Vacuum System Peripherals:

VX2250 VX2350 1 8 1 4 2 , 0.58 , 1 8 1 4 1.3 3 , 1 4 3 8 1.3 ZX , 1 8 1 4 2.6 ZR 4.5 ZM , 1 4 3 8 2.6 Series VX21 Series VX22 Series VX23 ZH , 1 4 3 8 6 4.3 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL , 1 4 3 8 6.4 8 8.8 11 8.8 11 1 4 M V ZY N.C.

Fieldbus System

Note 4) Not applicable for dual 3-port valves 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 C: Locking type (Manual) Note) C (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

High performance type Step Motor Controller (Servo/24 VDC)

1 0 0 0 9 0 0 1 0 0 1 9 0 0 1 0 0 1 10 0 0 1 0 1 0 10 0 0 1 0 1 0 11 0 0 1 0 1 1 11 0 0 1 0 1 1 12 0 0 1 1 0 0 12 0 0 1 1 0 0 13 0 0 1 1 0 1 13 0 0 1 1 0 1 14 0 0 1 1 1 0 14 0 0 1 1 1 0 15 0 0 1 1 1 1 15 0 0 1 1 1 1 16 0 1 0 0 0 0 16 0 1 0 0 0 0 17 0 1 0 0 0 1 17 0 1 0 0 0 1 18 0 1 0 0 1 0 18 0 1 0 0 1 0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1 0 1

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

4/5 Port Air Operated Valve Series SYJA3000

For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5 M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust

Electric Actuators

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length(L)[m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

Rotary Actuator

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218

CLQ

1 !

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

S070

Base mounted manifold/Bar base SS073B01Stations C V100 SY 2-M5 x 0.8 1 (SUP) port 2-M5 x 0.8 3 (EXH) port L2 L1 3 10.5 7 SYJ P = 7.2 4.3 8 21.5 4.3 4.0 VK 11.9 3 1 3 1 18.9 VZ 24 22 5 150 (Lead wire AWG#26) 22 VT 2-3.4 Mounting hole 6.4 VP VG VP n U side 1 2 3 4 5 D side S070 VQ (21.5) (10.5) 21.5 2 2 VKF 3.9 P = 7.2 11 VQZ n-M3 x 0.5 2 (OUT) port VZ VS VFN Dimensions Formulas: L1 = n x

S070

Base mounted manifold bar base SS07 3 B01 08 C SS073B01-04C 1 set Manifold Base no. Valve no. Ports S070B-5BG 3 set 3 port 3 SS070B-10A 1 set Blanking plate assembly no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

11 SOL.b Station 20 Station 20 24 11 24 24 SOL.a 3 SOL.b Station 5 3 SOL.b Station 5 SOL.a Station 4 15 SOL.a Station 4 15 Station 2 SOL.b 15 2 SOL.a Station 3 2 SOL.a Station 3 SOL.a 2 SOL.a Station 2 14 SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

High Power Cylinder Series RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm

CNG

TB TC XA XB l 0.25 ZZ H e f h ZZ 20 25 32 40 M5 x 0.8 21.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) M6 x 0.75 26.5 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x M8 x 1.0 26.5 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

For the wiring to power supply terminal, refer to back page 9. 26 Series SJ2000/3000 PC Wiring System with Power Supply Terminal Plug-in Connector Type How to Order Solenoid Valves SJ 3 1 U 60 C6 5 C Standard SJ 3 1 C Z J 60 C6 5 With switch Individual wiring SJ 3 1 Z 60 C6 5 M Note 1) [For plug-in mixed mounting] Single solenoid wiring spec.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Cylinder series Applicable bore size (mm) 10 16 20 25 32 40 50 63 6 BJ2-006 BJ3-1 CDJ2 BJ2-010 BJ3-1 BJ2-016 BJ3-1 CDVJ3/5, CDJ2X CDBJ2, CDLJ2 CDM2, CDBM2 CDM2X, CDM2Y CDLM2, CDVM3/5 CDG1, CDBG1 CDG1Y, MGG RHC MGC CDLG1, CDNG MLGC, REC CKG1 BM2-020 BJ3-1 BM2-032 BJ3-1 BM2-025 BJ3-1 BM2-040 BJ3-1 BMA2-063 BJ3-1 BMA2-050 BJ3-1 BMA2-020 BJ3-1 BMA2-032 BJ3-1 BMA2-025 BJ3-1 BMA2-040 BJ3-1 BMA2

HRX-OM-X084

1B 4 1 PT2 2B Blue 7 External temperature sensor 13 ue own Blue 3B 8 14 ue 15 (CN7) Blue 5 7 ue 16 6 Blue 8 Brown 3 4 1 9 Brown Blue Serial communication 9 10 Blue Blue Blue 7 12 2 Blue 9 Blue 11 3 10 11 12 Blue Blue Blue External communication section for customer connection Brown 15 1 Blue 8 Blue 16 9 17 2 Brown Blue 18 10 (CN1) 1/2 Red Brown 19 3 1A White Blue 20 11 2A outlet White Blue

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

Compact Cylinder with Lock Series CLQ

L D d m t d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft C type 18 for shaft C type 22 for shaft 20 25 32, 40 50, 63 80 100 21 25.6 41.6 50.6 64 72 7.6 9.6 9.6 13.4 17 21 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 0.9 1.15 1.15 1.15 1.35 1.35 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 02 2 stations N SD Note 2) SU Note 2) 11 11 stations W Note 1) Add 1 station for terminal block box mounting.