PF2A/PF2W

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750 711 721 751 703H 706H 712H PF2A510 550 511 521 551 1 to 10 PF2A30 5 to 50 10 to 100 31 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) L: DIN Rail Overall Length n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 135.5 148 148 160.5 173 185.5 198 210.5 210.5 223 235.5 248 260.5 273 273 285.5 298 310.5 323 125 137.5 137.5 150 162.5 175 187.5 200 200 212.5 225 237.5 250 262.5 262.5 275 287.5 300 312.5 102.2 112.7

Title not found

VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and

ZP

100 250 150 200 60 200 180 120 0 20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration

0.

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC 8 Series VQZ100/200/300 Made to Order (For details, refer to page 34.)

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L n L: Dimensions n: Stations 2 3 4 5 6 7 8 9 10 L1 L2 L3 L4 160.5 160.5 173 185.5 198 210.5 210.5 223 235.5 150 150 162.5 175 187.5 200 200 212.5 225 125.4 135.4 145.4 155.4 165.4 175.4 185.4 195.4 205.4 17.5 12.5 14 15 16.5 17.5 12.5 14 15 46 Series SJ2000/3000 EX510 Gateway System Serial Transmission System Plug-in Connector Type Dimensions SS5J3-60S6BlDB-l Stations (Pitch) P = 10 12.8

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S

Precautions 1

151 to 200 201 to 300 101 to 150 151 to 200 201 to 300 20 25 32 40 81 93 106 131 25 37.5 50 75 23.5 10.5 12.5 36 30 68 18 85 97 110 135 25 37.5 50 75 23.5 10.5 12.5 36 32 72 18 85 97 110 135 25 37.5 50 75 23.5 10.5 36 12.5 32 72 18 102 27 46 90 115 140 25 37.5 50 75 10.5 12.5 41 77 20 D(mm) ZZ Bore size (mm) -X 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 143 156 168 181

ISA2

200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

VQC

160.5 4 87 135.5 162.5 173 5 97.5 146 175 185.5 6 108 156.5 187.5 198 7 118.5 167 187.5 198 8 129 177.5 200 210.5 9 139.5 188 212.5 223 10 150 198.5 225 235.5 11 160.5 209 237.5 248 12 171 219.5 250 260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L4) (L3) L2 L1 38.5 P = 16 34.5 38.5 76.5 1 1

5 Port Solenoid Valve, Series VQC

160.5 4 87 135.5 162.5 173 5 97.5 146 175 185.5 6 108 156.5 187.5 198 7 118.5 167 187.5 198 8 129 177.5 200 210.5 9 139.5 188 212.5 223 10 150 198.5 225 235.5 11 160.5 209 237.5 248 12 171 219.5 250 260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L3) (L4) L2 L1 38.5 P = 16 34.5 38.5 76.5 1 1

100

MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply

LEF-OM002xx

200 mm/s mm/s 100 500 100 500 1 1 To CN4 200 1000 200 1000 2 2 50 200 50 200 3 3 To CN3 or (4) Actuator cable (6) Teaching box PC To CN2 (7) Controller setting kit (3) Power supply plug (2)Controller To CN1 Table 2.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

When you carry out adhesion mounting of the driver, make circumference temperature into 0 to 45 , or use it at 75% or smaller effective load ratio. 1000 1000 During operation During operation 100 100 Operation time[s] Operation time[s] During servo lock During servo lock 10 10 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 (Note) Load ratio [%] (Note) Load ratio [%] LECSS-S5

C95Series

" SO, "63 a.5 25, 50, 75, 100,125, 150, 175, 200, 250.300, 350. 400. 450, 500 40 " !

JIS Standard Hydraulic Cylinder

2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 135 + 55 140 + 55 120 + 55 150 + 55 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 + 55