Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting w/ Spring Loaded, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 1.0, Port thread type: Rc, Body Options: With lever detection switch, Auto Switches

Bore: 50mm, Port Thread: Rc, Piping: Flange Side, Stroke: 30mm, Action: Single Acting/Spring Extend, Roller Material: Carbon Steel, Option: Lever Detection Switch, Port and Lever Position: 0°, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Leadwire or Prewired Connector: -, Number: -

Bore: 50mm, Port Thread: Rc, Piping: Flange Side, Stroke: 30mm, Action: Double Acting, Roller Material: Resin, Option: Lever Detection Switch, Port and Lever Position: 0°, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: 5m, Number: -

Bore: 50mm, Port Thread: Rc, Piping: Flange Side, Stroke: 30mm, Action: Double Acting Spring Type, Roller Material: Resin, Option: Lever Detection Switch, Port and Lever Position: 0°, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting w/ Spring Loaded, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 1.0, Port thread type: Rc, Body Options: With lever detection switch, Auto Switches

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Type M10/M11 manifold At 300 mm/s 4, 6, 8 fittings are connectable. 32 At 300 mm/s Existing 6, 8, 10, 12 fittings are connectable. Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added!

High Vacuum Angle Valve

flange surface Symbol S K L S L M K L M Pilot port direction Solid state auto switch D-M9P(M)(L)(Z) Left flange surface D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 1 Reed auto switch Right flange surface Without auto switch (with built-in magnet) 2 When the seal material is not being changed, there is no need to select a symbol.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Aluminum High Vacuum Angle Valve

flange surface Symbol S K L S L M K L M Pilot port direction Solid state auto switch D-M9P(M)(L)(Z) Left flange surface D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 1 Reed auto switch Right flange surface Without auto switch (with built-in magnet) 2 When the seal material is not being changed, there is no need to select a symbol.

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Piston speed (mm/s) Piston speed (mm/s) 1.

ISO Cylinder

C85NT08A-S C85NT10A-S C85NT10A-S C85NT20A-S C85NT25A-S Mounting nut C85NT08B-S C85NT08B-S C85NT10B-S C85NT10B-S C85NT20B-S C85NT20B-S C75 Standard C75 Double acting, Single rod C75W Double acting, Double rod C75 Single acting (Spring return/extend) Direct mount C75R Double acting, Single rod XC6A only Description Bore size [mm] 32 40 Rod end nut C76NT32A-S C76NT40A-S Mounting nut C76NT32B-S

Table of Contents

the speed of 200 mm/s.

Table of Contents

100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Free Mount Cylinder

T S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

Smooth Cylinder/Low Speed Cylinder

(1 mm/s for 16 or smaller) is achieved.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

Electric Actuator/Slider Type

Model L A B n D E LEFS40 S -200453.4 6 2 LEFS40 S -300553.4 6 2 LEFS40 S -400653.4 8 3 LEFS40 S -500753.4 10 4 LEFS40 S -600853.4 10 4 LEFS40 S -700953.4 12 5 LEFS40 S -8001053.4 14 6 LEFS40 S -9001153.4 14 6 LEFS40 S -10001253.4 16 7 378 478 578 678 778 878 978 1078 1178 206 306 406 506 606 706 806 906 1006 300 300 450 600 600 750 900 900 1050 SMC Corporation of America 10100 SMC Blvd.,

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S 1 pc. n n pcs.

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

High Vacuum Angle Valve

M M type plug connector U With light/surge voltage suppressor (Non-polar type) * S type: Not available for AC * U type: DC only o Body surface treatment/Seal material and changed parts Body surface treatment Part with changed seal material and leakage Symbol Changed part *2 Leakage [Pam3/s or less] *1 Symbol Surface treatment Nil External: Hard anodized Internal: Raw material A External