RHC

250 63 1500 up to 1200 250 80 1500 up to 1400 250 100 1500 up to 1500 250 Note 1) Strokes shorter than the recommended minimum stroke (1 to 249 st) can be manufactured, but cushion capability may not be satisfied since the effective cushion stroke for this cylinder is long.

Rotary One-touch Fittings Series KS/KX

Rotating Torque/Permissible Number of Rotations Applicable tube O.D. 5/32/4 1/4/6 5/16/8 3/8/10 12 Rotating torque in-lbf (Nm)NOTE 1) 0.053 0.106 0.124 0.177 0.195 (0.006) (0.012) (0.014) (0.020) (0.022) Permissible number Series KS 500 500 400 300 250 of rotations Series KX 1500 1200 1200 1000 1000 Note) Value under pressure 73psi (0.5MPa).

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy r Motor type e Motor mounting position y Stroke [mm] t Lead [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Nil In-line R Right side parallel L Left side parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol

Air Cylinder Series CM2

CA2 25 50 to 650 mm/s Piston speed 32 CS1 50 to 590 mm/s 40 50 to 420 mm/s CS2 Basic style, Rod side flange style, Rod side trunnion style Mounting Auto switch can be mounted.

Air Slide Table

2.5 V = mm/s V = mm/s V = 100 V = 100 2.0 2.0 Load mass m [kg] Load mass m [kg] 1.5 1.5 1.0 1.0 V = 200 V = 200 0.5 0.5 0.0 0 10 20 30 40 50 60 70 80 90 100 0.0 0 20 40 60 80 100 120 140 L3: Overhang Allowable range: 100 mm L3: Overhang Allowable range: 140 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ12B-75Z MXQ12B-100, 125Z 2.5 2.5 V = mm/s V = mm/s V = 100 V = 100 2.0 2.0

AC Servo Motor Driver

P S T PC18 *BPS Alarm history clear P S T PD12 *DI10 Input signal device selection 10 (CN1-pin 45) P S T PC19 *ENRS Encoder output pulses selection P S T PC20 *SNO Parameter block P S T PD13 *DO1 Output signal device selection 1 (CN1-pin 22) P S T PC21 *SOP communication function selection P S T PD14 *DO2 Output signal device selection 2 (CN1-pin 23) P S T PC22 *COP1 Function selection C

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

AC Servo Motor Driver (CC-Link Type ）

Without S-pattern acceleration/deceleration Without S-pattern acceleration/deceleration With S-pattern acceleration/deceleration With S-pattern acceleration/deceleration S-pattern acceleration/ deceleration time constant S-pattern acceleration/ deceleration time constant amount of droop pulse amount of droop pulse Amount of droop pulse Amount of droop pulse Servo motor speed 0r/min Servo

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

C S S Motor Type S AC Servo motor Cable Content AC Cable Length (L) [m] SSCNET Cable S 0.15m L 0.3m K 0.5m J 1m 1 3m 3 c I/O Connector (For LECSS-S/LECSS2-T)-CS Driver Type LECSS S *LE-CSNS is 10126-3000PE (Connector)/ 10320-52F0-008 Shell kit of Sumitomo 3M Limited or equivalent goods.

Compact Hydraulic Cylinder

CHDAW 40 100 M9BW With Auto Switch Number of auto switches Mounting style Built-in magnet Bore size 40 50 63 80 100 Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

Hydraulic

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

Electric Slide Tables

3 3 2 Lead 16: LES25J 2 1.5 2 2 1 1 1 1 0.5 0 100 200 300 400 500 0 0 0 50 100 150 200 250 300 350 400 450 0 0 0 100 200 300 400 500 0 50 100 150 200 250 300 350 400 450 Speed [mm/s] Speed [mm/s] Speed [mm/s] Speed [mm/s] 2 Series LES Cycle Time (Guide) 1.80 100 mm/s 1.60 1.40 1.20 200 mm/s Time [s] 1.00 300 mm/s 0.80 0.60 0.40 400 mm/s 0.20 30 40 50 60 70 80 90 100 110 120 130 140 150 Stroke

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] Note LE-CP-1-S 190 Standard cable LE-CP-3-S 280 LE-CP-5-S 460 LE-CP-1 140 Cable color Connector D terminal no.

MG

the speed of 200 mm/s.

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

Step Motor Controller

to the control panel,s protective earth (PE).

LEC-OM07605CN

PA23] STO IEC/EN 61800-5-2STO ON/OFF (MR Configurator2) SSCNET/H (MR Configurator2) (MR Configurator2) 1 8 1. 1.6 (1) LECS S 2 T5 S SSCNET/H ACT5, T6 T5 50W,100W ACT7 200W T7 ACT8 400W T8 (2) a) ACT9 T9* 750W * AC200VAC240V 50/60Hz 2 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R 1 9 1. bSSCNET (LECSS-S/LECSS2-T) LE-CSS-MR-J3BUSM cI/O (LECSS-S/LECSS2-T) 1 LE C S

Table of Contents

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Compact Rotary Actuator Series CRQ2

magnet Number of auto switches Shaft type S W Single shaft Double shaft Nil S n 2 pcs. 1 pc. n pcs.