0.

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC 8 Series VQZ100/200/300 Made to Order (For details, refer to page 34.)

Square Tube Type Air Cylinder Series MB1

l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139

Hygienic Design Cylinder Series HY

Standard Stroke Bore size (mm) Standard stroke (mm) 20 20, 30, 50, 100, 150, 200 25 20, 30, 50, 100, 150, 200 32 25, 50, 100, 150, 200 40 25, 50, 100, 150, 200 50 25, 50, 100, 150, 200 63 25, 50, 100, 150, 200 Manufacture of Intermediate Stroke Intermediate strokes of 1 mm each can be produced by using spacers with standard stroke cylinders.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

Cylinder with Lock

P 73 psi P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 50 40 80 80 200 200 63 63 100 100 50 50 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 2 Cylinder with Lock Double Acting, Single Rod 40, 50, 63, 80, 100 Series CNA2 How to Order

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1CW MY1CW/m3 MY1CW/m2 MY1CW/m1 30 200 20 100 100 10 50 40 50 40 5 30 30 MY1CW63 MY1CW63 MY1CW63 4 Load weight (kg) Load weight (kg) Load weight (kg) 20 20 MY1CW50 MY1CW50 MY1CW50 MY1CW63 MY1CW63 MY1CW63 3 MY1CW40 MY1CW40 MY1CW40

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1CW MY1CW/m3 MY1CW/m2 MY1CW/m1 30 200 20 100 100 10 50 40 50 40 5 30 30 MY1CW63 MY1CW63 MY1CW63 4 Load weight (kg) Load weight (kg) Load weight (kg) 20 20 MY1CW50 MY1CW50 MY1CW50 MY1CW63 MY1CW63 MY1CW63 3 MY1CW40 MY1CW40 MY1CW40

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

MY1

200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1CW MY1CW: m3 MY1CW: m2 MY1CW: m1 30 200 20 100 100 10 50 40 50 40 5 30 30 MY1CW63 MY1CW63 MY1CW63 4 Load weight (kg) Load weight (kg) Load weight (kg) 20 20 MY1CW50 MY1CW50 MY1CW50 MY1CW63 MY1CW63 MY1CW63 3 MY1CW40 MY1CW40 MY1CW40

Rotary Table/

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Output Black lead wire 100 MSD013P1E MSM012P1A 200/230 MR-C10A1 100/115 Mitsubishi Electric Corporation HC-PQ13 100 MR-C10A 200/230 Blue lead wire SGDE-01BP 100 SGME-01BF12 100/115 Yaskawa Electric Corporation SGDE-01AP SGME-01AF12 200/230 H S For motor mounting dimensions, refer to the dimensions for series LJ1 20 on page 143 as a reference for mounting and design.

Information

200 100 400 200 Absolute 18-bit encoder (Resolution: 262144 pulse/rev) Compatible encoder Three phase 200 to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Power voltage [V] Single phase 100 to 120 VAC (50/60 Hz) Main power supply Three phase 170 to 253 VAC Single phase 170 to 253 VAC Allowable voltage fluctuation [V] Single phase 85 to 132 VAC Rated current [A] Control power

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Rotary Table/Rack & Pinion Style Series MSQ

, 200 How to Order CRB2 CRBU2 Size 10 20 30 50 CRB1 MSU CRJ MSQ A 10 A M9BW High Precision Type CRA1 MSQ B 10 A M9BW Basic Type CRQ2 Thread type MSQ Size End port type Size 10, 20 30, 50, 70, 100, 200 10 20 30 50 70 100 200 Nil Nil -XF -XN M 5 Rc 1/8 G 1/8 NPT 1/8 MSZ CRQ2X MSQX Side ports are all M5.

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

VQZ1000/2000/3000

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-7-7 8 Cylinder with Lock Double Acting, Single Rod Series CNA 40, 50, 63, 80, 100 How to

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.