High Vacuum Slit Valve Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,
IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.
A90 100 V 100 V or less Relay, PLC 2-wire 12 V No 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.
Auto switch and the connector Parallel seal type slit valve Symbol Auto switch Connector Nil A Lead wire: 0.5m Multiple connector(AMP) *C016 30D006 100 12 made by AMP is recommended for the connector (female type) C D-A93 (2pcs) D-sub connector *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD. is recommended for the connector (female type). F 5 - 3.
function Wiring (output) Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) DC AC 3-wire (NPN) 3-wire (PNP) 2-wire M9N M9P M9B A90 A93 5 V, 12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161
D-A93 D-M9B D-M9N, D-M9P Type Load voltage Load current range Indicator light Application 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 2.5 to 40 mA 40 mA or less Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC Reed auto switch Solid state auto switch Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors
D-A93 D-M9B D-M9N, D-M9P Type Load voltage Load current range Indicator light Application Reed auto switch Solid state auto switch 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 2.5 to 40 mA 40 mA or less Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors
The MXY series is a long-stroke type of the series MXP air slide table. The MXY comes with a built-in magnetically coupled rodless cylinder. Integrated with a linerar guide, the MXY provides a rigid, compact and lightweight design., Cylinder, Air, GUIDED CYLINDER, D99, 0.578 lb
The MXY series is a long-stroke type of the series MXP air slide table. The MXY comes with a built-in magnetically coupled rodless cylinder. Integrated with a linerar guide, the MXY provides a rigid, compact and lightweight design., CYLINDER, ACTUATOR, MXY SLIDE TABLE, DE, 8MM MXY DOUBLE-ACTING AUTO-SW, 1.59184 lb
The MXY series is a long-stroke type of the series MXP air slide table. The MXY comes with a built-in magnetically coupled rodless cylinder. Integrated with a linerar guide, the MXY provides a rigid, compact and lightweight design., Cylinder, Air, GUIDED CYLINDER, D99, 0.578 lb
The MXY series is a long-stroke type of the series MXP air slide table. The MXY comes with a built-in magnetically coupled rodless cylinder. Integrated with a linerar guide, the MXY provides a rigid, compact and lightweight design., Cylinder, Air, GUIDED CYLINDER, D99, 0.57800 lb
Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Bore Size: 20mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Bore Size: 25mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Bore Size: 8mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Adjuster Bolt, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Mounting: B (Basic Style), Bore Size: 40mm, Thread: TN (NPT), Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Mounting: B (Basic Style), Bore Size: 50mm, Thread: TN (NPT), Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Mounting: B (Basic Style), Bore Size: 63mm, Thread: Rc, Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Mounting: B (Basic Style), Bore Size: 32mm, Thread: Rc, Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal