Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 12.5 PSIG / 121 in H20 / 300 mbar , 12.5 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

Thomas oil-less linear diaphragm compressor / vacuum pump, 230/50/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 4.35 PSIG / 121 in H20 / 300 mbar , 4.35 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

Mechanically Jointed Rodless Cylinder Series MY2

Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599.

Parallel Style Air Gripper Series MHZ

-10D/MHZL2-10D MHZ2-32D MHZA2, MHZ2, MHZL2 250 Pressure 0.7 MPa 20 200 0.6 MPa Gripping force (N) Gripping force (N) Pressure 0.7 MPa 15 0.5 MPa 0.6 MPa 0.5 MPa 150 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 100 L MHZ 0.2 MPa 5 50 MHF 0 10 20 30 40 50 0 50 100 150 MHL Gripping point L (mm) Gripping point L (mm) MHZ2-16D/MHZL2-16D MHR MHZ2-40D 400 Pressure 0.7 MPa MHK Pressure 0.7 MPa 50 350

20 to 350 L/min2 L/min2 L/pulse30A340 g425 g

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

nozzle 900 400 KNL3-06-200 KNS-R02-110-8 KNL6-06-200 800 350 Flow rate [l/min (ANR)] Flow rate [l/min( ANR)] 700 300 600 250 KNS-R02-090-8 KNL3-06-150 500 KNL6-06-150 200 400 KNS-R02-100-4 150 300 100 KNS-R02-075-4 200 50 100 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] 15-7-5 6 Series VMG Dimensions VMG11/Piping

1

[mmHg] to [kPa]. 1 [mmHg] = 1.3332 x 101 1.3332 x 101 x 350 = 46.662 [kPa] Ex. 2) Convert the units of 80 [kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 x 102 [kgf/cm2] 1.01972 x 102 x 80 = 0.81576 [kgf/cm2] 16-13-13

Table of Contents

Vacuum Equipment Precautions . 349 350 350 352 353 354 359 359 359 360 360 360 361 361 361 362 363 366 369 370 370 371 374 375 377 379 381 383 385 387 389 391 393 395 397 399 401 403 405 405 405 406 407 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Vacuum Equipment

2/3 Port Valve

Rc(PT) Model Main port A B C D E F G H I J K L M VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 163 180.5 203.5 175.5 193 216 219.5 237 260 222.5 240 263 229.5 247 270 55 63 74 VX Flange/32F, 40F, 50F Port size Standard/Vacuum pilot VN VQ Pilot port Rc(PT) Model Flange M L K J I H G F E D C B A 310.5 326 350

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Indicator light Cover dia 1.5 Cross section 0.23mm2 R 3 1 P : AC 80 72.5 54.5 M plug connector (M) 56 61 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Indicator light 89 77 78 R 3 1 P : AC Equation L1=16n+11 L2=16n+22 n: Station (Max. 20) Dimensions L n 2 43 54 75 85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

91.5 (Single) <92.5> 56.5 (Lead wire length) 58 <63> 300 1 P 61.5 <62.5> Cover diameter 1.5 Cross section 0.23mm2 R1 R2 5 3 73.5 1 P Indicator light R1 R2 < >: AC 5 3 Equation L1=16n+10 L2=16n+20 n: Station (Max. 20 stations) Dimensions 2 42 52 75 85.5 L n 3 58 68 87.5 98 20 330 340 362.5 373 15 250 260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Cover dia 1.5 Cross section 0.23mm2 R 3 1 P Indicator light Applicable cord O.D. 3.5 to 7 90.5 83 : AC R 3 1 P M plug connector (M) 300 (Lead wire) 92 80(81) 77(78) Indicator light Cover dia 1.5 Cross section 0.23mm2 66(71) R 3 1 P : AC Dimensins n: Station (Max.20) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350

Siiiil"Tivrc

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

Title not found

3.35 (66) (85) 4.O9 4.84 (104) (123) 5.59 \142) 6.34 (161) 7.09 080) 7.83 4.58 (1es) (z|8) 9.33 \237 ) 10.08 (256) 10.83 \27s) 11.57 \294) 12.32 (313) 13.07 (332) 13.82 (351) 14.57 (370) (38s) 16.06 (408) l ^ 1.81 2.56 (46) (65) 3.3i 4.06 (84) (1m) 4.40 (i22) 5.55 (r4r) 6.30 (160) 7,05 7.80 (179) (1S8)8.54 lz7) 9.29 (236) 10.04 (255) 10.79 11.54 Q74) (23) 12.28 (312) 13.03 (3s1) 13.78 (350

Title not found

Beler 10 tab e ar bn br derais. a5-jcylinder stroke (mm) Refer to Stroke Va alionslabe ,i6)air cusnion ffi Wilh ancushion applcab e ior N4&Ltypeonly 300 400 t t t t t l l l r t t t t t t l t t t l l l l l @Loct< position 350 Rear lock iiManual release type Hffi gAuto switch type + Beler to cataoq and Besr Pneumalcs iordelails. @Number of auto switches 2 pcs.

Adsorption Plate

or less 300 x 300 20 900 or less 339 20 to 350 under 150 to 200 400 or less 23 Over 900 under 200 to 250 450 or less Order a thickness equal to or greater than that shown on the table.

45

A: Orange B: Green 12 13 14 15 16 17 12 13 Stations n 10 stations 11 12 13 14 15 16 stations 298 310.5 323 335.5 335.5 348 360.5 L1 L2 L3 L4 287.5 300 312.5 325 325 337.5 350 (Rail mounting hole pitch 12.5) 192 202.5 213 223.5 234 244.5 255 14 15 16 17 11.5 12.5 13.5 1-6-125 Made to Order Specifications: Series SX3000/5000 Serial Transmission Type With OMRON Corps G71-OD16 45S3 Type Serial

Clean Room Rodless Cylinder Series CYP ø15, ø32

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

VZ1000

wire length) G: 300 mm H: 600 mm (Station n)(Station 1) (mm) 10 9 8 7 6 5 4 3 2 Stations L1 260.5 248 223 210.5 198 185.5 160.5 148 135.5 L2 250 237.5 212.5 200 187.5 175 150 137.5 125 L3 232 216 200 184 168 152 136 120 104 L4 14 16 11.5 13.5 15 17 12.5 14 16 (mm) 20 423 412.5 392 15.5 19 18 17 16 15 14 13 12 11 Stations L1 398 385.5 373 360.5 335.5 323 310.5 298 273 L2 387.5 375 362.5 350