MVGQ

st 20 st 20, 30, 40, 50, 75, 100, 25 M6 x 1.0 15 9 47.5 37.5 12 30 35 88 21 21 32 14 2 42 M6 x 1.0 15.5 26 70 38 86 2 62 76 M6 x 1.0 56 10 125, 150, 175, 200 Series VZ3000 25, 50, 75, 100, 32 M8 x 1.25 20 11 47.5 37.5 16 114 25 26 38 16 35 51 M8 x 1.25 22 30 96 48 112 2 1 80 100 M8 x 1.25 80 5 125, 150, 175, 200 Note 1) It is possible to manufacture the intermediate strokes other than the

Valve Single Unit

20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

LEF-OM006xx

20 40 45 (kg) ) 2 4 7.5 15 10 20 (mm/s) 2) 10500 5250 12500 6250 16500 8250 (mm/s 2) 3,000 (mm) 0.02 (mm) 10 5 12 6 16 8 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 28 42 56.4 (DC24V) A/B 800 / (V) DC2410% (W) 4) 22 38 50 (W) 5) 18 16 44 (W) 6) 51 57 123 7) (N) 20 39 78 157 108 216 (W) 8) 3.6 5 5 (V) DC2410% LEFS16 LEFS25 LEFS32 (mm) 100 200 300 (400) 100 200 300 (400) 500 (600) 100 200

Applicable Auto Switch Model

D-F9N(V)/D-F9P(V)/D-F9B(V) Applicable Actuator Series Grommet Series Bore size (mm) Series Bore size (mm) CDU MXS, MXQ 6, 10, 16, 20, 25, 32 6, 8, 12, 16, 20, 25 MXP CDQ2 32, 40, 50, 63, 80, 100 10, 12, 16 * MTS CDQS 12, 16, 20, 25 20, 25, 32, 40 CY1R MY1 16, 20 6, 10, 15, 20 ; MK MXW 8, 12, 16, 20, 25 12, 16 MK2 MXF 8, 12, 16, 20 32, 40, 50, 63 6, 10, 16 *Not available for series CDQP2

Compact Manifold Regulator Series ARM5

: IN 8, OUT 6) ARM5AA1-310-1 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 Outlet pressure (MPa) Outlet pressure (MPa) 0.30 0.6 0.25 0.5 0.20 0.4 0.15 0.3 0.10 0.2 0.05 0.1 0 0 50 100 150 250 200 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics (Representative Value) Outlet pressure 0.2 MPa Flow rate 20 l/min (ANR) Condition: Inlet pressure 0.7 MPa

MB1

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type. l h ZZ Note) Bore size (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to

Series AP500

0.14 0 10 0.00 0.07 0 100 200 300 400 Flow rate (slpm, N2) 0.69 (17.5) Max. 5.6 (142.2) AP1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 20 0.14 2.00 (50.8) A 10 0.07 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3

JA/JAH/JB/JS

Up to 3.5 MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5

JA/JAH/JB/JS

Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A7H (With indicator light) D-A72H D-A73H D-A76H Auto switch model Applicable load Relay, PLC Relay, PLC IC circuit Load voltage 200 VAC 24 VDC 4 to 8 VDC 100 VAC Max. load voltage/Load current range(3) 5 to 10 mA 5 to 40 mA 20 mA 5 to 20 mA Contact protection circuit 2.4 V or

VZ3000

184 13.5 Stations L1 L2 L3 L4 9 223 212.5 200 11.5 10 248 237.5 216 16 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 C4C C6C Separation lever (Push type) VV5Z3-45FU DStation B(2 to 10 stations) C4C C6C VV5Z3-45FUStation C4C C6C VV5Z3-45FBStation (11 to 20 stations) (Pitch) (Pitch) (mm) 8 223 212.5 200 11.5 Stations L1

Step Motor Controller

VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and

Single Axis Electric Actuator Serriies LJ1S Slider Guide

a = 2000 Pitching Rolling Yawing Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 100 L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 500 a = 1000 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 92

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC 10% 12 to 24 VDC 10%

Basic Type/Direct Mount Type

40 30 20 300 200 100 10 Usable range 20 30 40 50 Usable range 5 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B CY3R CY3B CY3R CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) CY1S 100 500 400 50 300 30 200 CY1L 100 10 20 30 40 50 Usable range

MTS

200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang L (mm) 8-10-

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A7H (With indicator light) D-A72H D-A73H D-A76H Auto switch model Applicable load Relay, PLC Relay, PLC IC circuit Load voltage 200 VAC 24 VDC 4 to 8 VDC 100 VAC Max. load voltage/Load current range(3) 5 to 10 mA 5 to 40 mA 20 mA 5 to 20 mA Contact protection circuit 2.4 V or

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

The proper tightening torque for screws 0.3 to 0.4 Nm Rated voltage With indicator light VZ Voltage symbol Part no. 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 VS (b) VFN Valve Mounting Circuit with Indicator Light After confirming the gasket is correctly placed under the