10C)2.8(at ?10C)?0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)2.8(at ?10C)?0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)2.5(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)3.2(at ?10C)?0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)3.2(at ?10C)?0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)5.9(at ?10C)?0.10.65/0.95(at 30 l/min)30Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Rate) Seal material Leakage rate Operating fluid temperature (C) Solenoid valve option (symbol) Ambient temperature (C) Note) Non-leak, Medium vacuum 106 Pam3/sec or less Power source Air Nil, G V, M 10 Note) to 60 10 Note) to 40 1 cm3/min or less NBR, FKM 10 Note) to 80 10 Note) to 60 20 to 60 20 to 40 AC DC Note) Value on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C

VXD21/22/23

VXD21 DC AC VXD22 DC AC VXD23 DC 5 4 7 6 9 8 Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C

VXP21/22/23

45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C

Stopper Cylinder

to 70C With auto switch: 10C to 60C (No freezing) Lever Round Bar Lubricant Not required (Non-lube) Cushion Rubber bumper Stroke length tolerance +1.4 0 0 *1 Piston speed 50 to 500 mm/s Mounting Through-hole, Both ends tapped *1 Stroke length tolerance does not include the amount of bumper change.

Air Slide Table

Specifications Ambient temperature 10C to 100C (No freezing) Seal material Fluororubber MXQ X2128 Standard model no. Grease Heat-resistant grease (GR-F) Heat-resistant specification Applicable adjuster type Metal stopper Specifications other than the above are the same as the standard type.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Action Double acting Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.08 MPa 0.2 MPa Piston speed 50 to 500 mm/sec* 15 to 300 mm/sec* Ambient and fluid temperature Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing) 5C to 60C Cushion Air cushion None Stroke length tolerance Up to 250: +1.0 0 , 251 to 1000: +1.4 0 , 1001 to 1500:

Clamp Cylinder with Lock with Magnetic Field Resistant Auto Switch Rod Mounting ø 40, ø 50, ø 63 Series CLK2G/CLK2P CLK2G

to 70C With auto switch : 10C to 60C Non-lube 50 to 500 mm/s +1.0/0 Retraction direction (Head end): With air cushion JIS Class 2 Double clevis Note 2) Ambient and fluid temperature Lubrication Piston speed Stroke length tolerance Cushion Thread tolerance Mounting Symbol Note 1) Be sure to comply with guidelines in the back of page 3 when selecting cylinders.

MWB

to 70C With auto switch: 10C to 60C (No freezing) Double Acting, Single Rod Double Acting, Double Rod Lock Unit Made to Order Auto Switch Lubricant Not required (Non-lube) Piston speed 50 to 1000 mm/s1 Stroke length tolerance Up to 250 st: +1.0 0 , 251 to 1000 st: +1.4 0 , 1001 to 1500 st: +1.8 0 , 1501 to 2000 st: +2.2 0 Cushion Air cushion or Rubber bumper Port size (Rc, NPT, G) 1/8 1/

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

Refer to page 123 for details. 42 Series CJ2 Air Cylinder: Standard Type Double Acting, Single Rod Specifications 10 6 16 Bore size (mm) Double acting, Single rod Action Air Fluid 1 MPa Proof pressure 10.7 MPa Maximum operating pressure 0.12 MPa 0.06 MPa Rubber bumper Minimum operating pressure CJ1 0.1 MPa Air cushion Without auto switch: 10C to 70C, With auto switch: 10C to 60C Ambient

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 200, 250, 300 Single rod 1/8 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C