Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Allowable kinetic energy (J) 1.21 500 N 800 N Holding force 320 N 0.43 0.68 1.

MHK2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY MHW MRHQ Misc.

Series IDG

0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow rate

3 Port Solenoid Valve Series VQ100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VT External non-leak Latching Negative COM AC Normally open Vacuum VP VG VP S070 VQ VKF VQZ VZ VS VFN Copper-free The fluid contacting section is copper-free and the standard style can be used as it is.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Value in the initial state) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series AN03 100 m 25 dB (A) Page 5-10-3 Metal case type Exhaust in only one direction. Prevents scattering of mist and noise.

48

Table Displacement (ReferenceValue) W Load center of gravity located at the center of the table 0.4 1000 mm stroke W 0.3 Displacement [mm] 300 mm stroke 800 mm stroke 0.2 0.1 500 mm stroke 0.0 0 2.2 4.5 6.7 9.0 11.2 Load W [lbf] Table Displacement (ReferenceValue) Amount of displacement when the load is offset by L from the center of the table.

Dual Rod Cylinder Series CXSJ/CXS

D-X Individual -X 539 Series CXSJ Horizontal Mounting Graph (6) Up to 30 mm stroke Graph (5) Up to 10 mm stroke V = Up to 400 mm/s V = Up to 800 mm/s V = Up to 400 mm/s V = Up to 800 mm/s 0.2 0.2 0.1 0.1 Mass m (kg) Mass m (kg) 0.05 0.05 0.04 0.04 0.03 0.03 0.02 0.02 CXSJM6 CXSJL6 CXSJM6 CXSJL6 20 40 0.01 20 40 0.01 60 0 60 0 Overhang l (mm) Overhang l (mm) CXSJM CXSJL Graph (9) V = Over

LG1H

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 95 B 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

CE2

For safety measures Stroke reading cylinder with brake + Counter MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Prevents dropping from raised positions during intermediate stops.

ML2B

6 e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

REC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 20 mm n n pcs.

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: S2 (100W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 400mm, Motor Option: B (w/Lock), Vacuum Port: D (Both Left and Right), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 400mm, Motor Option: B (w/Lock), Vacuum Port: D (Both Left and Right), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse

Accuracy: Basic Type, Size: 25, Motor Mounting: Top Mounting Position, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 30mm, Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100~

Accuracy: Basic Type, Size: 25, Motor Mounting: Top Mounting Position, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100~120V, Incremental, Pulse

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 50mm, Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100~120V, Incremental, Pulse

Accuracy: Basic Type, Size: 25, Motor Mounting: Top Mounting Position, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 150mm, Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 50mm, Motor Option: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Body Bottom Tapped, Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA1, 100 to 120V, I/O Connector: w/o Connector

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: 100W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: w/Lock, Vacuum Port: Both Left and Right, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -