Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 150mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 200mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 300mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 350mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 400mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 75mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Series AP3100

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Table of Contents - Tubing

Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.

SMC Pneumatic Clean Series

A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

90

r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ For details, refer to the product catalog available on SMC website.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Electric Actuator / Slider Type 《 AC Servo Motor 》

When the motor mounting position is right side parallel (LEFS*R) or left side parallel (LEFS*L), the rotation direction selection is 0(+: Counter motors side).

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

Air Catch Sensor

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis