5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Slotted locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/pilot valve common exhaust type Pilot exhaust Type of actuation Without surge voltage suppressor With surge voltage suppressor Not required Lubrication Types R, U Types S, Z Unrestricted Mounting orientation 2 position single 19 or less 26 or less 19 or less Impact/Vibration resistance m/s2

3

500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

V

Ambient & Fluid Temperature -10 ~ 50C A Clean Room version is available to specified Lubrication Not Required order Manual Override Non-Locking Push Type Shock Resistance/Vibration Resistance 150 / 30m/s2 Mounting Orientation Free The VQD1000 is used either on a Single SubEnclosure Dust Proof base or Manifold Mounted.

Rotary Table/

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

5 Port Solenoid Valve

Symbol Length Nil 3 6 10 150 mm 300 mm 600 mm Part no. 1000 mm S0700-S-M5 Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

Compact 5-Port Solenoid Valve

Made to Order Manifold Exploded View 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 ZK2 Combination Manifold 100 Fittings, Replacement Parts, Tools 0 100 200 300 400 500 600 700 800 Average speed [mm/s] Manifold Options Specific Product Precautions * Values at extension of a directly coupled

A_HEC-OM-K001

flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 1200 1000 Facility water 25oC Cooling capacity W Facility water 10oC 800 Facility water 35oC 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-9 Cooling capacity (HED005) 2) Heating capacity 1400 1200 Heating capacity W 1000 Facility water 35oC 800 Facility water 10oC 600 Facility water 25oC 400 200 0 0 10 20

V100

Lead wire length 2000 mm -+ Socket Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire Connector Hook For DC V114-5LO SY100-30-4A-20 For AC V114A-1LO SY100-30-1A-20 2.

Modular F.R.L. Units

Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-A AFD40-A P1=0.5 MPa P1=0.3 MPa 0.04 0.04 P1=0.7 MPa P1=0.3 MPa P1=0.7 MPa P1=0.5 MPa 0.03 0.03 Pressure drop [MPa] Pressure drop [MPa] 0.02 0.02 P1=0.5 MPa P1=0.5 MPa P1=0.3 MPa P1=0.3 MPa P1=0.7 MPa 0.01 0.01 P1=0.7 MPa 0 0 0 0 100 200 300 500 400 600 200 800 1000 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 57 Mist Separator

Aluminum High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.

Compact Rotary Actuator

Warning Do not drop, bump or apply excessive impacts (300m/s2 or more for reed auto switches and 1000m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. 2. Observe the proper tightening torque for mounting an auto switch.

Rotary Table

Warning Do not drop, bump or apply excessive impacts (300m/s2 or more for reed auto switches and 1000m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. Observe the proper tightening torque for mounting an auto switch.

Vacuum Unit Ejector / Vacuum Pump System

/s2 (Without pressure sensor and pressure switch, With pressure sensor) Impact resistance Note 2,3) 100m/s2 (With pressure switch) Standard CE, RoHS Note 1) The characteristics are satisfied when tested for 2 hours in each of the X, Y and Z directions at 10 to 500 Hz without energization.

Vacuum Unit Ejector / Vacuum Pump System

switch) 150m/s2 (Without pressure sensor and pressure switch, With pressure sensor) Impact resistance Note 2,3) 100m/s2 (With pressure switch) Standard CE, RoHS Note 1) The characteristics are satisfied when tested for 2 hours in each of the X, Y and Z directions at 10 to 500 Hz without energization.

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Applicable Stroke Table 4 )Standard DProduced upon receipt of order Stroke (mm) Model 200 400 300 500 600 700 800 900 1000 1200 1500 LEJS40 LEJS63 ) ) ) D D ) ) ) ) D D D D ) ) D ) D D D 4: Strokes other than those shown above are produced as special order (1 mm increments).

Vacuum Unit

.: 1.4 mm Vibration resistance1 30 m/s2 Without pressure sensor/switch With pressure sensor 20 m/s2 With pressure switch Impact2, 3 resistance 150 m/s2 Without pressure sensor/switch With pressure sensor 100 m/s2 With pressure switch Standards CE marking, RoHS 4 Refer to the Valve assembly on page 32 for the valve model number. 5 ZK2-VAmR: After instantaneous energization of the supply valve

ZR

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

VZ1000

800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VP4 VZ1120--M5 (Piping: 6 x 1 m) VZS VFS VS4 AS2001F-06/AN120-M5 AS2301F-M5-06/AN120-M5 Speed controller/Silencer It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Ambient and fluid temperature (C) 10 or less Response time (ms) (1) 20 Max. operating frequency (Hz) Manual override Non-locking push type, Locking slotted type Push-turn locking slotted type Push-turn locking lever type {SY1 4, SY1 4A only} 1 2 1 2 Not required Lubrication Unrestricted Mounting position 150/30 Impact/Vibration resistance (m/s2) (2) Body ported Dustproof Enclosure Note 1)