Cylinder with Lock

Lock Unit Specifications Made to Order Common Specifications (For details, refer to pages 46 to 48.)

5 Port Solenoid Valve

Refer to page 643 for replacement method. 02 1/4 03 3/8 Nil Rc N NPT T NPTF F G Note) For bottom ported, port size is 1/4 only. 611 VQC4000 Series Dimensions: Plug-in Type Conduit terminal 0 1 2-position single: VQC410 156 2 50 23.5 23.5 156 2 106 90 50 Indicator light 11 (12.5) 2(B) port 11 (12.5) 4(A) port 5 3 9 11 4 2 48 38 1 10.5 48 38 24.6 A B 4 2 A 13.5 13.5 30 45 2 x 5.6 Mounting hole

Vacuum Pad

P.48 ZP3A-Y3-B5 P.48 ZP3A-T3-B5 42 Series ZP3 Buffer Applicable Pad List Buffer Assembly Part No. Applicable pad part no. Applicable pad part no. Page Buffer assembly part no. Series ZP3 Buffer assembly part no.

CLS

66 54 68 48 66 54 Cylinder With$ Locking Mechanism 80 CL 60 76 64 86 66 82 70 102 CL1 82 98 86 Be sure to confirm operation after mounting.

STEP MOTOR CONTROLLER, ELECTRIC ACTUATOR CONTROLLER, N31, 0.23 lb

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

(mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 ZG 15 16 18 22 26 ZF 20 21 28 32 41 BG ZE 5 8 10 14 17 CC 9.5 13.5 17.5 20 25 VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 26 27 33 35 45 FX 22 26 32 40 50 AF 35 36 44 48 58 BE 30 38 48 58 68 ZJ 3.5 4.5

CS1

115 204 162 45 60 63 111 39 3/4 1 to 1200 M20 X 1.5 M45 X 1.5 20 46 35 18.5 17 48 115 74 50 60 226 182 63 111 39 Lube Non-lube to 1200 M24 X 1.5 41.5 M56 X 2 25 56 23 60 20 60 140 86 225 71 67 277 49 141 1 to 1200 M30 X 1.5 M64 X 2 51.5 65 30 23 20 60 96 270 70 140 330 80 76 146 49 With auto switch/125 to 200 only (mm) (mm) W/o rod boot W/ rod boot W/o rod boot W/ rod boot Bore (mm) Style

Magnetically Coupled Rodless Cylinder

(variation on the order of 30%) Large variations may occur depending on the surrounding environment. 6, 10, 15, 20 (mm) Auto switch model A B D-M9 D-F9W C D-M9 D-F9W D D-M9 D-F9W D-M9 D-F9W Bore size (mm) D-A9 D-A9 D-A9 D-A9 6 10 15 20 30 32 21.5 23.5 42 44 72.5 83.5 42 44 35.5 30 32 60.5 71.5 26 28 17.5 19.5 46 48 76.5 87.5 46 48 39.5 26 56.5 67.5 Note 1) Auto switches cannot be installed

XL

58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum

Cylinder with Lock Series CLS

Description Material Note Aluminum alloy casting Cast iron Carbon steel Cast iron Copper alloy Brass Carbon steel Rolled steel plate Steel wire CNA In case of aluminum tube In case of steel tube Hard chrome plated Black hard anodized (125, 140, 160) 1 Aluminum alloy 42 Cover A Piston Hard anodized & coated (180, 200, 250) CNS 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63

CATALOG VC10

WIRE 2.79 (70.9) 2.24 (56.9) .35 (8.9) 1.32 (33.5) .48 (12.2) 1.56 (39.6) BOTTOM MOUNTING HOLES .072 (1.83) DIA. X .19 (4.8) DEEP (#2 PLASTITE SCREWS) 3-Way Normally Closed Piped Exhaust 48 SOLENOID VALVES . . .

High Vacuum Angle Valve, XL Series

58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum

7

48 VAC 24 VDC VXB GDM2A-L5 GDM2A-L6 GDM2A-L1 GDM2A-L1 GDM2A-L2 GDM2A-L2 GDM2A-L2 GDM2A-L2 GDM2A-L5 GDM2A-L15 24 VDC 100 VAC 12 VDC 110 VAC VXE 100 VAC 200 VAC 110 VAC 220 VAC With light VXP 200 VAC 230 VAC With light 220 VAC 240 VAC VXR 230 VAC 24 VAC 240 VAC 48 VAC VXH 24 VAC 48 VAC VXF VX3 Gasket Part No. for DIN Connector VCW20-1-29-1 (for Class B) VCW20-1-29-1-F (for Class H) VXA Lead

CRB2/CRBU2/CRB1

LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 CRB1 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Notes) The foot bracket (with bolt, nut, and washer) is not mounted on the actuator

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

JXCx-OMU0004

CCW [CCW] 11() 2 22 =() 34 48 11() 3 22 =() 34 48 * 10.

CL

48 57.5 49.4 59.4 66 58.4 71.4 (Hole dia.)

60

VXK21 VXK22 VXK23 Model 2 mm 3 mm 4.5 mm 6 mm 8 mm Orifice size Orifice size M Solenoid Coil Coil: Class B, Class H M Rated Voltage 100 VAC, 200 VAC, 110 VAC, 220 VAC, 240 VAC, 230 VAC, 48 VAC, 24 VDC, 12 VDC 1/8 1/4 1/4 3/8 1/4 3/8 Port size Normally Open (N.O.)

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manual override (Non-locking) 41.5 [48] 29.1 22.5 13 [ ] for AC L plug connector (L) M plug connector (M) 33.5 5 33.5 2.5 5 2.5 10 5 10 5 48.9 [50.2] 58.5 44.9 4-M5 X 0.8 (Lead wire length) (P/R port) 4-M5 X 0.8 (P/R port) 300 41.5 [48] 52.6 [59.1] 300 29.1 (Lead wire length) 41.5 [48] [ ] for AC Other dimensions are the same as the grommet.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-N7(-L) 67.5 2.8 depth 8.4 PF2M711/721-C8(-L) 68 2.8 depth 6.2 PF2M711/721-N7(-L) 64.6 2.8 depth 6.2 2 x P PF2M7mL-C4/C6/C8/N7(-L) 48 A 48 A 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 C (30.9) 38.5 C (30.9) 3 3 18 OUT IN 18 68 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" OUT IN 68 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6