7.5

SJ3000-50-1A-ll SJ3000-50-1AS-ll SJ3000-50-1AR-ll X, PE port: Metric size 4 Inch size 5/32" Internal pilot (Metric size) C6: With 6 one-touch fitting (straight) C8: With 8 one-touch fitting (straight) L6: With 6 one-touch fitting (elbow upward entry) L8: With 8 one-touch fitting (elbow upward entry) B6: With 6 one-touch fitting (elbow downward entry) B8: With 8 one-touch fitting (elbow downward

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

-CG1RN25 11-CG1RN32 11-CG1RN40 11-CG1RN50 11-CG1RN63 50 63 20 25 32 40 50 63 1/4 Non-lube Double acting, 25, 50, 75, 100, 125, 150 Single rod 25, 50, 75, 100, 125, 150, 200 1/8 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20 25 32 40 50 63 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63 1.5

Table of Contents

100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

force (N) 0.4 MPa 0.4 MPa 75 75 External grip 0.3 MPa 0.3 MPa 50 50 0.2 MPa 0.2 MPa F 25 25 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) F F MHS4-50D MHS4-50D 200 200 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 150 150 Gripping force (N) Gripping force (N) F 0.4 MPa 0.4 MPa Internal grip 100 100 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 50 50

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

CHKD/CHKG

) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100

Refrigerated Air Dryers

-10, IDF15E1-10 IDU6E-10, IDU11E-10, IDU15E1-10 1 kVA 100 VAC (50 Hz) 100, 110 VAC (60 Hz) Singlephase Refrigerant R407C (HFC) IDU E 2000 IDF22E-20, IDF37E-20 2 kVA 3 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 4 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) 9 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) 200 VAC (50 Hz) 200, 220 VAC (60 Hz) Singlephase 10 380, 400, 415 VAC (50 Hz) 380 to

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

+ 30 (n 2) n = 2, 4, 6, 8 Different sides 35 + 30 (n 2) 55 + 55 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 D-A44 n 150 + 50 (n 2) n = 2, 4, 6, 8 Same side 110 + 50 (n 2) n = 2, 4, 6, 8 150 1 15 110 2 (Different sides, Same side), 1 105 110 115 15 D-Z7/Z80 D-Y59/Y7P D-Y7W 15 + 40 n = 2, 4, 6, 8 (n 2) 2 115 + 40 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 105 + 40 n = 4, 8, 12, 16 2 110 + 40 n

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Long stroke CX CXSW 6 CXSW10 CXSW15 CXSW20 CXSW25 CXWS32 D10, 20, 30, 40, 50 75, 100, 125, 150 -X 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 For long strokes, it will be made-to-order.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Electric Actuator / Miniature Rod type 2.1 Specification Model LEPY 6 LEPY 10 Stroke [mm] 25, 50, 75 Screw lead [mm] 4 8 5 10 Basic 14 20 7 10 25 50 12.5 25 Pushing force [N] Note1) Note 6) Compact 24 40 12 20 Horizontal Basic 2 1 6 3 Compact 4 2 Work load [kg] Note2) Note3) Note6) Vertical Basic 0.5 0.25 1.5 1.0 Compact 1.5 1.0 Basic 10 to 150 20 to 300 Note4) 10 to 200 20 to 350 Note4

Series AP500

0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Vacuum Pad

50 50 B 42 42 42 52 52 52 C 63 98 134 63 98 134 D 118.5 ZPT40H 25-A18 ZPT40H 50-A18 ZPT40H 75-A18 ZPT50H 25-A18 ZPT50H 50-A18 ZPT50H 75-A18 ZPT63H 25-A18 ZPT63H 50-A18 ZPT63H 75-A18 ZPT80H 25-A18 ZPT80H 50-A18 ZPT80H 75-A18 ZPT100H 25-A22 ZPT100H 50-A22 ZPT100H 75-A22 ZPT100H 100-A22 ZPT125H 25-A22 ZPT125H 50-A22 ZPT125H 75-A22 ZPT125H 100-A22 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01

Vacuum Pad

50 50 B 42 42 42 52 52 52 C 63 98 134 63 98 134 D 118.5 ZPT40H 25-A18 ZPT40H 50-A18 ZPT40H 75-A18 ZPT50H 25-A18 ZPT50H 50-A18 ZPT50H 75-A18 ZPT63H 25-A18 ZPT63H 50-A18 ZPT63H 75-A18 ZPT80H 25-A18 ZPT80H 50-A18 ZPT80H 75-A18 ZPT100H 25-A22 ZPT100H 50-A22 ZPT100H 75-A22 ZPT100H 100-A22 ZPT125H 25-A22 ZPT125H 50-A22 ZPT125H 75-A22 ZPT125H 100-A22 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01

Vacuum Pad

50 50 B 42 42 42 52 52 52 C 63 98 134 63 98 134 D 118.5 ZPT40H 25-A18 ZPT40H 50-A18 ZPT40H 75-A18 ZPT50H 25-A18 ZPT50H 50-A18 ZPT50H 75-A18 ZPT63H 25-A18 ZPT63H 50-A18 ZPT63H 75-A18 ZPT80H 25-A18 ZPT80H 50-A18 ZPT80H 75-A18 ZPT100H 25-A22 ZPT100H 50-A22 ZPT100H 75-A22 ZPT100H 100-A22 ZPT125H 25-A22 ZPT125H 50-A22 ZPT125H 75-A22 ZPT125H 100-A22 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01

Vacuum Pad

50 50 B 42 42 42 52 52 52 C 63 98 134 63 98 134 D 118.5 ZPT40H 25-A18 ZPT40H 50-A18 ZPT40H 75-A18 ZPT50H 25-A18 ZPT50H 50-A18 ZPT50H 75-A18 ZPT63H 25-A18 ZPT63H 50-A18 ZPT63H 75-A18 ZPT80H 25-A18 ZPT80H 50-A18 ZPT80H 75-A18 ZPT100H 25-A22 ZPT100H 50-A22 ZPT100H 75-A22 ZPT100H 100-A22 ZPT125H 25-A22 ZPT125H 50-A22 ZPT125H 75-A22 ZPT125H 100-A22 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01

Lightweight and Compact

C 5 to 45 Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating fluid system Rated flow 50/60 Hz (Outlet)6 L/min 29/45 Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50

Series VQ Metal Seal/Rubber Seal Body Ported

stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 4 2.7 (0.15) VQ0 (Metal seal) 4 3.6 (0.2) VQ0001 (Rubber seal) Series VQ1000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 300mm Series CJ2 Pressure 0.5MPa Load factor 25% Piping length 2m Speed controller: Series

Guide Cylinder Series MGG

12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50 M10 200 115 210 190 21 25 M10 x 1.5 depth 21 12 11 160 140 182 For

Compact

LAT Speed [mm/s] Work load: Horizontal [kg] Equivalent lead [mm] Stroke [mm] Series Size Page LZ 6 (10) 25 1000 Page 170 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 LEMB Basic type LC3F2 48 11 (20) 1000 Page 170 32 LEMC Cam follower guide type 25 10 1000 Page 170 50, 100, 150, 200,

Compact manifold regulator ARM5 Series

100 150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1