Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) 55.5 [62] 43.1 36.5 25.5 49 A A 19 9.5 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) A A 19 9.5 18.5 (Pitch) n-M5 X 0.8 P=16 16 (A port) [ ] for AC Other dimensions are the same as the M5.

Series IDG

and 50HM are 03 only.

Compact Cylinder with Air Cushion Series RQ

Applicable mounting bracket Bore size (mm) Joint 55 6 18 56 YA-03 32, 40 A type mounting bracket B type mounting bracket 100 8 22 67 YA-05 50 YA-03 YB-03 32, 40 YU-03 YA-05 YB-05 50 YU-05 B type mounting bracket Allowable eccentricity mm Bore size 32 40 50 1 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.

Metering Valve with Silencer Series ASN2

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 Series ASN Construction Component

KC

(mm) <M5> <M5> Weight (g) Applicable tubing KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 M5 x 0.8 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 18 2.1 2.6 2.4 4 8 1 8 10 11.8 12 14 M5 x 0.8 10 16 14 20 27 25 34 43 48 41 Reference dimensions

AIR COMBINATION

Note5) Note6) Y110-M5-A Y210-01-A Y310-(01)-A Y410-(02)-A Y510-(02)-A Y610-03-A Y610-(03)-A VHS40-02A VHS20-01A VHS30-02A VHS50-06A Pressure relief 3 port valve Note6) VHS40-03A VHS40-06A Attachment VHS20-02A VHS30-03A VHS50-10A VHS40-04A E400-02-A E200-01-A E300-02-A E400-03-A E600-06-A Piping adapter Note6) E100-M5-A E200-02-A E300-03-A E500-06-A E400-04-A E600-10-A E200-03-A E300-04

Compact Cylinder with Air Cushion

(Example) Bore size 40 Part number A type mounting bracket . YA-03 Joint. YU-03 Joint part no.

SJ3A6

Please refer to Precautions for Handling Pneumatic Devices (M-03-E3A) for Safety Instructions and 3/4/5 Port Solenoid Valves Precautions. Fitting Assembly Replacement Caution M5, M3 port block assembly By replacing a valves fitting assembly, it is possible to change the port size of the 4(A), 2(B), 1(P), and 3/5(E) ports.

Clean Gas Filter

Port size Port size Rc, NPT, TSJ, UOJ Female thread 1/4 M5 02 M5 Symbol Connection Bracket is included as a standard.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

E-P HYREG

Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 3(R) 1 4 1 1 2 2(A) 1(P) 9

CNG

NDH10 MM MM MM NDH10 MM L L R1 R1 R1 R R R1 R R E1 E1 E1 E1 U1 NX NX A1 U1 A1 L1 U1 A1 NX U1 A1 L1 NX L1 NZ A L1 A NZ A A ND Part no. Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable A Applicable bore size (mm) MM R1 U1 NDH10 NX R1 R Part no. R pin part no.

AC Servo Motor Driver (CC-Link Type ）

A 10 CONTENTS 1.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Compact Cylinder with Air Cushion Series RQ

Type A mounting bracket . YA-03 Joint . YU-03 CQ2 RS RQ T2 V M W CQM Joint and Mounting Bracket (A and B Types) Part No.

RQ

YA-03 Joint. YU-03 Joint Part No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Molded-case circuit breaker (Note 1, 3) Fuse Frame, rated current Magnetic contactor Driver Voltage Voltage AC [V] Class Current Power factor Power factor (Note 2) [A] AC [V] Improving reactor is Improving reactor is not used used LECSS2-T5 30 A frame 5 A S-N10 10 LECSS2-T7 LECSS2-T8 30 A frame 10 A 30 A frame 5 A 15 Mitsubishi 240 T 300 Electric Corporation LECSS2-T9 30 A frame 15 A 30 A

5 Port Air Operated Valve SYA3000/5000/7000 Series

SYA714002 03 57 77.5 42 10.4 61 M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 69 6.4 2 x 4.3 (For mounting) 87.5 1.8 (Ventilation hole) 26.5 13.5 20.5 20.5 3/8, 1/4 (P , EA, EB port) 33 3/8, 1/4 (A, B port) 21 22.5 2 position double SYA724002 03 11.5 13.5 57 5.1 71.1 42 61 4 2 x M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 15.1 69 2 x 4.3 (For mounting

SYA3000/5000/7000

/ exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 71.1 18.6 57 4 2 x M5 x 0.8 (Pilot port) 61 42 B A PE 38 46 B A Manual override P EB EA 2 x 4.3 (For mounting) 21 69 28.6 109.7 SYA SYJA VZA VFA VFRA 26.5 2 x 1.8 (Ventilation hole) VA 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1743