Modular Type Regulators Series AR

Note 6) Note 6) Note 6) Note 6) Note 5) Note 5) Note 5) Note 5) Note 5) Note 5) Z Note 5) Z Note 4) Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.

MNB

6-23 25 to 700 9-6-1 2 Series MNB Specific Product Precautions 1 Be sure to read before handling.

MNB

The above screw kit is also included when D-F5BA type switches are shipped separately. 9-6-25 26 Series MNBW Construction $3 #8 @9 #2 $9 @3 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

Fieldbus system EtherCAT compatible SI Unit

System 4 1: Diagnosis of SI unit is generated. 5 1: Diagnosis of IO-Link master unit is generated. 6-7 Reserved 0 1: There is an error in unit 0. 1 1: There is an error in unit 1. 2 1: There is an error in unit 2. 3 1: There is an error in unit 3. 4 Unit 4 1: There is an error in unit 4. 5 1: There is an error in unit 5. 6 1: There is an error in unit 6. 7 1: There is an error in unit 7.

Smooth Cylinder/Low Speed Cylinder

4 6 21.5 4 6 6 4 8 1.5 [1] 6 3.5 6 3.5 22.5 10 7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

MXW Series Long Stroke Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 133 Q MXW Series 8, 12, 16, 20,25 Linear guide table provides long stroke Linear guide Long stroke (up to 300mm) Linear guide provides long stroke and smooth operation without vibration.

SZ3000

M5 x 0.8 Mixed C4 C6 M5 M 1 2 3 4 5 5 6 24VDC 12VDC Match to the voltage specifications of the manifold.

Free Mount Cylinder

(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 M5 x 0.8 Rc 5 7 20 32 2 6 7 8 13 17 28 16.5 31 1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

REA/REB

9 @1 q !5 !4 y i !0 !6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

High Purity Chemical Valve

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil Variations N LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter 4 8 10 16 22 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 12, 19 19, 25 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Basic type N.C. PB PA PA N.O.

Series AP500

q w q AP1510S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 2PW 3PW 4PW 40 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Refer to gauge guide (P.94) for gauge specifications.

Slide Tables MX Series

N347 Slide Tables MXH, MXS, MXQ, MXF, MXW, MXP MX Series Integrated Cylinder and Guide Bearing 6 Styles Multiple Mounting and Porting Configurations Bore Sizes from 6mm to 25mm Wide Range of Options Q Q Table of Contents Q Q Q MX Series Features .pages 4-5 Q Safety Instructions . pages 6-22 MXH .pages 9-11 MXS.pages 12-14 MXQ.pages 15-17 MXF .page 18 MXW.page 19 MXP.pages 20-21

CRBU

Refer to pages 11-13-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 6 for Precautions on every series. Component Parts Note No. q w e r t y u i o !0 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Air Cylinder

200 (2") 2.09 6 2.6 9/16 3/8 1 1/8 1.06 1.84 2 11/16 3/8 0.3 6 9/16 1 1/8 1.5 2 1/2 1 7/16 1.26 5/16-24 3 5/8 6 2.40 1 3/8 1 3/4 3/8 1/2 1 3/4-16 1 1/8 7/8 250 (2.5") 2.13 6 1/8 3.1 9/16 3/8 1 1/8 1.06 2.19 3 1/8 3/8 0 6 11/16 1 1/8 1.5 3 1 5/8 1.30 5/16-24 3 3/4 6 1/8 2.48 1 3/8 2 1/4 3/8 1/2 1 1/4 1-14 1 5/8 1 1/4 325 (3.25") 2.59 7 3/8 3.9 3/4 1/2 1 3/8 11/64 1.18 2.76 3 13/16 5/8 0 7

EXxx-OMW0014CN

IO-Link DI DO StandardIO StandardIO 2 0x00 . 9-4 X0 X1 X2 X3 IO-Link 1 2 3 4 IO-Link 2 (I/Q) Bit 1 Bit 3 Bit 5 Bit 7 EX245-LA1 (EX245-LB1 0) 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DO 2 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DI() 9.5.

VCL

Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Air Slide Table Series MXP

1 t e y !7 !6 !5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

CY1

8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !