Bore Size: Ø100, Thread: NPT, Stroke: 100mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø100, Thread: NPT, Stroke: 25mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø100, Thread: NPT, Stroke: 50mm, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Speed Control Type: Right Angle, Applicable Tubing: 1/4", Suffix: Required Selection w/Speed Control

Bore Size: Ø100, Thread: NPT, Stroke: 100mm, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Speed Control Type: Right Angle, Applicable Tubing: 3/8", Suffix: Required Selection w/Speed Control

Bore Size: Ø100, Thread: NPT, Stroke: 125mm, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Speed Control Type: Right Angle, Applicable Tubing: 3/8", Suffix: Required Selection w/Speed Control

Bore Size: Ø100, Thread: NPT, Stroke: 25mm, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Speed Control Type: Right Angle, Applicable Tubing: 1/4", Suffix: Required Selection w/Speed Control

Bore Size: Ø100, Thread: NPT, Stroke: 100mm, Auto Switch: Y59B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø100, Thread: NPT, Stroke: 100mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø100, Thread: NPT, Stroke: 50mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø100, Thread: NPT, Stroke: 100mm, Auto Switch: Z80--Reed, DC Volt., AC Volt, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Electric Slide Table / High Precision Type 《 AC servo motor 》

type) Operating temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Regeneration option May be required depending on speed and work load Motor output/Size 100W/40 200W/60 Electric specifications Motor type AC servo motor (100/200 VAC) Encoder Incremental 17-bit encoder (Resolution: 131072 p/rev) Horizontal 45 65 Power consumption [W] *5 Vertical 145 175

PROFIBUS DP Compatible Fieldbus System

Stations 1 2 L1 [mm]: Rail length 135.5 185.5 L2 [mm]: Mounting pitch 125 175 L3 [mm]: Manifold length 110 158 L4 [mm] 12.5 13.5 -41No.EX##-OMO0019 When only input blocks for M12 connector are connected Stations 1 2 3 4 5 6 7 8 L1 [mm]: Rail length 110.5 123 148 173 185.5 210.5 223 248 L2 [mm]: Mounting pitch 100 112.5 137.5 162.5 175 200 212.5 237.5 L3 [mm]: Manifold length 82 102 122 142

CM2

52 65 77 90 115 140 165 36 18.2 40 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 46 20.2 Built-in One-touch fitting With rod boot With air cushion (mm) Symbol Bore ZZ Bore WA G N1 WB P Q Stroke 1 to 50 17.5 13 8 8.5 6 23 20 20 Bore 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 158 171 183 196 221 246 17.5 13 8 10.5 6 26 25 25 25 162 175

AC

included in the bowl assembly for AF3000-AF6000. 1.4-4 AF1000 to 6000 Dimensions Option (AF3000 to AF6000) AF1000/2000 Metal bowl Drain guide Drain cock/Barb fitting Metal bowl with level gauge Pressure differential auto drain AF3000/4000/4000-06 Model Barb fitting Drain guide Metal bowl Metal bowl with level gauge B B B B B 162 198 202 277 291 137.5 173.5 177.5 252.5 266.5 135 171 175

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

20 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 314 324 350 360.5 330 340 362.5 373 170 180 200 210.5 186 196 225 235.5 202 212 237.5 248 218 228 250 260.5 234 244 275 285.5 250 260 287.5 298 266 276 300 310.5 282 292 312.5 323 298 308 337.5 348 58 68 87.5 98 74 84 112.5 123 90 100 125 135.5 106 116 137.5 148 122 132 162.5 173 138 148 175

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

78 60 M plug connector (M) R 3 1 P (Lead wire length) 94.5 83 Cover diameter 1.5 Cross section 0.23 mm2 300 61.5 <66.5> Indicator light 1 P 3 R < >: AC Formula L1 = 19n + 11 L2 = 19n + 23 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 49 61 87.5 98 68 80 100 110.5 87 99 125 135.5 106 118 137.5 148 125 137 162.5 173 144 156 187.5 198 163 175

Proposals for Energy Saving

Standard strokes Standard stroke (mm) Long stroke (mm) Bore size (mm) 350, 400, 450, 500, 600 75, 100, 125, 150, 175 40, 50, 63 700, 800, 900, 1000 200, 250, 300 Intermediate strokes and strokes of less than 75mm can also be manufactured.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

CQ2 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Built-in Magnet Cylinder Model Double acting Action D 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 RQ If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) CDQSL25-30D 25 For Manufacture of Intermediate Strokes, refer to page 552.

Plate Cylinder

Optimum operating position D-M9A(V) D-M9W(V) Series Variations Standard stroke (mm) Rod end configuration Action Type Size 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Single rod 25 32 Double acting 40 Double rod 50 Male thread, Female thread 63 Spring return, Spring extend 25 32 Single acting 40 50 63 Features 1 Series MU Rod End Allowable Load Y axis X axis In case of a plate