Cylinder with Lock

65 + 30 (n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)*1 95 + 100 (n 2) (n = 2, 4, 6, 8)*1 100 + 100 (n 2) (n = 2, 4, 6, 8)*1 105 + 100 (n 2) (n = 2, 4, 6, 8)*1 110 + 100 (n 2) (n = 2, 4, 6, 8)*1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

155

2 3/4 1 3/8 1/2 3/4 1 3/8 1/2 3/4 1 4.6 6.5 11.8 18.3 3.5 4.8 7.1 11.0 1.25 2.7 4.5 7.3 0.5 MPa 1.0 MPa 1.6 MPa ( ): Mass including the bracket Add the mass of an auto switch additionally.

2-Color Display High Precision

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

Precautions 1

Auto switch mounting Bore size (mm) 40 32 25 20 D-A9 D-M9 D-M9W Note 1) Note 1) Note 1) Note 1) 1 BM2-040 1 BM2-032 1 BM2-025 1 BM2-020 2 BJ3-1 2 BJ3-1 2 BJ3-1 2 BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7NF BM2-040 BM2-032 BM2-025 BM2-020 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-040 BA2-032 BA2-025 BA2-020 Note 1) Two kinds of auto switch mounting brackets are used as a set.

21

Foot 2 CM-L020B CM-L032B CM-L040B 2 foots, 1 mounting nut Flange 1 CM-F020B CM-F032B CM-F040B 1 flange Single clevis 1 CM-C020B CM-C032B CM-C040B 1 single clevis, 3 liners Double clevis (with pin) 1 double clevis, 3 liners, 1 clevis pin, 2 retaining rings 1 trunnion, 1 trunnion nut 1 CM-D020B CM-D032B CM-D040B Caution Trunnion (with nut) CM3-T020B CM3-T032B CM3-T040B 1 1.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Suction Verification High Vacuum Set-value correction by auto-shift function Suction Work 1 Work 2 Work n Supply pressure normal Supply pressure drop Supply pressure increase Max. A Rectified value P-1 Rectified value P-1 (Differential) Pressure H-1 (P-3) H-1 (H-2) n-1 Min.

9.8

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

Manifold Specifications

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 K plug connector 3-7-15 Series VZS2000 How to Order Manifold Assembly Manifold Specifications Porting specifications 4(A), 2(B) Port 1(P), 5(R1) 3 (R2) Port size Rc 4(A) 2(B) Stations Please indicate manifold base type, corresponding valve, and option parts.

S Couplers Series KKH

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KKH3S-01MS -02MS KKH4S-01MS -02MS -03MS -04MS 1/8 1/8 1/4 1/4 Female thread type Female thread type Body size Port size Part no.

VQ4000

Manual override VQC 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center Nil: Non-locking push type (Tool required) B: Locking type (Tool required) C: Locking type (Manual) (A) 4 (B) 2 (A) 4 (B) 2 VQC 4/5 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQZ 2 2-position double 3-position pressure center (A) 4 (B) 2 (A) 4 (B) 2 Rubber SQ 5 1 (P) 5 (R1) 3 (

VQC4000

(B) 2 VP4 Metal 4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Porting specications 2-position double 3-position pressure center (A) 4 (B) 2 Rubber (A) 4 (B) 2 VQ 4/5 Nil Side ported B Bottom ported 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQC 1/2 Manual override 3-position double check (A) 4 (B) 2 Note) 6 VQC 4/5 VQC 4/5 B: Locking type (Tool required) C: Locking type (Manual) Nil:

Air Cylinder

L Axial foot (1 pc.) (1 pc.)Note 2) (1 pc.) (1 pc.)Note 2) (2 pcs.) F Rod flange (1 pc.) (1 pc.) (1 pc.) (1 pc.) G Head flange (1 pc.) (1 pc.) (1 pc.) (1 pc.) C Single clevis (1 pc.) Note 3) (1 pc.) (1 pc.) (Max. 3 pcs.) Note 3) D Double clevis (1 pc.) Note 3) (1 pc.) (1 pc.) (Max. 3 pcs.) Note 3) (1 pc.) U Rod trunnion (1 pc.) Note 4) (1 pc.) (1 pc.) (1 pc.)

Series VQ Base Mounted Metal Seal/Rubber Seal

G H J1 J2 K Q R1 R2 V Note 1) Refer to p.1.10160 for details.

Air Cylinder Series MB

50 12.5 Y-05MNote 1) 64 16.5 Y-08MNote 1) 80 23.5 Y-10MNote 1) 80 23.5 Y-12MNote 2) 119 28.5 Note 1) A pin, cotter pin and a flat washer are equipped as standard.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Modular F.R.L. Unit

Unit Air Filter + Regulator AC10B to 60B AC40B AC20B Standard Specifications AC25B AF30 AC20B AF20 AC30B AF30 AC40B AF40 AC40B-06 AF40-06 AC50B AF50 AC55B AF60 AC60B AF60 AC10B AF10 Model Air filter Component AR25 Regulator AR20 AR30 AR40 1/4 3/8 1/2 1/4 AR40-06 AR50 AR50 AR60 AR10 1/4 3/8 1/8 1/8 1/4 1/8 1/4 3/8 1/8 3/4 1 1/4 M5 x 0.8 Port sizes 3/4 1 1 Note 1) 1/4 1/4 1/4 1/16 Pressure

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

Vacuum Pad

Chart 1.

Vacuum Pad

Chart 1.