to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18 x 1.5 M18 x 1.5 12 14 15 11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150
to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18 x 1.5 M18 x 1.5 12 14 15 11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150
The 50 Hz and the 60 Hz inverter pumps have the same capacity. (There is no pump capacity difference between the 50 Hz and the 60 Hz.)
VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF
1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189
to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other 1 2 3 Indicator light is not available for grommet type.
to 0 Alarm 1 7 F to 0 Pushing force F to 8 Alarm 2 8 7 to 0 Alarm 3 8 F to 0 Trigger LV F to 8 Alarm 4 9 F to 0 Sub Function 9 F to 0 Pushing Occupation speed 10 F to 0 Address 10 F to 0 Moving force area 11 F to 0 Address 11 F to 0 Area 1 12 F to 0 DATA(H) 12 F to 0 Occupation (always 0) area 13 F to 0 DATA(L) 13 F to 0 Area 2 14 F to 0 Occupation 14 F to 0 area 15 F to 0 15 F to 0 In position
Stroke (cm) Graph (1) Absorbed Energy Curve Mounting style Applicable max. stroke according to buckling strength 100 90 80 70 60 50 40 REC40 Operating pressure (MPa) REC32 Mounting bracket symbol and figure Symbol REC REC25 30 Load mass M (kg) 20 25 32 40 REC20 20 Rod side flange style: F Head side flange style: G 39 50 56 61 0.3 Foot style: L L 10 30 38 43 47 0.5 W W W F 5 24 31 36 39 0.7
Stroke (cm) Graph (1) Absorbed Energy Curve Mounting style Applicable max. stroke according to buckling strength 100 90 80 70 60 50 40 REC40 Operating pressure (MPa) REC32 Mounting bracket symbol and figure Symbol REC REC25 30 Load mass M (kg) 20 25 32 40 REC20 20 Rod side flange style: F Head side flange style: G 39 50 56 61 0.3 Foot style: L L 10 30 38 43 47 0.5 W W W F 5 24 31 36 39 0.7
Stroke (cm) Graph (1) Absorbed Energy Curve Mounting style Applicable max. stroke according to buckling strength 100 90 80 70 60 50 40 REC40 Operating pressure (MPa) REC32 Mounting bracket symbol and figure Symbol REC REC25 30 Load mass M (kg) 20 25 32 40 REC20 20 Rod side flange style: F Head side flange style: G 39 50 56 61 0.3 Foot style: L L 10 30 38 43 47 0.5 W W W F 5 24 31 36 39 0.7
/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) The code is L for elbow piping for all manifold stations.
D-A9, F9 Rod end nut C1 X L1 Rod end male thread (mm) Bore size (mm) C1 X H1 L1 20.5 23.5 28.5 M14 x 1.5 32 20.5 23.5 28.5 M14 x 1.5 40 26 28.5 33.5 M18 x 1.5 50 (mm) Without auto switch With auto switch A B A B U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43
P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 10-4-7 8 Series CQ2Y Dimensions/63 to
D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75
250 L/min (PFMB7501) [P_2] Set value of OUT2 2 [ 500] 500 L/min (PFMB7102) [F 2] [oU2] page 36 [1000] 1000 L/min (PFMB7202) [ 25] 25 L/min (PFMB7501) [H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMB7102) [100] 100 L/min (PFMB7202) [F 3] [rES] [rES] Response time [1.00] 1 second page 41 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 42 [F13] [rEv] [rEv] Reversed display
Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .
42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.
45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A
x 1.25 0 0.039 M32 x 2 21.5 88 Up to 300 42.5 21 154 24 22 41 32 16 29.8 16 50 8 10 84.5 46.5 14.2 M14 x 1.5 With Rod Boot h (mm) JW JH B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 51 to 100 (Reference) (Reference) 101 to 150 151 to 200 201 to 300 101 to 150 151 to 200 201 to 300 20 25 32 40 81 93 106 131 25 37.5 50 75 23.5 10.5 12.5 36 30 68 18 85 97 110 135 25 37.5 50 75 23.5 10.5 12.5