Table Accuracy: Basic, Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w

Table Accuracy: H (High Precision), Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w

Table Accuracy: H (High Precision), Size: 50, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable,

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable,

Table Accuracy: Basic Type, Max. Rotating Torque: Basic, 6.6 N.m, Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 3m, Controller: Ether Net/IP™, Mounting: Screw Mounting, I/O Cable: -

Table Accuracy: Basic Type, Max. Rotating Torque: J (Basic, 6.6 N.m), Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: R3 (3m), Controller: C91 (Ether Net/IP™), Mounting: 7 (Screw Mounting)

CG5-S

50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 22 22 32 32 I-G10SUS Y-G10SUS 100 100 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 IY-G10SUS Not applicable for -X165US option Not applicable for -X165US option Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS440 (pin) SUS304 (snap ring) LL CDd9 (CX) LY d Dd9 t m t LH l m L LT (LX

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

ISO Standard Hydraulic Cylinder

x 1.5 19 52 M42 x 2 58 86 15 187 243 56 115 90 56 72 16 90 50 38 22 3/4 148 79 42 337 CHSD Series Dimensions Double clevis: CHSDCB SS + Stroke Width across flats G GB Y PJ + Stroke 2 x RcP GA J MM B CD D E V MA Air release Cushion valve NB NA K F A B C W W CX RR L S + Stroke ZZ + Stroke H CB Stroke range Bore size (mm) B CD F A D CB G C E GA J NB S CX GB L NA P PJ RR MM MA K H 40 52 14 64

CJ5-S

50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100 45 22 22 32 32 79 21 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 M26 x 1.5 IY-G10SUS Knuckle Joint Pin Pivot Bracket Material: Stainless steel 440 (Pin) Stainless steel 304 (Bracket, Snap ring) Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) LL CDd9 (CX) LY Dd9 d t m t LH l m L LT (LX) LG LF

SMC Pneumatic Clean Series

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

10-/1122Basic style / CXS20, CXSL20 10-/11221221Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment ZZ S 12 12 SS 25 Z 2-5.5 through 6 30 1 M8 x 1.25 x 6L (Hexagon socket head set screw) 29.5 counter bore depth 5.3 23 1 500.2 500.2 28 62 53 64

Clean Regulator/Fluororesin Type

OUT 34 62 ITVX 34 62 35 58 34 63 PVQ 34 63 32 65 A1 A2 32 65 5.5 VY1 32 65 34 63 B1 B2 VBA VBAT Tube extensions 41.7 AP100 Pilot port Rc, NPT 1/8 R 12 75 52 67.7 32.3 64 1 2 SMC 4 x 5.5 (Mounting hole) 41.7 1/4" OUT IN 5.5 3/8" 52 30 30 885 SRF Series Dimensions/SRF50 Integrated fittings 80 Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100

MY1

79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160

NCA1

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

IDG

Drain Drain Purge air discharge tubing port for dehumidification M5 x 0.8 Applicable tubing O.D.: 8 14-19-39 36 Series IDG Dimensions (Type M) IDG10M/20M IDG10HM/20HM Port size 1/4, 3/8 71 A Purge air for dew point indicator 41 64 59 11 14 22 OUT IN 10 35 129 B 7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

CJ5-S

50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100 45 22 22 32 32 79 21 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 M26 x 1.5 IY-G10SUS Knuckle Joint Pin Pivot Bracket Material: Stainless steel 440 (Pin) Stainless steel 304 (Bracket, Snap ring) Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) LL CDd9 (CX) LY Dd9 d t m t LH l m L LT (LX) LG LF