Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

port) (same on reverse side) 7 3 8.5 30 8 Model S ZZ Z SS CXS10-10-XB19 10 82 65 CXS10-15-XB19 15 87 70 30 (20) (Z) 2-M4 x 0.7 Thread depth 7 CXS10-20-XB19 20 92 75 CXS10-25-XB19 25 97 80 6 CXS10-30-XB19 30 102 85 CXS10-35-XB19 35 107 90 40 CXS10-40-XB19 40 112 95 CXS10-45-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19 75 147 130

Compact Electric Actuator Series LG1

100W) Encoder Incremental system 15mm, 10mm Lead Ball screw Horizontal specification Slide screw Rolled, Ground Feed screw 15mm, 20mm Lead Rolled 20mm, 20mm Lead Guide High rigidity direct acting guide 3 Series LG1H LG1H20: Without Coupling / Dimensions 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

The dimensions inside ( ) are for the model with brake. 130 2-8H10 depth 10 4-M8 x 1.25 thread depth 15 70 20 Work piece mounting reference plane 195 (225) 187 100 135 Rc 1/4 Vacuum suction port 52 52.5 Rc 1/4 Vacuum suction port 29 33 Stroke + 129 (table movement range) Stroke + 120 (table movement range) 185 (215) 172 7.5 92 2-T-slot 1 64.5 85 90 64.5 35 Stroke + 334 (364) 33 33 90 2-T-slot

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

PVC (Light gray) PUR (Black-Gray (RAL 7021 equiv.)) 1.5 m: Approx. 65 g 3 m: Approx. 130 g 5 m: Approx. 195 g 1 m: Approx. 85 g 3 m: Approx. 215 g 5 m: Approx. 345 g 1.5 m: Approx. 65 g 3 m: Approx. 130 g 5 m: Approx. 195 g Weight 1 m: Approx. 80 g 5 m: Approx. 395 g 1 m: Approx. 85 g 5 m: Approx. 400 g Power Supply Cable For PROFINET For EtherNet/IP For DeviceNet For PROFIBUS DP For EtherCAT

Rotary Table/

m Displacement m 400 90 80 350 10 20 30 40 MSQA10 (High precision type) 70 60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130

4/5 Port Air Operated Valve Series SYJA3000

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 1-5-20 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead

Vacuum

Suction Flow Rate/Air Consumption* scFM lNaminl zHooD 4.60 (130) {ow To Order Note) vAc. pon size Note) EXH. port size jsg"g"[Ed,r,{ef ts",biJ $, I ]o?t-qt l_-!el!

Power Valve: Economy Valve Series VEX5

Number of needle rotations Mounting Lubrication Port 1 (P) 2 (A) 3 (R) mm2 04 06 10 10 12 14 20 Port size 11 4 1 1 4 11 4 1 2 3 4 1 2 590 2 1 300 17 130 7.2 160 8.9 330 18 670 37 4.7 5.0 Air operated 180 10 Effective area Cv 33 Basic type 2.0 2.3 3.2 3.5 Weight (kg) Select type Basic type Solenoid 2.2 2.6 3.5 3.8 4.9 5.3 Select type Note) Non-lubricated specifications are not available for

VXZ

pressure differential (MPa) Oil DC Max. system pressure (MPa) Av x 10 m Cv converted C[dm /(sbar)] b Cv Water, Oil, Steam Flow characteristics Min. operating pressure differential (MPa) Orifice size (mm) Port size Weight (g) Air LVN 2 -6 3 1 4 3 8 1 2 3 4 600 600 850 1370 2.4 2.8 6.0 9.5 0.44 0.42 0.34 0.20 8.5 11 23 38 1.9 2.4 5.3 9.2 VXZ2232-02 VXZ2232-03 VXZ2242-04 VXZ2352-06 10 46 58 130

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 1.2-23 Series SYJ3000 31 Type Manifold: Side Ported/SS5YJ3-31Station -M3 Grommet (G), (H) 4-M5 X 0.8 (P, R port) 52.4 (GZ, GS: 53.1) [54.1] 18.5 51.4

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1 2 2 ( 3 1 ) { 1 1 6 ) 2.79 ( 7 1 ) 4.03 1204) 2.56 (65) 3.15 130) 8 3 9 [2r3) E 1 5 7 (40) 4.57 ( 1 1 6 ) 362 (s2) 1 1 8 130) 205 t52) 0.55 ( 1 4 ) 3.94 (100) r.50 (38) (62) 1.34 (35) o.67 (17) M22x1 5 1.57 1 2 2 (31) (126) 2.43 o2) 8.46 1215) 2.56 (65) 0.55 14.0) 3.19 l 8 r ) ea2 1224) 'Min. Slroke = 079 (20mrt) w h Boot Mr limelers i.

Vacuum

Suction Flow Rate/Air Consumption* scFM lNaminl zHooD 4.60 (130) {ow To Order Note) vAc. pon size Note) EXH. port size jsg"g"[Ed,r,{ef ts",biJ $, I ]o?t-qt l_-!el!

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Symbol 1/8", 5/32" 1/4" 3/8" 3/8" 1/2" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 5/16" Inch size 3/16", 1/4" Flow rate (L/min (ANR)) 100 130 230 290 460 420 660 920 1050 1390 Controlled flow Free flow Sonic conductance dm3/(sbar) 0.3 0.4 0.7 0.9 1.4 1.3 2 2.8 3.2 4.2 Critical pressure ratio Controlled flow 0.2 0.2 0.2 0.2 0.2 0.25 Free flow 0.25 0.25 0.25 0.25 Note) Flow rate values are measured

Basic Type/Direct Mount Type

0.5 1 1 1.5 2 2 3 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 M 3.5 4 5 5 6 7 8 10 10 Z 66 76 94 107 117 130

Power Clamp Cylinder

Maximum Clamping Moment Max. clamping force Bore size (mm) 0.8 MPa 0.7 MPa 0.6 MPa 0.5 MPa 0.4 MPa 0.3 MPa Nm Ibfin Nm Ibfin Nm Ibfin Nm Ibfin Nm Ibfin Nm Ibfin For Asia For North America For Europe For France Special 40 194 1717 178 1575 154 1363 118 1044 76 673 35 310 50 250 2212 220 1947 190 1681 160 1416 130 1150 100 885 63 550 4867 500 4425 450 3982 400 3540 350 3097 300 2655 80 1360

Possible to transfer a workpiece at low-speed.

14.5 30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14 8.6 5 Key dimensions Q S W b L1 US TA TB TC TD TF (H9) TG (H9) TL UW G M N L Size Rotation angle 90 104 4 0 0.03 0 0.1 0 0.1 20 8 9.6 29 11.5 20 59 24.5 1 13.5 27 4 4 2.5 74 15 11 180 130

Process Valve

(mm) Model Rc Flange Note) Air operated External pilot solenoid Measured by air Measured by water Kv 6.1 10.4 9.8 15.6 9.8 15.6 16.4 24.2 16.4 24.2 25.1 37.2 25.1 37.2 Effective area (mm2) 130 220 210 320 210 320 330 500 330 500 520 770 520 770 Conversion Cv 7.0 12 11 18 11 18 19 28 19 28 29 43 29 43 VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6

High Vacuum Angle Valve

800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Series HAW Water Cooled Aftercooler 1

130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8