2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5

Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

Profile Design ISO/VDMA Air Cylinder Series CP95

100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16 18 35 10 6.6 55 11 5.5 5 50 46.5 15 27 16 21 20 40 10 9 65 15 6.5 5 51 19 63 56.5 15 32 16 21 23 45 12 9 75 15 6.5 5 80 72 18 36 20 25 27

Compact Type Dual-Rod Cylinder Series CXSJ

The maximum piston speed for retraction is approximately 70% that of extension. Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

KJ

Lock 15-2-75 4 Series KK Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Port size Part no.

EX120/121/122

EX9 EA 03 Mounting specification 03 04 Direct mounting DIN rail mounting EX9-EA03 EX9-EA04 66 66 Mounting hole for 2 x M4 12.5 60 12.5 10 10 60 13.2 13.2 18 6 75 75 18 6 1678 Series EX250 Integrated Type/ For Input/Output How to Increase Input/Output Blocks, Procedure Drawing u y t q e w r EX Parts List Note No. Description Part no.

SMC Electronic Switch Series Variations

Station L1 L2 2 110 3 145 36 4 180 71 5 215 106 6 250 141 Unit Manifold With DIN rail Deflection level indicator Terminal block box 35 40 L1 Deflection level indicator 75 40 Terminal block box Rc1/8 SUP. 25 DIN rail center 70 (94.4) 90 25 (94.4) SUP 70 4.5 90 40 (4.5) 30 4.5 Adjusting knob Gauge Electrical entry Applicable O.D. 6.5 to 8.5 12 L2 L3 Gauge 105 Electrical entry Applicable O.D

Modular Type Regulator Series AR

75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S

Compact Cylinder with Air Cushion Series RQ

Material: Chromium molybdenum steel Surface treatment: Nickel plated Cylinder model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Cylinder model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Mounting bolt size M5 x 50L x 55L x 60L x 65L x 75L x 85L M5 x 55L x 60L x 65L x 70L x 80L x 90L M5 x 60L x 65L x 70L x 80L x 90L x 115L

Step Motor Driver （ Pulse input type ）

70 70 Trigger LV 70 70 70 Pushing speed 20 20 20 Moving force 100 100 100 Area1 0.00 0.00 0.00 Area2 0.00 0.00 0.00 In position 0.50 0.50 0.50 94 - LESH Basic parameter default Model LESH8 LESH16 LESH25 Lead[mm] 4 8 5 10 8 16 Controller ID 1 1 1 IO pattern 1 1 1 Acceleration / 1 1 1 Deceleration pattern S-motion ratio 0 0 0 Storoke (+) Storoke +1 Storoke +1 Storoke +1 Storoke (-) -1.00 -

CM2

, 100, 125, 150 CS1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 C76 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

ZPT/ZPX

ZQ Lifting force = Theoretical lifting force t ZF Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1) (N) 40 50 63 80 100 78.5 125 Pad diameter (mm) ZP Adsorption area (cm2) 12.6 19.6 31.2 50.3 122.7 85 107 167 264.9 427 667.3 1042.6 ZCU 80 101 157 249.3 401.9 628 981.3 75 94.5 147 233.7 376.8 588.8 920 AMJ 70 88.2 137 218.1 351.7 549.5 858.6 Vacuum pressure (kPa) 65 81.9

Modular Type Lubricators Series AL

75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50 50 70 70 N 27 40 54 54 66 66 Q 22 23 26 25 35 35 R 5.4 6.5 8.5 8.5 11 11 S 8.4 8 10.5 10.5 13 13 T 40 53 70 70 90 90 U 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 Model Semi-standard specifications

CM2

, 100, 125, 150 CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control LEC-MR-J3BAT 8 1000 1000 100 100 0 0 MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

AW

W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G

51

+ 45 (n 2) 25 + 45 70 25 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-C73C D-C80C D-H7C (n 2) 2 80 + 50 (n 2) 30 + 50 80 5 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-B5 D-B64 D-G5 D-K59 (n 2) 2 70 + 50 (n 2) 25 + 50 5 70 25 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 75 + 50 (n 2) 30 + 50 D-B59W 10 75 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) Note 3) When n is an odd number, an

XLAQ/XLDQ

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

100

rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Supply pressure [MPa] Supply pressure [MPa] Standard supply pressure: 0.33 MPa (Without valve) 0.35 MPa (With valve) Time to Reach Vacuum Tank capacity: 1 L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95