Fieldbus system Ethernet POWERLINK compatible SI unit Round head screw (M3 x 8) , 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6) , 2 pcs. Round head screw (M3 x 8) , 4 pcs. (2) End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20) , 1 pc. P tight screw (4 x 14) , 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.
Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N
Hexagon socket head cap screw Round head Phillips screw With spring washer, M3 x 0.5 x 14 L With spring washer, M3 x 0.5 x 16 L Switch mounting fitting Magnetic field resistant auto switch Mounting bracket kit number Items and number of each item Switch mounting bracket x 1 Switch mounting nut x 1 Round head Phillips screw x 1 Hexagon socket head cap screw x 2 Spring washer x 4 BQP1-
SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.
Real-time switch output Unit switching Hysteresis mode ON YES Display Real-time flow rate Accumulated flow OFF P-1 P-2 L/min L Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (L/min, L, m3 or m3x10) will be set for the type without the unit switching function.
A Mounting screws (M3 x 8L) (Accessory) Waterproof seal (Accessory) Panel mount adapter Power supply/Output connection cable ZS-26-A Panel Front protective cover + Panel mount B Mounting screws (M3 x 8L) Front protective cover (Accessory) Waterproof seal (Accessory) Panel mount adapter Panel Option When only optional parts are required, order with the part numbers listed below.
(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) 5. Modification of the detecting position should be made in the condition of 3. Auto switch Auto switch mounting nut Auto Switch Mounting Bracket Part No.
Body through hole MI W S CEP1 CE1 Max. tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt CE2 M2.5 x 0.45 0.5 ML2B M3 x 0.5 0.88 C J G5-S M5 x 0.8 4.3 CV M6 x 1 7.3 MVGQ M8 x 1.25 17.5 Max. tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 CC M3 x 0.5 0.88 Caution RB M3 x 0.5 0.88 1.
Body through hole MI W S CEP1 CE1 Max. tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt CE2 M2.5 x 0.45 0.5 ML2B M3 x 0.5 0.88 C J G5-S M5 x 0.8 4.3 CV M6 x 1 7.3 MVGQ M8 x 1.25 17.5 Max. tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 CC M3 x 0.5 0.88 Caution RB M3 x 0.5 0.88 1.
(Tightening torque of M3 screw: 0.5 to 0.7 Nm) 8.
Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50
x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through
C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach
x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through
Unscrew the M4 screws (47, 3 pcs.), M3 screws (48, 2 pcs.) and M3 screw (49). Remove the spool valve assembly. The spool valve may be cleaned if special attention is paid to a clean environment and proper procedure. After unscrewing the M4 screws (47, 3 pcs.) the spool valve may be lifted from the fixture.
IDFB4E to 15E AT 1.6 [40] IDF IDU Air Flow Capacity 2.36 [60] Model IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFA D Circuit breaker 5 SCFM (8 m3/h) 13 SCFM (23 m3/h) 17 SCFM (29 m3/h) 19 SCFM (32 m3/h) 23 SCFM (39 m3/h) Air flow capacity (ANR) IDFB IDFB A Conditions: Inlet air pressure: 100 psi (0.7 MPa), Inlet air temperature: 100F (37.8C), Outlet air temperature: 50F (10C), Ambient temperature
RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0
(When greasy fumes are 1,000 mg/m3 at the IN side, it will be 5 mg/m3 or less at the OUT side.) Exhaust ducts from a vacuum pump is not necessary.
VQ44 500 1 A side COM 6 Note 1) There is no polarity. It can also be used as COM. Note 2) Double wiring is used on sub-plate VQ410 .