 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B63 CY3B20 200 1000 100 500 400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Environment

0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg]

Electric Actuator

15 20 0 10 20 30 40 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey L2 [mm] m 500 500 500 L2 0 0 0 0 5 10 15 20 0 10 20 30 40 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 L3 [mm] 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 0 10 20 30 40 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg

Dual Rod Cylinder Series CXSJ/CXS

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Cylinder with Lock

R1 S5 XD Z 32 E5032 32 10 11 47 26 0.2 0.6 21 18 31 8 38 51 7 10 10 6.6 200 222 40 E5040 36 12 11 54 28 0.2 0.6 24 22 35 10 41 54 9 10 11 6.6 226 250 50 E5050 45 12 15 66 32 0.2 0.6 33 30 45 12 50 65 11 12 12 9 245 277 63 E5063 50 16 15 77 40 0.2 0.6 37 35 50 12 52 67 11 14 15 9 269.5 301.5 80 E5080 63 16 18 99 50 0.2 0.6 47 40 60 14 66 86 12.5 18 15 11 320 360 100 E5100 71 20 18 118 60 0.2

CL

Same side Same side 110C Heat resistant tarpaulin K D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 D-B5 D-B6 n2 2 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

Combination Cylinder

Same side Same side 110C K Heat resistant tarpaulin D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

MGP

100 50 50 40 25 20 10 40 20 30 Load weight m (kg) Load weight m (kg) 32 2 3 4 5 25 20 16 10 5 4 16 2 3 1 1 0.2 0.3 0.4 0.5 0.5 0.2 0.3 0.4 0.1 10 100 0.1 10 100 20 30 40 200 50 50 200 20 30 40 Eccentric distance l (mm) Eccentric distance l (mm) Over 50 stroke Over 100 stroke P=0.5MPa 100 80 63 P=0.5MPa 20 100 25 50 Load weight m (kg) 10 Load weight m (kg) 40 32 20 5 25 4 10 16 20 3 16 2

CG1

TB C-12 type for pivot TT TR Td TE TF TH C-14 type for pivot (29.3) (33.1) (40.4) (49.2) (60.4) (74.6) 28-01 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 13 15 17 21 24 26 36 50 3.2 3.2 4.5 4.5 6 8 11 12 36 43 50 58 70 82 73 90 8 10 12 14 16 18 18 22 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65

Electric Slide Tables

0.25 20 to 400 8 6 2 10 to 200 5 Step motor (Servo/24 VDC) Series LECP1 50, 100 4 1 20 to 400 10 9 4 10 to 150 8 50, 100 150 Series LECPA LESH25 6 2 20 to 400 16 Page 25 2 0.5 10 to 200 4 Symmetrical type/ L type LESH8A 50, 75 1 0.25 20 to 400 8 5 2 10 to 200 5 Servo motor (24 VDC) Series LECA6 LESH16A 50, 100 2.5 1 20 to 400 10 6 2.5 10 to 150 8 50, 100 150 R L LESH25 A 4 1.5 20 to 400

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82 VFS4500

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.1 Speed (mm/s) Speed (mm/s) 50 4.1 2.1 1.1 0.3 0.1 50 2.1 4.1 1.1 0.3 0.1 100 2.1 1.1 0.6 0.2 0.1 100 1.1 2.1 0.6 0.2

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Theoretical Cylinder Thrust Caution 6, 10 50, 63 63 63 3000 H H 100 Theoretical thrust (Holding force) (N) Theoretical thrust (Holding force) (N) 90 2500 Bore size Bore size 10 80 10 H 50 50 70 L 2000 60 1500 50 40 1000 6 6 30 20 500 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 Supply pressure (MPa) Supply pressure (MPa) 8-15-33 33 Series CY1R Weight