125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Single Axis Electric Actuator Serriies LJ1S Slider Guide

(B contact) 2 pcs.

MXW

200 100 400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Air Slide Table Series MXW

65 80 690 7 163 134 1 MXW25-300 232 395 245 320 60 52 60 740 8 188 159 2 165 Series MXW Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90 (V), D-A93 (V), D-A96 (V) Stroke (mm) Model 300 250 275 50 75 100 200 225 25 125 150 175 A 31.5 27.5 27.5 52.5 27.5 27.5 B 100.5 125.5 150.5 79.5 175.5 200.5 B A MXW8 W 11.5 7.5 7.5 32.5 7.5 7.5 V 120.5 145.5 170.5

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(Tightening torque of 0.3 to 0.4 Nm) Clamp screw B 2.10-23 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Base Mounted Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M 01 Series 1 VQZ100 Body width10mm Port size {2(A)port} Without sub-plate Rc(PT)1/8 01 CP Configuration (A) 2 N.C. 1 1 (P) 3 (R) Manual override B: Locking style (Slotted) : Non-locking push style (Flush) Body

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Vacuum Unit

26.4 B 80.9 (300) 10.4 76.8 1 For silencer exhaust type, air is exhausted from the slit on both sides.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

244 14.5 16 285.5 275 254.5 15.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 16 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) U1 2 Scale: 37% 2n1-M5 x 0.8 [With external pilot] (A, B ports) 24 13.3 (Pitch) P=10.5 13.3 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2

SZ3000

Then, supply air and confirm that there is no air leakage before operating. 19 Series SZ3000 Dimensions/SZ3000: Non-plug-in Stations SS5Z3-60 U Scale: 37% [With external pilot] 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P= 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE 2 B 2 B 2 B 2 R 3 R 3 P 1 P 1 A 4 A 4 A 4 A 4 A 4 A 4

7

/VXD2 Body Material: Aluminum, C37, Stainless Steel Grommet 3 A VXD2 Port size 04 (1/2) (With bracket) 300 U E C 7.5 1.6 7.5 1.6 5.5 T A b a B 5.5 OUT IN OUT IN M b a OUT IN 18 2 x P Port size d e (D) L K f J F I f 2 x P Port size d e Grommet (with surge voltage suppressor) C 300 U E A B T OUT IN M I J F 2 x P Port size L K (D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm

C85

26 7 23 A B 11.5 Hs Hs 8.5 D-A7H D-A80H 1 10.2 7 22 A B D-C73C D-C80C A 36.7 B 16 Hs Hs 8.5 10 13.3 13.3 D-A73C D-A80C B 24 A Hs 18.6 B 16 A 29 D-H7 D-H7W D-H7BAL D-H7NF Hs 8.5 1 7 23.5 A B D-A79W 14 Hs A 38.2 B 16 D-H7C Hs D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F 23 A B 1 8.5 Hs 11 13.3 13.3 10 A B 26 Auto Switch Mounting Position (mm) D-J79C 17 D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A7H/A80H

C85

26 7 23 A B 11.5 Hs Hs 8.5 D-A7H D-A80H 1 10.2 7 22 A B D-C73C D-C80C A 36.7 B 16 Hs Hs 8.5 10 13.3 13.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A73C D-A80C B 24 A Hs 18.6 B 16 A 29 D-H7 D-H7W D-H7BAL D-H7NF Hs 8.5 1 7 23.5 A B D-A79W 14 Hs A 38.2 B 16 D-H7C

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

IZx-OMP0064

50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50

VM

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano

Electric Actuator / Slider Type 《 AC Servo Motor 》

B A Auto switch mounting bracket A-A B-B Dust seal band type Seal band holder roller specification C No.

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

15

Selection Graph [Graph 2] Allowable load mass by stroke 10 [Graph 1] Allowable load mass by stroke 6 10 10 Load mass [kg] Load mass [kg] y, z + A 200 y, z + A 300 y, z + A 100 1 1 0 100 200 300 400 500 600 0 100 200 300 400 Stroke [mm] Stroke [mm] [Graph 4] Allowable load mass by stroke 20 [Graph 3] Allowable load mass by stroke 15 100 10 y, z + A = 0 Load mass [kg] Load mass [kg] y, z