VCA

Manifold body e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. q w e r Part no.

Vacuum Equipment

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com For the vacuum release valve, select a 2-3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate.

Membrane Air Dryer

Specific Product Precautions Unit Type IDG100, 100H IDG75, 75H 0.08 0.10 P1 = 0.3 MPa 0.08 0.06 P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.5 MPa 0.06 P1 = 0.5 MPa 0.04 0.04 P1 = 0.7 MPa 0.02 P1 = 0.7 MPa 0.02 M V 0.00 0.00 0 1000 600 800 400 200 1200 0 800 1200 400 1600 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40oC [Symbol: L]

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

CQM

4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

MLGC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 9-15-1.

Step Motor Driver （ Pulse input type ）

x 1 / 10 x 100 = 8000[pulse] Travel speed: 800 x 1 / 10 x 100 = 8000 [pulse/sec] Acceleration / deceleration time: 100 / 3000 = 0.1 [s] Travel amount: 800 x 1 / 10 x 30 = 2400[pulse] Travel speed: 800 x 1 / 10 x 30 = 2400 [pulse/sec] Acceleration / deceleration time: 30 / 3000 = 0.01 [s] (1) Positioning operation starts until the start position

PA300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil F N T Rc G NPT NPTF VR Body type Body ported Base mounted 2 4 Port size VH Valve option VPA342 VPA344 VPA542 VPA544 VPA742 VPA744 Port size Rc Without sub-plate 1/8 1/4 3/8 1/2 Symbol Nil V Standard Vacuum VPA544 VHS Nil JIS Symbol Option Option

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

100 800 Intermediate strokes are available. *1 Please consult with SMC for longer strokes.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Pressure loss is less than 1%.

Multistage Ejector Series ZL112/212 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Environment Caution 1. Avoid use exposed to direct sunlight. Solenoid Valves (Series ZL112/ZL212) Caution 1.

Electric Slide Tables

Up to 1000 Up to 2000 Up to 2500 Up to 3000 Up to 400 Up to 600 Up to 800 Up to 1000 10 20 45 60 Guide Rod Slider High Rigidity Slider Type Step Motor (Servo/24 VDC) AC Servo Motor Belt drive Belt drive Series LEJB Ball screw drive Series LEL Series LEJS CAT.ES100-101 CAT.ES100-104 Sliding bearing Series LEL25M Ball bushing bearing Series LEL25L Series LEJS Series LEJB Max. work load (kg

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Terminal name Details V+ Power supply (+) for DeviceNet CAN_H Communication wire (High) Drain Grounding wire/Shielded wire CAN_L Communication wire (Low) V Power supply () for DeviceNet w USB cable JXC-W2-U 800 For IO-Link 800 Straight type JXC-CL-S * The communication plug connector for IO-Link is an accessory. e Controller setting software (CD-ROM) JXC-W2-S 120 Communication plug connector

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Refer to Minimum Stroke for Auto Switch Mounting on page 54.

IDUS/IDFS

Corrected air flow = (Air flow) (Data A x Data C) Corrected air flow = (Air flow) (Data B x Data C) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Select a model having an air flow capacity that is higher than the corrected air flow.

CXT

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX A shock absorber can be installed (option). D-X Can be mounted on two sides. 20Mounting from the bottom side Mounting from the upper side Data Guide of high rigidity Adjusting bolt with bumper is standard.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size 15 32 15 mm 32 mm CX Auto switch Nil Without auto switch DFor the applicable auto switch model, refer to the table below.

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 2000 1200 600 2400 1600 800 3000 2000 1000 Electronic gear denominator *3.

SFOD-OMT0009CN

600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108 No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm