SMC Corporation of America
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[F 30] Setting of accumulated value hold completed. Return to function selection mode. : The value is stored in memory every 2 or 5 minutes.

EVS1001-9-2H Gasket 1 AXT632-25-15 (M4 x 30, with washer, nickel plated) Hexagon bolt 2 EVS1001-9-1 Light cover 3 29.5 x 1.2 O-ring 4 OR-0500-130-H O-ring 5 30 Exploded View of Manifold Manifold block assembly D-side end plate assembly U-side end plate assembly Housing assembly and SI unit EX250 EX600 EX500 EX126 S kit q r e w t @0 i u y @2 !8 o @1 !0 !9 !

EQY16 Without lock: 30 mm stroke, With lock: 30, 50, 100 mm strokes EQY25 Without lock: 30 mm stroke, With lock: 30, 50 mm strokes EQY32 Without lock: 30 mm stroke, With lock: 30, 50 mm strokes Rod end thread Nil Rod end female thread M Rod end male thread (1 rod end nut is included.)

-2No.PF-OMN0009CN-F / 1 1.5 3 3)1 1 () [] -3No.PF-OMN0009CN-F () () () () -4No.PF-OMN0009CN-F () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (), (0~90 )3mPas(3cP)(0~90 ) () <> -5No.PF-OMN0009CN-F * 16 FG (49 N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMN0009CN-F * () 6 33 () () 10 m DC(-)() -7No.PF-OMN0009CN-F * ( ) () CE -8No.PF-OMN0009CN-F * 3 * -9No.PF-OMN0009CN-F

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Applicable fitting size Noise reduction (dB) Effective area (mm2) (Cv factor) Series Model A L D d D VQC2000 10 AN20-C10 36.5 57.5 30 16.5 30 Elbow fitting assembly VVQ2000-F-L(C4/C6/C8/N3/N7/N9) It is used for piping that extends upward or downward from the manifold.

G Model P1 P2 A B J K M Q1 Q2 R S U V M50.8 AC10B-A 1/16 56 59.9 11 28 25 12.5 25 20 27 4.5 6.8 3 24.5 AC20B-B 1/8 83.2 87.6 26.5 41.6 25 28.5 2 30 24 33 5.5 12 3.5 29 Note) 1/81/4 1/43/8 1/43/8 AC25B-B 1/8 110.2 115.1 28 30 55.1 35 27.5 0 41 35 7 14 4 41 AC30B-B 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5

.S. or less 5% F .S. or less Data Repeatability Note 3) 1% F .S. or less 3% F .S. or less Temperature characteristics 2% F .S. or less (0 to 50C, based on 25C), 1% F .S. or less (15 to 35C, based on 25C) Current consumption (No load) 60 mA or less 50 mA or less Weight 45 g Maximum load current: 80 mA Internal voltage drop: 1V or less (With load current of 80 mA) Maximum applied voltage: 30

Size: 10 to 30 Size: 40 40 40 18 to 30 6.5 to 30 18 to 30 4.5 to 30 Symbol: A57 Shorten both long and short shafts.

4 x F With Arm (mm) Head End Flange (mm) F D E C F B E D G C B A G A Model MK2G32 MK2G40 MK2G50 MK2G63 Model MK232-N MK240-N MK250-N MK263-N 0.15 56 0.1 34 48 65 39 M6 x 1.0 45 M8 x 1.25 20 5.5 67 8 18 0.15 0.1 15 to 25 62 40 54 72 46 M6 x 1.0 45 M8 x 1.25 20 5.5 67 8 18 76 50 67 89 58 65 M8 x 1.25 M10 x 1.5 22 6.6 88 9 22 0.15 0.1 30 to 40 92 60 80 108 57.5 65 M10 x 1.5 M10 x 1.5 22 9 88

A A B C D E F G H B C D E F Pressure port Pressure port Right Left Left Right Right Left Left Right Right Left Left Right Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

After washing the element, make sure the base seal is properly mounted. 4 Vertical Suction Filter Series FHIA Dimensions Differential pressure indicator 16 lB (34) F OUTLET Removal dimension K H F OUTLET D E C H Differential pressure indication switch 62 (65) F INLET 4 x I OUTLET A J lG (mm) A B C D E F G H I J K Model Weight (kg) FHIAl-04 FHIAl-06 FHIAl-08 FHIAl-10 FHIAl-12 FHIAl-16 FHIAl

A A B C D E F G H B C D E F Pressure port Pressure port Right Left Left Right Right Left Left Right Right Left Left Right Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

) (Slide bearing type) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) St: Stroke (mm) St: Stroke (mm) St: Stroke (mm) Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGCM 40-R Stroke (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM 50-R Stroke (Slide bearing type) Deflection Y (mm) St: Stroke (mm) Allowable end load F (

S+Stroke H L Z+Stroke RR ZZ+Stroke (mm) A AL B1 CD CX D E F G H H1 I K L MM N NA Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/