CXS

= 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (5) V = 1000 mm/s 3 CXSM CXSL 32 2 Weight m (kg) 25 1 20 0.6 5 10 20 30 40 50 100 Overhang l (mm) 8-28-16 16 Model Selection Series CXS Horizontal Mounting Graph (6) V = Up to 800 mm/s; Up to

Compact

High speed transfer Workpiece direct mounting Long stroke Light load transfer Combining with external guide Long stroke LEC S LEC SS-T Size Work load [kg] Size Work load [kg] Size Work load [kg] Size Work load [kg] 25 25 25 25 6 10 10 10 LEC Y 32 32 32 32 11 20 20 20 Motorless LAT LZ Size Size Size Size 25 32 25 32 25 32 25 32 LC3F2 Stroke [mm] Stroke [mm] Stroke [mm] Stroke [mm] 2000

High Vacuum Angle Valve, XL Series

Electrical entry G Grommet C Conduit T Terminal D DIN terminal XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve Bellows pressure balance, 2 stage voltage switching type Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 100VAC 200VAC Control power supply 5 24VDC P With control power Warning (1) In case there is no control

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Component parts Cable length 1.5 m 3 m 5 m 8 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 Plug MIL standard Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Applicable base VV5Z3-45F For details, refer to page 3-3-8.

C95

27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10 30 35 40 45 45 55 10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3 L3 L1 TG1 T d1 FL d2 d3 CN XD 45 55 65 75 95 115 14 16 21 21 25 25 5 5 5 5 5 5 11.5 12 14 14

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Grommet (G), (H): 10-SY9 40(R)03 04 3 4 5 G H 3/8, 1/2 [4(A), 2(B) port] 29 30 17.5 (Light/surge voltage suppressor) 2 x 5.4 (For mounting) 60 86.5 5 25 27 Manual override 4 A 2 B PE 57 47 + + A B X EB 3 P 1 EA 5 27 25 96.2 23.7 1/8 (Pilot EXH port) 45.9 [48.1] 164.3 [168.7] G: Approx. 300 H: Approx. 600 1/8 (External

Mechanically Jointed Rodless Cylinder Series MY2

1 $1 #0 r $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

27 2 x 5.4 (For mounting) 5 47 B 2 A 4 PE 57 SMC A B B A Manual override X A side: Orange B side: Green 5 EA 1 P 3 EB 96.5 11.8 27 25 (Light/surge voltage suppressor) 1/8 (External pilot port) (L = 300 to 5000) 153.8 148.2 M12 waterproof connector 71.5 34.5 17.5 25 25 15.5 29.5 29.5 3/8, 1/2 (Piping port) 44.5 3 position closed center / exhaust center / pressure center [M12 waterproof connector

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

8 @5 @3 w !6 !5 !1 !2 !0 !3 !4 @6 !7 @3 20, 25 With coil scraper Component Parts No. No.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

Mini Free Mount Cylinder

l M5 x 65 l M5 x 70 l M5 x 75 l C D CUJS12-5 -10 -15 -20 -25 -30 CUJS16-5 -10 -15 -20 -25 -30 CUJS20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CUJB12-5 -10 -15 -20 -25 -30 CUJB16-5 -10 -15 -20 -25 -30 CUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 25 30 35 40 45 50 25 30 35 40 45 50 30 35 40 45 50 55 60 65 70 75 20 8.5 8.5 M4 x 20 l 7.5 9.5 25 M4 x 25 l 10.5 7.5 25 M5 x 25 l With Auto Switch (Built-in

ZP

Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 0 5 1 0 1 Y (Example) Manual override B C Flat cable with power supply terminal block and 3m cable VV5Q11-08C6G2 VQ1100-5 VQ1200-5 VQ1300-5 Series Non-locking push style Push-locking slotted style Push-locking lever style 1 set Manifold base No. 4 setsValve No. (Stations 1 to 4) 1 set Valve No. (Stations 5) 3 setsValve No.

Plate Cylinder

Material: Carbon steel 20 Series MU Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B B A A Hs Hv D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A9 D-M9V D-M9WV D-M9AVL Size A B A B Hs Hv A B A B Hs Hv 25 5 5 5 5 7.5 27.5 1 1 1 1 32 5 5 5 5 14.5 30 1 1 1 1 40 5.5 5.5 5.5 5.5 16.5 37 1.5 1.5 1.5 1.5 50 7

MGG

Parts changed to stainless steel Symbol Part number Note Bore size (mm) 20, 25, 32, 40, 50 !9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!

Tie-rod Type Hydraulic Cylinder

x 28l SWRM Polished round 18SPCC 113 5 18 123 5 80 clevis type C1 100 5 x 30l SWRM Polished round 20SPCC 132 7.5 20 147 5 100 clevis type E B 125 Polished round 22SPCC 5 x 35l SWRM 154 7.5 22 169 5 125 clevis type A 160 Polished round 24SPCC 5 x 35l SWRM 190 7.5 25 205 5 160 clevis type Note) Does not come with other accessories.

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100