Air Slide Table Series MXQ

50 50 56 48 56 112 118 124 Model F 45 40 48 58 42 55 50 55 62 GA 18 18 18 22 48 73 74 96 118 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 MXQ2010 MXQ2020 MXQ2030 MXQ2040 MXQ2050 MXQ2075 MXQ20-100 MXQ20-125 MXQ20-150 Note) Note) Note) Refer to the bottom view of MXQ20-50. 114 Air Slide Table Series MXQ With shock absorber (20): MXQ20-BS/BT/B Shock absorber at retraction end 46.5 Shock absorber

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

HRX-OM-Z002

25CH2CH1+0 to 15 Cooling capacity(Total of ch1 and 2) 50/60Hz(note2,10) kW 8.0/9.5 Heating capacity(Total of ch1 and 2) 50/60Hz(note3) kW 2.0/2.5 Temperature stability(note4) CH10.1CH20.5 Rated flow 50/60Hz(note5,11) L/min CH125/35(0.5MPa)CH22/2(0.5MPa) Circulating fluid system Maximum flow rate 50/60Hz(note11) L/min 55/65 Pump capacity Maximum pump head m 50 Settable pressure range(-P)

V

or less 47 or less Center Rubber Seal VQ43(0, 5)0 36.0 (2.0) 50 or less 52 or less Exhaust Metal Seal VQ44(0, 5)0 36.0 (2.0) 45 or less 47 or less Center Rubber Seal VQ44(0, 5)0 39.6 (2.2) 50 or less 52 or less Pressure Metal Seal VQ45(0, 5)0 36.0 (2.0) 45 or less 47 or less Center Rubber Seal VQ45(0, 5)0 39.6 (2.2) 50 or less 52 or less Note 1) VAlue for Valve on Subplate and Cylinder Port

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Low Friction Cylinders Series MQ

, 75, 100 54 M6 x 1.0 M6 x 1.0 42 12 12 (11.8) 45 8.5 Rc 1/8 NPT 1/8 G 1/8 49.5 60 7 7 4.5 10 12 34 5.5 9 23 10 30 10 to 50, 75, 100 60.5 M8 x 1.25 M6 x 1.0 48.5 13 16 (15.8) 52 8.5 Rc 1/8 NPT 1/8 G 1/8 57 69 7 10 5 14 12 40 5.5 9 26 10 40 10 to 50, 75, 100 62 M8 x 1.25 M8 x 1.25 50 13 16 (15.8) 64 12 Rc 1/4 NPT 1/4 G 1/4 71 86 8 10 7 14 12 50 6.6 11 26 14 Note) ( ): Rod end dimensions With

Air Fittings & Tubing

Hexagon socket head male connector 1 4 KQS 3 8 1 2 1 8 45 Male elbow 1 4 KQK 3 8 1 2 1 8 Universal male elbow 1 4 KQV 3 8 1 2 2.5-6

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

ZP

64.5 77 50 151.5 74.5 N S U F GN GS 20 25 23 J K ZP T U 10 58 35 23 20 96 45 51 30 106 55 40 142 65 77 50 152 75 32 23.5 10 B5 B01 N01 T01 06 08 N6 U6 94.5 44.5 20 104.5 54.5 30 114.5 64.5 50 159.5 84.5 75 50 40 32 A14 4 M14 x 1 19 4 12 M8 x 1.25 10 95.5 45.5 33 50 20 105.5 55.5 30 115.5 65.5 50 160.5 85.5 75 50 Dimensions Per Vacuum Inlet: Female Thread Model L M N P Vacuum inlet direction

ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type. 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Stroke (mm) Model Pad form Flat/ Flat with ribs Deep Bellows ZPY2004 ZPY3507 ZPY4010 ZPY02 to 08 ZPY10 to 16 (Thin section series) 33 6 33 ZPY 10 to 16 10 45 45 46 10 ZPY 20 25 50 51 53 ZPY 32 40 50 ZPY ZPY 52 115 58 127 134

MQQ

FD FT FV FX 10 to 40 79.5 61.5 4.5 5.5 30 45 10 FV 10 to 60 90.5 70.5 6.6 8 39 48 16 10 to 60 99 79 6.6 8 42 52 20 FX FT 10 to 50, 75, 100 106.5 84.5 5.5 8 48 56 25 B + Stroke L FZ 10 to 50, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

Thermo-chiller/Rack Mount Type

/60 Hz)3 [W] 5000/5900 Heating capacity (50/60 Hz)3 [W] 1000/1200 Temperature stability4 [C] 0.1 Pump capacity (50/60 Hz)5 [MPa] 0.34 (at 15 L/min)/0.34 (at 23 L/min) Rated flow (50/60 Hz)6 [L/min] 15/23 Flow display range20 [L/min] 5 to 40 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle

5-Port Solenoid Valve

Manifold Options * The dimensions within ( ) apply to the SY50M-50-1AE.

IP8001 Series

(740) = qo50 Quick opening 50:1 (R=50) Y=(1-R-X)1/0.98 (750) = USEr Users definition11 polygonal line settings The default value at shipping is (700) = (Lin) Linear.

Compact Cylinder with Lock Series CLQ

MLU Standard Stroke MLGP ML1C Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

60 50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations

CLQ

CLQ 157 245 402 629 982 1559 2513 3927 M5 x 0.8 Rc 1/8 Rc 1/4 MLGP Symbol Specifications Equivalent to 0.5 MPa -XA Change of rod end shape RLQ Standard Stroke MLU Bore size (mm) Standard stroke (mm) 20, 25 32, 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 ML1C DManufacture of Intermediate Stroke -X Description Part no.

CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V