Rubber seal 5 Port Solenoid Valve Series SYJ5000

(with connector and 2 of sockets only) Rated voltage Lead wire length 5 24 VDC Nil 300 mm 6 12 VDC 6 600 mm Electrical entry V 6 VDC 10 1000 mm Grommet, 300 mm lead wire G S 5 VDC 15 1500 mm Grommet, 600 mm lead wire H R 3 VDC 20 2000 mm L With lead wire 1 100 VAC 50/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

DOC1023126

9 to 300 5 to 150 30 to 900 24 to 640 12 to 320 6 to 160 range 400 to 500 30 to 900 24 to 640 12 to 320 6 to 160 Actuator specification Max acceleration /deceleration [mm/s2] Horizontal 10 Vertical 5000 Pushing speed [mm/s2] Note5) 35 30 Positioning repeatability [mm] 0.05 Lost motion [mm] Note6) 0.1 or less Lead [mm] 20 12 6 3 24 16 8 4 Impact/Vibration resistance [m/s2] Note7) 50/20 Actuation

PF2D

Mount switches in locations where there is no vibration greater than 98 m/s2, or no impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

3 Port Solenoid Valve Rubber Seal Series SY100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Refrigerated Air Dryers

Wall *1 For air-cooled type, leave a space of at least 600 mm between the heat exhausting surface and the wall. For water-cooled type, leave a space at least 600 mm between the facility water piping side and the wall. Leave at least 600 mm on the sides indicated with .

HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Slotted locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/pilot valve common exhaust type Pilot exhaust Type of actuation Without surge voltage suppressor With surge voltage suppressor Not required Lubrication Types R, U Types S, Z Unrestricted Mounting orientation 2 position single 19 or less 26 or less 19 or less Impact/Vibration resistance m/s2

3

500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

V

Ambient & Fluid Temperature -10 ~ 50C A Clean Room version is available to specified Lubrication Not Required order Manual Override Non-Locking Push Type Shock Resistance/Vibration Resistance 150 / 30m/s2 Mounting Orientation Free The VQD1000 is used either on a Single SubEnclosure Dust Proof base or Manifold Mounted.

Rotary Table/

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

5 Port Solenoid Valve

Symbol Length Nil 3 6 10 150 mm 300 mm 600 mm Part no. 1000 mm S0700-S-M5 Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

Compact 5-Port Solenoid Valve

Made to Order Manifold Exploded View 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 ZK2 Combination Manifold 100 Fittings, Replacement Parts, Tools 0 100 200 300 400 500 600 700 800 Average speed [mm/s] Manifold Options Specific Product Precautions * Values at extension of a directly coupled

A_HEC-OM-K001

flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 1200 1000 Facility water 25oC Cooling capacity W Facility water 10oC 800 Facility water 35oC 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-9 Cooling capacity (HED005) 2) Heating capacity 1400 1200 Heating capacity W 1000 Facility water 35oC 800 Facility water 10oC 600 Facility water 25oC 400 200 0 0 10 20

V100

Lead wire length 2000 mm -+ Socket Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire Connector Hook For DC V114-5LO SY100-30-4A-20 For AC V114A-1LO SY100-30-1A-20 2.

Modular F.R.L. Units

Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-A AFD40-A P1=0.5 MPa P1=0.3 MPa 0.04 0.04 P1=0.7 MPa P1=0.3 MPa P1=0.7 MPa P1=0.5 MPa 0.03 0.03 Pressure drop [MPa] Pressure drop [MPa] 0.02 0.02 P1=0.5 MPa P1=0.5 MPa P1=0.3 MPa P1=0.3 MPa P1=0.7 MPa 0.01 0.01 P1=0.7 MPa 0 0 0 0 100 200 300 500 400 600 200 800 1000 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 57 Mist Separator

Aluminum High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.