Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8H9 8.5 16.5 90 69 8H9 4.5 54 8H9 6.5 11-9-22 23 Rotary Table: Basic Type/High Precision Type W/ External Shock Absorber, Rack/Pinion Style Series MSQ Size: 10, 20, 30, 50 How to Order CRB2 CRBU2 MSQ B 10 L S M9B 2 CRB1 Number of auto switch MSU Size Nil S n 2 pcs. 1 pc. n pcs.

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Power saving circuit is only available for the Z type. 4 Rated voltage Electrical entry 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D DO Y YO DIN terminal (Type D) DIN terminal (Type Y) With connector Without connector With connector Without connector Electrical entry G H L LN LO M

7

S CAC408 50 50A Flange R 230 VAC G N.O.

Cylinder with Lock Series CLS

[Horizontal] 50 Manual release bolt Forward 140 160 60 W SOL.A SOL.B SOL.C Action 180 70 200 80 250 90 ON ON OFF Forward Backward OFF OFF OFF Locked stop Regulator w/check valve 0.5 s or more 0 to 0.5 s ON OFF OFF Unlocked 3 port normally closed ON ON OFF Forward Pressure center Adjustment ON OFF ON Backward OFF OFF OFF Locked stop SOL.A SOL.C SOL.B 0.5 s or more 0 to 0.5 s Caution ON OFF

ISO Standard Hydraulic Cylinder

1/2 29 11 32 18 28 30 25 42 9 24 42 53 28 63 25 to 800 90 64.3 60 M12 x 1.25 M27 x 2 80 20 55 33 29 1/2 32 13 36 17 30 32 50 13 39 30 36 68 80 25 to 800 115 82.7 80 M16 x 1.5 M33 x 2 93 28 66 40 34 3/4 39 45 20 17 40 41 60 46 9 45 41 76 100 25 to 1000 130 96.9 100 M16 x 1.5 M42 x 2 101 36 67 40 3/4 50 20 19 54 56 50 52 72 47 10 50 91 56 Tolerances CD Bore size (mm) Bore size (mm) V S Y ZZ

2/3 Port Valve

Rated voltage 2 200V AC 50/60Hz 1 100V AC 50/60Hz S Z L 3 110V AC 50/60Hz 4 220V AC 50/60Hz 5 24V DC 6 12V DC 7 240V AC 50/60Hz Other 9 Option Option Part No.

AC

40 53 53 70 70 90 95 95 33 50 64 64 84 89 105 105 110 25 30 41 41 50 50 70 70 70 20 24 35 35 40 40 50 50 50 AC1000 AC2000 AC2500 AC3000 AC4000 AC4000-06 AC5000 AC5500 AC6000 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2 55.2 1/8, 1/4 194 194 229 230.5 309.5 323.5 323.5 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 Option For piping adapter AC2500, 3000, port size 1/2: 40mm, For AC4000, port size

Step Motor Driver （ Pulse input type ）

From the point of 100mm, pushing starts at 30mm/s for 30mm with 50% of pushing force.

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

LEF-OM002xx

H 50 W(kg) A/H W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 LECPA V(mm/s) V(mm/s) LES40 Horizontal Transfer LES40 Vertical Transfer B 60 (2) Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [mm] Note1)

ZP

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

Step Motor Controller

to the control panel,s protective earth (PE).

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

CLA

ZZ StrO ke ~ 131 71 339 65 12.5 80 ~ 148 72 358 65 14.0 81 367 P PG PH PL PW S W X V oLD LH LS LT LX LV r 40 7/16 20 27 50 30 63 % 16 31 80 37 81 51 244 43 11.2 59 F 90 58 266 52 11.2 66 ~ 'f, 106 58 290 52 11 .2 66 'I, 42 11 20 45 153 8 27 13 9 40 207 3.2 42 70 'I, 46 10 21 50 168 0 27 13 9 45 222 3.2 50 80 'I, 48.5 13 23 60 182 0 34 16 11.5 50 250 3.2 59 93 \I, 55 15 23 70 208 0 44 16

Air-hydro Unit

25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24

Compact 5-Port Solenoid Valve

0 100 200 300 400 500 600 700 800 6 CJ2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 60 mm 10 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 63 80 0 100 200 300 400 500 600 700 800 Average speed [mm/s] * Values at extension of a directly coupled cylinder when meter-out speed controllers are used

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -